Chapter 4. EQ-77X Setup
EQ-77X LDLS® Operation Manual
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orientation will cause the plasma position inside the bulb to shift slightly and may cause performance
variations.
Set up the lamp head unit with appropriate ultraviolet safety measures and laser light safety measures in place.
It is recommended that any enclosure or aperture-blocking hardware utilize switches wired to the
EQ-77X
external interlock circuit.
for dimensional drawings of the lamp.
The system is now ready to operate
.
4.3 Chiller Information
The system must be connected to a cooling system. See
for the recommended chiller.
3. Connect the black 21-pin mixed D-sub interconnect cable from the power supply controller to the lamp head.
4. Connect nitrogen purge gas to the lamp head. Refer to
above.
5.
Connect cooling fluid to the lamp head. Refer to
above.
6.
Connect user’s control system to the I/O interface connector per
10.2 I/O Connector Pin Assignment
7. Alternately, if using the EQ-99-RC remote control module, place it on a clean rigid surface. Install the supplied
15-pin cable from the power supply controller to the EQ-99-RC.
8.
Connect AC input power source to the power supply controller unit.
