Inficon Easy Rate ERD E1 Series Instruction Sheet Download

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Easy Rate Sensor

PN 074-677-P1A

Using Teflon

™

tweezers, gently pry the crystal holder spring out of the sensor body.

(See

Figure 10

Figure 10 Crystal holder spring

NOTE:

Move the spring circularly until the gap between the two ends is found and
pry it out from there.

Loosen the two 0-80 screws and remove the 0-80 retainer plate. (See

Figure 11

Figure 11 Loosen screws and retainer plate

Pull the ceramic retainer assembly from the sensor body and inspect the cavity in the
sensor and components for debris or any possible contamination. If observed, clean
the sensor body and components.

Solder the wire onto the microdot connector. Prior to soldering, the wire end may need to
be crimped to fit the microdot slot.

For standard sensors, the wire should be soldered in parallel to the connector as
shown in

Figure 12

Figure 12 Standard sensor wire positioning

Summary of Contents for Easy Rate ERD E1 Series

Page 1: ... dual sensors This product has a warranty of one year from the date of purchase This warranty covers defects of materials or workmanship under normal proper use and service Refer to the INFICON website for warranty details The batch number of the sensor can be found on the packaging label It is important to document this number for any necessary warranty claims Figure 1 Easy Rate Sensors ...

Page 2: ...ring use a source shutter to shield the sensor during initial soak periods If the crystal is hit with even a minute particle of molten material it may be damaged and stop oscillating Even in cases when it does not completely stop oscillating it may immediately become unstable or shortly after deposition begins instability may occur Plan the installation to ensure there are no obstructions blocking...

Page 3: ...nd attach the sensor head as outlined in the general guidelines in Figure 2 3 Temporarily install the feedthrough 4 Form bend measure and mark the sensor tubes as required to achieve the desired result CAUTION Do not form the sensor tubes with a bend radius of less than 1 3 cm 0 5 in CAUTION Do not use the sensor body as a leverage point when bending the tubes doing so stresses the weld joints on ...

Page 4: ... tube 8e Thoroughly clean the braze joint and helium leak test before installing the sensor and feedthrough into the process chamber 9 With all water tube connections and the air tube connection installed install the sensor and feedthrough assembly into the process system and secure all retaining hardware 10 Shield the in vacuum cable from heat radiating from the evaporant source or the substrate ...

Page 5: ...holder is only partially exposed See Figure 3 Figure 3 Acceptable shutter end extension When deactivated the shutter should completely cover the crystal opening Repositioning of the shutter or actuator may be required to achieve optimum on off positioning If operation is found to be impaired contact INFICON See Figure 4 Figure 4 Shutter completely covering the crystal opening NOTE A solenoid valve...

Page 6: ...f the shutter module coincide with the 4 40 tapped holes in the rear side of the standard crystal sensor assembly 4 Secure the shutter module to the standard crystal sensor assembly utilizing the 4 40 hardware provided with the shutter assembly 5 Position the shutter directly over the center of the crystal opening Tighten the shutter cap screw Make certain the shutter when activated does not block...

Page 7: ...hes also interfere with adhesion of the deposited material on the crystal To avoid crystal contamination insert the crystal directly from its package into the crystal holder never handle the crystal with bare or gloved fingers never drop or place the crystal onto a work area Crystal Replacement When transporting the crystal from the package to the crystal holder use Teflon tweezers or a vacuum pen...

Page 8: ...eeds of the process is essential to the long term successful operation of the sensor Sensor maintenance also impacts reproducibility of results The following are the components that should be inspected during maintenance Crystal Holder The crystal holder makes electrical and thermal connection to the crystal at the crystal perimeter Coating material will eventually start to build up on the crystal...

Page 9: ...ay occur during a sensor repair WARNING Do not attempt to repair a sensor under warranty Doing so will void the warranty Electrical Test If an issue with the sensor is suspected first check the sensor assembly for continuity and isolation Measure continuity with a digital multimeter DMM capable of measuring 50 MΩ Figure 7 shows the standard sensors The same test can be applied to the right angle s...

Page 10: ...n is applicable to all versions New items required Crystal Retainer Assembly Easy Rate Sensor PN 784 205 G1 Coax Connector Female Flat Sides PN 784 323 P1 Reusable items 0 80 Retainer Plate Easy Rate Sensor PN784 322 P1 Screw 0 80 x 0 125 in LG Slot Pan HD SS GP PN 080 011 P3 Holder Finger Spring Easy Rate Sensor PN 784 405 P1 Crystal Holder Assembly Easy Rate Sensor PN 784 204 G1 Items not provid...

Page 11: ...e microdot connector by the flat sides using an adjustable wrench and loosen it See Figure 8 Figure 8 Microdot connector NOTE If the wire inside is still intact the connection will break as the connector comes loose This is normal and expected 2 Pull the crystal holder out of the sensor body See Figure 9 Figure 9 Remove crystal holder ...

Page 12: ... plate See Figure 11 Figure 11 Loosen screws and retainer plate 5 Pull the ceramic retainer assembly from the sensor body and inspect the cavity in the sensor and components for debris or any possible contamination If observed clean the sensor body and components 6 Solder the wire onto the microdot connector Prior to soldering the wire end may need to be crimped to fit the microdot slot For standa...

Page 13: ...will help reduce the height of the solder joint To insert the connector into the sensor head the wire will need to be straightened Figure 13 Right angle single and dual sensor wire positioning 7 Add the wire insulation over the wire The insulation does not need to cover the connector pin or solder joint Trim any excess insulation leaving some wire exposed 8 Thread the now wired connector onto the ...

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Inficon Easy Rate ERD E1 Series, Instruction Sheet

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