12
PIPS II Owners Manual and Users Guide
List of Figures
Figure 1-1 PIPS II, basic system, front view. ................................................ 17
Figure 1-2 Work chamber, top view. .............................................................. 20
Figure 1-3 Work chamber, cross-section view. .............................................. 21
Figure 1-4 Vacuum system. ............................................................................ 22
Figure 1-5 Gas-control system. ..................................................................... 23
Figure 2-1 View of connections on rear of cabinet. ....................................... 28
Figure 2-2 Camera system mount onto the PIPS II. ...................................... 29
Figure 2-3 Microscope front to back alignment. ............................................ 32
Figure 2-4 Microscope left to right alignment. ............................................... 33
Figure 3-1 Milling page. ................................................................................. 34
Figure 3-2 Setting the milling duration. .......................................................... 35
Figure 3-3 Setting the modulation mode. ....................................................... 36
Figure 3-4 Setting the language. .................................................................... 37
Figure 3-5 Recipes page. ................................................................................. 38
Figure 3-6 Status bar, showing a recipe is running. ........................................ 38
Figure 3-7 Status bar, showing a recipe is completed successfully. ............... 39
Figure 3-8 Edit recipe page. ............................................................................ 40
Figure 3-9 Adding a recipe step. ..................................................................... 41
Figure 3-10. Deleting a recipe step. ................................................................ 41
Figure 3-11 Copying a recipe. ........................................................................ 42
Figure 3-12 Creating a new recipe: enter the name. ....................................... 42
Figure 3-13 Alignment page. .......................................................................... 43
Figure 3-14 Camera page. ............................................................................... 44
Figure 3-15. Viewing page. ............................................................................ 45
Figure 3-16 General Settings page. ................................................................. 46
Figure 3-17 Setting the gas inlet used for the guns. ....................................... 46
Figure 3-18 Choosing the calibration table used for the Argon gas inlet. ..... 47
Figure 3-19. Milling sectors. .......................................................................... 48
Figure 3-20 Heaters settings page. .................................................................. 49
Figure 3-21 Auto-terminator page. ................................................................. 49
Figure 3-22 Gas flow calibration. ................................................................... 50
Figure 3-23 Motorized guns calibration. ........................................................ 51
Figure 3-24 Properly aligned stage in the Home position. ............................. 52
Figure 3-25 Stage home position calibration. ................................................. 52
Figure 3-26 Temperature sensor calibration. ................................................. 53
Figure 3-27 Pressure calibration. .................................................................... 53
Figure 3-28 Foreline gauge calibration. .......................................................... 54
Figure 3-29 Cold Cathode gauge calibration. ................................................ 54
Figure 3-30. Vacuum page. ............................................................................. 55
Figure 3-31 Gun Readings. ............................................................................. 56
Figure 3-32 Gun Tilt page............................................................................... 57
Figure 3-33 Network page. ............................................................................. 57
