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PIPS II Owners Manual and Users Guide
8.
Clean and inspect the 2 O-rings.
Replace the O-rings in the pockets in
the Gas Manifold.
9.
Install the replacement MFC.
Note that there is a pin in the top of the
Gas Manifold that mates to a hole in the MFC.
10.
Carefully plug the power/signal cable into the MFC.
The connector and
wires are delicate.
Figure 5-22 MFC removal.
Unplugging the power/signal cable from the MFC.
Figure 5-23 MFC removal.
Loosening the M3 screw that secures the MFC.