Contents
1.
Outline ...................................................................................................................... 1
2.
Specifications ............................................................................................................ 1
3.
External Dimensions ................................................................................................. 3
4.
Operating Procedures ............................................................................................... 5
4-1
Piping and electric wiring ..................................................................................... 5
4.2
Startup and warm-up ........................................................................................... 6
4.3
Vaporization ......................................................................................................... 7
5.
Peripheral Equipment ............................................................................................... 7
6.
Procedures for Disconnecting Valve Cable and Heater Cable Connectors .............. 8
7.
Troubleshooting ........................................................................................................ 8
8.
Instructions for Handling ......................................................................................... 11
9.
Other Instructions for Use ....................................................................................... 12
9.1
Entry of air bubbles into liquid supply line .......................................................... 12
9.2
Clogging by vaporization.................................................................................... 13
9.3
Pressure loss of internal nozzles ....................................................................... 14
9.4
Valve travel for set temperature ......................................................................... 14
9.5
Purging procedures ........................................................................................... 14
9.6
Temperature control .......................................................................................... 14
9.7
Setting of pressure of liquid supply tank ............................................................ 14
9.8
Moisture contents (dew points) of carrier gas and purging gas .......................... 15
9.9
Carrier gas and liquid supply pressure .............................................................. 15
10.
Example of Preparation of Secondary Heating Piping ............................................ 15
11.
Examples of Temperature Regulator Wiring ........................................................... 16
12.
CHEMICAL CONTENT INFORMATION(The Six China RoHS Restricted
Materials)Example of Preparation of Secondary Heating Piping ................................... 17
