Solarus 950 Owner’s Manual and User’s Guide
47
Troubleshooting
If the system does not pump down, it may be caused by the top cover not seating
properly. In such a situation, please follow these steps:
1.
Press down on the top door of the chamber.
2.
If this does not solve the problem, there may be a dirty o-ring. Inspect the o-
rings on the top cover as well as on the holder adapters and plugs.
3.
Clean any lint or particles from the surface of the o-rings. If there are any cuts
or nicks in the o-rings, replace them.
Follow the steps below if the following error message appears:
Error Message: Mass flow controller could not match the specified gas flow.
1.
Be sure gases are connected and the pressure is correct (25 psi).
2.
Be sure the system has been powered on for at least 45 minutes. This is
required for the mass flow controllers to function properly.
3.
Verify that the H
2
in-line filter is not clogged.
4.
If no gas is connected, i.e., you are using air as the process gas, be sure you
are not using the standard H/O recipe. The H mass flow controller cannot
meet the flow rate with atmospheric pressure. See the examples in the creating
custom recipes section for instructions on using air as the process gas.
5.
Check for a leaking gas inlet line. The easiest way to test this is to purge the
gas lines, as described in the installation section.
