Chapter 3. Preparation of System
EQ-77X LDLS® Operation Manual
14
of
31
#
Component
Description
1
Nitrogen Purge Inlet
These are the fittings for the nitrogen purge gas. Product use
without nitrogen purge gas will result in the buildup of ozone
(from atmospheric oxygen) and attenuate the light output in the
220-280 nm band, as well as below 200 nm in the presence of
atmospheric oxygen and water vapor.
2
Nitrogen Purge Outlet
3
Cooling Fluid Inlet
These fittings are for connection of cooling fluid required by the
lamp.
4
Cooling Fluid Outlet
5
Control Connector (21-pin mixed D-
sub)
Provides various power and control signals to/from the power
supply controller. No other connector or cable may be used with
the
EQ-77X
other than the one supplied.
6
Retroreflector Assembly
Reflects radiation back to the light source.
7
Lamp Window
The lamp windows at the optical output provide protection from
the high-pressure bulb inside the lamp head. An internally-
threaded SM1 adapter is provided for easy connection of optical
hardware.
EQ-77X
Lamp Head
Figure 3.
EQ-77X
Lamp Head Components
Table 5.
