PIPS II O
3
Owners Man
Fi
.2.1.
Ion-g
Th
Ho
am
ion
re
To
th
va
ho
se
Th
pu
au
flo
no
On
To
Sw
15
sy
co
vo
=
at
Gu
sta
nual and Use
gure 3-37 M
gun Purgin
he PIGs are v
owever, eve
mounts of ou
n currents (
sult in sudde
o minimize t
is is necessa
acuum, i.e.,
ours or the c
ttings are va
he gas flow
urging. Once
utomatic valu
ow of both g
ot likely be
nce purging
o Purge th
witch the gas
5 min if the g
ystem has b
ontinued unt
oltage of 5.0
0 sccm). Fo
the end of th
uns may be
able above 0
ers Guide
Milling page.
ng
very efficien
en when the
ut-gassing fro
(discharge cu
en bursts of
this effect, t
ary wheneve
whenever th
chamber ha
alid only afte
w settings are
e the guns ha
ues. If furthe
guns be set
stable abov
is complete
e Guns Ma
s flow to ma
guns have be
been vented
til a gun cu
keV and th
r best result
he day, and t
purged at u
0.3 sccm, but
nt and operat
e argon gas
om material
urrent >10
ionization th
the PIGs mu
er the gun co
he PIPS II
s been vent
er the guns h
e set to 0.3
ave been op
er purging is
to 1.0 sccm
ve 0.3 sccm
, set the gas
anually
anual, and se
een under va
d to atmosp
urrent of <1
he gas flow t
s, it is recom
the guns be
up to 1.0 scc
t this is acce
te with an ex
s flow to th
ls in the ion
µA). In extr
hat make the
ust be purge
omponents h
has been sw
ted. In addit
have been pu
3 sccm on s
erated, the g
s needed, it
m using the M
m, but this is
flow back to
et both guns
acuum. Purg
phere. In an
10 µA is ob
turned off to
mmended tha
purged over
cm, however
eptable durin
xtremely low
he guns is t
guns will pr
reme cases,
e PIGs unsta
ed with dry
have been e
witched off
tion, the aut
urged thorou
start-up in o
gas flow wil
is recomme
Manual mod
s acceptable
o Automatic
to 1.0 sccm
ge for 4 hour
ny case, pu
btained with
o both guns (
at maintenan
rnight.
r, gas flow w
ng purging.
w gas throug
turned off,
roduce signif
out-gassing
able in opera
argon. Typic
exposed to a
for more th
tomatic gas
ughly.
order to faci
ll be reset to
nded that th
de. Gas flow
e during pur
c mode.
m. Purge for a
rs minimim
urging shoul
h an acceler
(manual gas
nce be perfo
will not like
60
ghput.
small
ficant
g will
ation.
cally,
poor
han 4
flow
ilitate
o their
he gas
w will
rging.
about
if the
ld be
rating
flow
ormed
ely be
