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PIPS II Owners Manual and Users Guide
3.
Lift off the Viewing Port.
4.
Press the Airlock piston down into the Work Chamber.
5.
Remove the Top Cover plate with the Removal tool.
6.
Pull out the Shutter Guide.
Grasp the Shutter Guide at the front of the
chamber and pull it straight out.
7.
Rotate the Shutter manually 90°-180° to view the underside.
It may
help to pull the shutter slightly forward into the chamber to allow it to rotate
easily.
8.
Use a tissue saturated with freon or methanol and wipe off the
underside.
If the shutter is relatively clean, it may only require manual
wiping.
9.
Remove the Shutter for more thorough cleaning.
If a more thorough
cleaning is required, the Shutter must be removed by unscrewing the M2 × 6
mm retaining screw.
10.
Clean the Shutter.
Sputter deposits on the Shutter should be removed
with an abrasive cleaner after which the Shutter should be cleaned with
alcohol and thoroughly dried before replacing in the chamber.
Figure 5-5 Cleaning the shutter.
