34
Solarus 950 Owner’s Manual and User’s Guide
Creating Custom Recipes
Advanced users have the option of creating custom recipes.
To create a custom recipe:
1.
Touch
Options
near the bottom of the touch screen.
2.
Choose an existing recipe which is similar to the recipe you will be creating.
Use the
Next
button at the bottom of the screen to cycle through the recipes
until you find one that is suitable.
3.
Touch
Copy
. A new recipe page appears with a list of parameters matching
the recipe you selected. These parameters are editable, and include the follow-
ing options.
C
AUTION
:
Altering certain parameters can create situations which could result in
damage to samples and/or the plasma system.Custom recipes should be created
and used with care.
If you wish to use the duty cycle feature, you must create a custom recipe. This
feature might be used for temperature sensitive samples.
P
ARAMETER
D
ESCRIPTION
AND
E
DITING
S
TEPS
Title
The name you want to call your recipe. Touch
Clear
and use the key-
pad to enter a new title.
Visible
Allows you to hide existing recipes that are not being used. For exam-
ple, if you don't have a Gas 3 (Ar) configured, the visibility on all Ar/
O
2
recipes will automatically be set to
No
.
Cleaning Time
Touch the digit you want to change and use the
+
and
-
buttons to adjust
the time.
Set the
duty cycle
by touching the appropriate duty cycle value (100%,
50%, 25%, 10%, or 5%). The default is 100%, which means the clean-
ing is uninterrupted.
Set the
clean on time
by touching the appropriate button (60 s, 30 s, 15
s, 10 s, or 5 s).
For example, if you choose 50% duty cycle and 60 s cleaning period,
the system will cycle the RF Power 60 s on and 60 s off until the total
cleaning time is reached.
Vacuum Target
Most users should not adjust this value. This adjusts the depth of
vacuum that must be achieved before a plasma can be initiated. This
setting does not actively attempt to change the pressure, it only moni-
tors the pressure. The pressure is set by the combination of gas flow
and turbo speed.
Vacuum Range
Most users should not adjust this value. This sets the acceptable range
of deviation from the vacuum target.
Pumping
Switchpoint
Most users should not adjust this value. This sets the vacuum level at
which the turbo pump begins a deeper evacuation of the sample cham-
ber.
!
