PIPS II O
5.5.
Owners Man
NO
po
6.
sc
7.
8.
Se
Cautio
9.
sc
10
11
Cautio
cathode
the tube
.
Clea
Th
pe
re
ac
Ov
on
m
un
m
1.
2.
M
th
nual and Use
OTE:
Visua
ole insert.
Mount th
rew and clam
Carefully
Position t
ecure the mo
on:
Do not ti
Replace t
rew into the
0.
Plug the c
1.
Close the
n:
Do not a
e gauge at pr
e causing it t
aning th
he pneumati
eriod of tim
duces build
ccumulates m
ver a period
nto the spec
aterial to lo
nderside of th
onths or so w
Raise the
Shut dow
MDP to come
e Vent valve
ers Guide
ally check th
e magnet o
mp.
push on th
the connecto
odule snugly
ighten down
he gauge tu
e notch on th
connector in
Vent valve,
allow the PI
ressures abo
to become c
he Shutte
ically operat
me with only
dup of sputte
material on it
of time, the
cimen. Vent
ose adhesio
he Shutter sh
with regular
stage and v
wn the powe
e to a compl
e.
hat the anod
nto the ano
e electronic
or rotated 1
y in place wit
n hard on the
ube into the
he manifold.
nto the gaug
, restart the
IPS II to ru
ove 10
-3
Torr
ontaminated
er
ted Shutter
y a minima
ered materia
ts underside
e accumulate
ting to atm
on and to p
hould be exa
use.
vent the Airl
er to the PIP
lete stop. Th
de pin is cen
ode assembl
cs module un
180º from th
th the socket
e set screw.
e manifold.
ge tube. Sec
e PIPS II, an
un for more
r since a glo
d.
is designed
al amount o
al on the v
.
ed material m
mosphere als
peel and fla
amined and
lock chamb
PS II.
Wait
hen vent the
ntered within
ly.
Lock it w
ntil it stops.
he magnet
t-set screw.
Locate the
ure the reta
nd pump do
than 1 hr w
ow discharge
d to operate
of maintenan
viewing win
may crack, p
so may cau
ake. For th
cleaned peri
ber.
t at least 10
e Work Cham
n the hole o
with the hex-
.
retaining sc
magnet reta
aining screw
own the syst
with the col
e will occur
for an exte
nce. The Sh
dow and in
peel, and flak
use the sput
hese reasons
iodically, ev
min to allow
mber by ope
106
of the
-head
crew.
aining
w.
tem.
ld-
in
ended
hutter
nstead
ke off
ttered
s, the
very 3
w the
ening
