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Easy Rate Sensor
PN 074-677-P1A
NOTE:
In many cases, installing multiple sensors to monitor one source can improve
thickness accuracy for the product, using a feature known as multiple sensor
averaging. The installation requirements for multiple sensors are the same as for
a single sensor installation, and the locations chosen should be as defined in
. Consult the Quartz Crystal Microbalance (QCM) thickness
measurement instrument operating manual for more information regarding the
availability of this feature.
Steps for installation:
1
Assemble the sensor mounting bracket (provided by customer) on the process
system.
2
Temporarily position and attach the sensor head as outlined in the general guidelines
in
.
3
Temporarily install the feedthrough.
4
Form (bend), measure, and mark the sensor tubes as required to achieve the desired
result.
CAUTION
Do not form the sensor tubes with a bend radius of less than
1.3 cm (0.5 in.).
CAUTION
Do not use the sensor body as a leverage point when bending
the tubes; doing so stresses the weld joints on the tubes and
may result in their failure.
CAUTION
Do not start a bend within 1.3 cm (0.5 in.) of a weld joint.
5
Build the sensor/feedthrough assembly.
6
Remove the sensor and the feedthrough.
7
Cut the water cooling tubes and the air tube to the proper length. Verify that they are
clear of metal particles by forcing compressed air through the tubing.
8
Connect the water cooling tubes and the air tube directly to the feedthrough, or use
vacuum rated couplings.
