10
PIPS II Owners Manual and Users Guide
3.10.
Aligning the Beam .......................................................................................... 71
3.11.
Ion-beam Modulation ...................................................................................... 75
3.12.
Manual Shutdown Procedure .......................................................................... 78
4.
Specimen Preparation ..................................................................................... 79
4.1.
Disk Preparation.............................................................................................. 79
4.2.
Specimen Mounting ........................................................................................ 88
4.3.
Ion-beam Milling ............................................................................................ 95
5.
Routine Maintenance and Servicing ............................................................... 98
5.1.
Cleaning the Viewing Port .............................................................................. 98
5.2.
Cleaning the Airlock Vacuum Seals ............................................................... 99
5.3.
Cleaning the Specimen-mount Assembly ..................................................... 101
5.4.
Cleaning the Cold-cathode Gauge Tube ....................................................... 104
5.5.
Cleaning the Shutter ...................................................................................... 106
5.6.
Care of Penning Ion Guns ............................................................................. 108
5.7.
Removing the Cover ..................................................................................... 118
5.8.
Replacing the MDP Oil Cartridge ................................................................. 119
5.9.
Diaphragm Pump Maintenance ..................................................................... 120
5.10.
Cleaning the Work Chamber ........................................................................ 121
5.11.
Cleaning the Shutter Piston ........................................................................... 122
5.12.
Motor Drive Replacement ............................................................................. 123
5.13.
Replacing the Stage Encoder ........................................................................ 124
5.14.
Replacing the Sample Mount ........................................................................ 126
5.15.
Replacing the Bellows Assembly ................................................................. 128
5.16.
Cleaning the Rotate-Shaft Quad-seal ............................................................ 131
5.17.
Checking the Specimen Height ..................................................................... 131
5.18.
Replacing the Gas Manifold ......................................................................... 134
5.19.
Replacing a Mass Flow Controller (MFC) ................................................... 137
5.20.
Replacing the Touchscreen ........................................................................... 139
5.21.
Replacing the High Voltage Power Supply .................................................. 141
5.22.
Replacing the Control PCAs (CPU, I/O) ...................................................... 142
5.23.
List of O-Rings ............................................................................................. 145
5.24.
List of Cables ................................................................................................ 146
6.
Trouble Shooting .......................................................................................... 147
7.
PIPS II Options ............................................................................................. 148