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4.3.38 Astigmatism
Correction
Figure 4.3.38 Astigmatism Correction
An astigmatism correction (to correct any electron beam distortion) on the observation image
can be performed here. Perform this adjustment if focusing operation becomes difficult
because certain amount of time has passed or after the column is serviced including filament
replacement. An astigmatism correction part is displayed in the Information / Comment area
on the operation window by selecting [Astigmatism Correction] (see 4.3.6) from the [Setting]
menu. For the details, refer to 4.2.11.
2
Astigmatism Correction.
NOTE
: Astigmatism correction is enabled only when electron beam irradiation is in
progress (in the HV-ON status).
Astigmatism 1 scroll bar / Astigmatism 2 scroll bar:
Corrects the aberration.
Reset button:
Returns the sliders of Astigmatism 1 and 2 to the center (recover the original
condition without astigmatism correction).
Close button:
Hides the astigmatism correction operation part and displays the Information /
Comment area on the operation window.
