41S_Rev00
98
Error Message List
Error Message
Reason
Solution
There is dust after
executing Dust
Check function
・
Dirt or dust exists in
optical path.
・
Clean the objective lenses by referring see
section [Cleaning of Objective Lens].
・
When the above processes cannot remove the
dirt or dust, consult the authorized distributor.
X Camera
Y Camera
Trouble
・
The Camera may
be damaged.
・
Consult the authorized distributor.
Heater Oven
Trouble
・
Heater does not
heat.
・
Consult the authorized distributor.
Communication
error
・
Broken the internal
device
・
Consult the authorized distributor.
Temperature
Sensor NG
・
Temperature
Sensor may be
damaged.
・
Consult the authorized distributor.