Solarus 950 Owner’s Manual and User’s Guide
9
Safety and Serviceability
Cautionary Notes
Servicing
The turbo-molecular drag pump and diaphragm pumps require periodic mainte-
nance. Please see the individual operator manuals of these instruments (included
in the shipping crate) for instructions. See the maintenance section in this manual
for instructions to remove these pumps from the instrument.
C
AUTION
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Unplug the AC mains cable before opening the system, to avoid electric
shock. Dangerous high voltages and currents may be present inside the case
during operation. Do not reach your hands inside the system while the power is on
or if the AC mains cable is plugged in.
C
AUTION
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High pressure cylinders can be dangerous when not properly secured.
Be sure all cylinders are secured according to applicable safety codes..
C
AUTION
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The RF power supply can generate 85 Watts of power, which can cause
burns if the live conductors are touched. Do not operate the unit unless the RF
cables are plugged in properly. Do not defeat the safety mechanisms and touch the
RF antenna when the system is attempting to generate a plasma.
C
AUTION
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Hydrogen and Oxygen are combustible gasses. During normal
operation these gasses are fully combusted in the plasma and are not a danger. If
the gas supply connections or lines leak into an enclosed space, it is possible for
a dangerous concentration to accumulate. It is important to install and maintain
these connections properly in order to prevent leaks.
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