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PIPS II Owners Manual and Users Guide
4.
Clean the window.
Use a nonabrasive cleaner or a 2-4 µm diamond
polishing compound. Replace the window if deposits are too difficult to
remove.
5.
Replace the window into the capsule O-rings.
6.
Replace the Viewing Port capsule.
7.
Evacuate Airlock chamber.
Slide down the slider on the Stage panel,
while pushing down on the window to properly seat it.
Figure 5-1 Viewing port and o-rings.
5.2.
Cleaning the Airlock Vacuum Seals
The Airlock vacuum seals should be cleaned on a monthly basis with regular
use.
NOTE:
This procedure is necessary when the piston cannot be completely
raised to its upper position due to buildup of sputtered material on the Airlock
O-ring.
