100
PIPS II Owners Manual and Users Guide
1.
Raise the Stage and vent the airlock chamber.
This allows the airlock
cover to be removed after system power is off.
2.
Shut down the power to the PIPS II.
Wait at least 10 min to allow the
MDP to come to a complete stop. Then vent the work chamber by opening
the Vent valve.
3.
Lift off the Viewing Port.
Press the Airlock piston down into the Work
Chamber if it hasn’t already lowered itself.
4.
Remove top cover plate.
Using the pin end of the Specimen Mount
Removal Tool, insert the pin into one of the holes in the top cover plate,
push gently and tilt the plate up and out for removal.
5.
Remove the large O-ring from the top cover.
6.
Remove the smaller O-ring from its groove in the cover.
Use a wooden
toothpick or o-ring removal tool to remove the O-ring. Never use a metal
tool to remove an O-ring.
7.
Clean the underside of the plate and the O-ring grooves with a grease
solvent.
8.
Clean the O-rings on the chassis with a lint-free cloth and replace.
It is
usually not necessary to lubricate these o-rings, however, if they do not
seal properly after cleaning they may be lubricated with Krytox GPL-206
vacuum grease (supplied with the system).
9.
Clean the Airlock quad-ring with a grease solvent and lubricate with
Krytox GPL-206 vacuum grease.
10.
Replace the Top Cover plate, the Viewing Port, and close the Vent
valve.
11.
Consider cleaning the guns, if they have not been cleaned lately.
Venting the system can cause particles to flake off the inner walls of the
anode cup and create a gun short.
12.
Turn on the power.
Pump down to keep the system free of moisture and
minimize oxidation of sputtered materials around the guns. The guns will
need to be purged before use.
