-
Rotate Transfer Rod counter C.W. until Rod completely free
-
Pull back the Transfer Rod till it locks
-
Close Air lock lever ( MV – 1 ) to isolate SC from SCE
-
Turn off camera
-
Check the pressure for IP
1
< .5x10
-‐7
, IP
2
<1.5x10
-‐7
, IP
3
<6x10
-‐6
Preparing for OBSERVATION OF SECONDARY ELECTRON
IMAGE:
1-‐ To TURN HI VOLTAGE ON. Do the following
-‐ Open SC Air Lock Valve (pull and left)
-‐ Push ON (ON ADJ)
2-‐FLASHING: So if > 8 hours since last flash, or if emission current becomes unstable
after 2 to 8 hours
-
Turn OFF HV (READY)
-
Push FLASH (STANDBY)
-
Push ON ( ON ADJ ) and keep eye on IP1 & Emission current ( when IP
1
pressure goes up degasses the tip)
-
Must Wait for Two Minute
then TURN ON HI VOLTAGE
-
Note: The Emission Current should be 10
µ
A, if not push ON (ON ADJ )
3-‐ Do ABC to adjust brightness and contrast
4-‐ Go to TV Rate on SCAN SPEED section (F or S)
5-‐ Need to Do Beam Alignment
-
Go to COLUMN ADJUSTMENT or PF3 (Key Board )
-
Chose Beam Align
-
Using X & Y on STIGMA/ALIGNMENT section, you need to get the image in
the center of display monitor 1
-
Push EXIT ( PF 16 ) to exit Alignment mode
-
Go to TV Rate
6-‐ Need to Do Aperture Alignment
-
Find a smallest spot on your speciman to be able to work with 10K
magnification
-
(use joystick to move the stage)
