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PIPS II Owners Manual and Users Guide
This assembly should be aligned relatively square with the chamber. Guide
the knob over the toggle stick until it is firmly in place and screw in the two
retaining screws.
Repeat this procedure on the second gun if necessary.
5.6.2.
Wet Cleaning the Penning Ion Guns
As stated earlier, the dry method of cleaning the guns is preferred. However,
once the guns have been used extensively, a more thorough cleaning is
required. The wet method of cleaning involves the use of solvents such as
freon or methanol with an abrasive material. A Scotchbrite pad or 600-grit
emery paper can be used to remove all sputtered material. Once complete and
assembled, the time required to pump down the chamber and to argon purge
the guns is significantly longer when compared to the dry method of cleaning.
If it is necessary to use this method, then this is a good time to also clean the
Shutter and the inside of the Work Chamber to reduce overall down time.
To Remove the Gun
1.
Shut down the power to the PIPS II.
Wait at least 10 min to allow the MDP to come to a complete stop. Then vent
the Work Chamber by opening the Vent valve. Since the HV cables are not
unplugged, there is no need to remove any of the side covers from the PIPS II.
Unplug the power cable from the back of the system.
2.
Remove the gun knob from the gun housing.
Rotate the gun knob to the 10° Top position. Use the 3.0mm hex wrench to
remove the two screws from the gun knob and pull the knob from the gun
housing.
3.
Lift off the Viewing Port and the top cover plate from the chamber.
Place one hand at the back of the gun and with the other hand push on the gun
housing from inside the chamber. Remove the gun.
To Disassemble the Gun
1.
Withdraw the ion source from the gun housing.
Use the 3.0mm hex wrench to remove the single screw from the molded
connector assembly then slowly pull on the toggle stick to withdraw the ion
source from the gun housing.
2.
Lift the magnet assembly off the rear polepiece.
