Inficon PGE500, Operating Manual

Page 1: ...tinb21e Pira PGE e1 2016 06 ani Gaug E500 e Enhanc Ope Incl ced erating Manu EU Declaration o 1 al f Conformity...

Page 2: ...1 2016 06 Product Identification In all communications with INFICON please specify the infor mation given on the product nameplate For convenient refer ence copy that information into the space provid...

Page 3: ...all devices by default on pin 9 The part number PN can be taken from the product nameplate If not indicated otherwise in the legends the illustrations in this document correspond to the product with...

Page 4: ...iable for indirect or consequential damages that result from the use or application of this equipment Any examples or diagrams included in this manual are provided solely for illustrative purposes Bec...

Page 5: ...th or se oss mation about prac al or physical haza esult in minor or m oss mation that is critic of the product e located on or ins s voltages may be AUTION OTICE SHOCK HA ctices or circumsta ards whi...

Page 6: ...nated Adhere to the relevant regulations and take the necessary precautions when handling contamin ated parts Communicate the safety instructions to all other users Liability and Warranty INFICON assu...

Page 7: ...peration 15 2 3 Electrical Conditions 16 2 3 1 Proper Equipment Grounding 16 2 3 2 Electrical Interface and Control 17 2 4 Overpressure and use with hazardous gases 17 2 5 Gases other than Nitrogen ai...

Page 8: ...orr Pa 67 7 6 Linear Analog Output 0 10 V Torr 68 8 RS485 RS232 serial communications 70 8 1 Device Specific Serial Communication Info 70 8 2 RS485 RS232 Command Protocol Summary 71 9 Service 74 9 1 C...

Page 9: ...ed Pirani gauges increase the measuring range to just above atmosphere The INFICON PGE500 Pirani Gauge Enhanced module provides the basic signal conditioning required to turn a convection vacuum gauge...

Page 10: ...Teflon Housing electronics aluminum extrusion Internal volume 26 cm3 1 589 in3 Internal surface area 59 7 cm2 9 25 in2 Weight 340 g 12 oz Permissible temperature Operating 0 40 C Storage 40 70 C Bakeo...

Page 11: ...ctron compatible 48 53 B7F5 log linear 1 8 V dc 1 V decade P 10 V 5 57 61 B7F linear 0 10 V dc 68 RS232C RS485 interface ASCII protocol Supply voltage 12 28 V dc 2 W protected against power reversal a...

Page 12: ...8 1 ns itting N 16 ISO KF N 25 ISO KF N 40 ISO KF N 16 CF R N 40 CF R VCR female VCR female 8 NPT male tinb Dimension A mm inc 25 9 1 1 25 9 1 1 25 9 1 1 34 1 3 34 1 3 43 7 1 7 40 9 1 6 21 8 0 8 b21e1...

Page 13: ...t is not IEC60320 AC supplied AC m Accessories for PGE300 500 240 V ac dc 2 5 A 60 W 2 m 6 ft of the power supp t listed above is re power entry recep ains power cord s W ply may be used w equired The...

Page 14: ...has bee s INFICON canno m various installat If you have any q f this product plea cautions Ge hould never be op NG There are no side the product e duct enclosure is r personnel WARNING tinb ormation t...

Page 15: ...ed for sound elec g Do not use if th n has been compro cautions Se e vacuum port on nted is electrically priate power sourc r to the unit before r to the unit if a ca operating normally act qualified...

Page 16: ...zardous v death are present vacuum port on w nted is electrically ou are in doubt ab ing of your equipm ed operation of the gauge must be con Use a ground lug ange if necessary tinb e periodically ins...

Page 17: ...re inside vacuum chamber g INFICON gauge ng 1000 Torr abso e an equipment fa ays implement fail pressure relief dev a malfunction cou essure relief devic rotect personnel f ll conductors whic discharg...

Page 18: ...NG Do not attem r air without referr ges and modules a air Do not attemp arbon dioxide CO other gas is prope uge with different g more complete disc tinb odule is not intend Torr DO NOT ex sensor If y...

Page 19: ...t s may cause a de PGE500 too close ement and contro a source of heatin g vents E500 with its main Pressure reading e mounted horizonta tle to no effect measurements abo shown below his device in an e...

Page 20: ...t Orien Mount the PGE the effect of an gauge ntation E500 with port dow ny particles or con Vacuum cha tinb wn if possible to densation from co amber Vacuum b21e1 2016 06 help minimize ollecting in th...

Page 21: ...e vacuum gaug operly grounded fo e equipment Whe e used to ensure fittings such as N ay not allow for me e and the vacuum e or larger copper und lug on your v re it will be subject ause unstable read...

Page 22: ...nnector DE 9P or 15 pin D sub connector DE 15P and you can use your existing cables and electronics For new installations fabricate a cable to connect to the signals functions you want to use When usi...

Page 23: ...lly Closed 3 Supply 12 28 V dc 4 Power Ground 5 Analog Output 1 Log Linear 1 8 V Log Linear 1 15 10 215 V or Non linear Granville Phillips Mini Convectron compatible 6 Relay 1 Common 7 Relay Disable D...

Page 24: ...nalog Output 1 Log Linear 1 8 V Log Linear 1 15 10 215 V or Non linear Granville Phillips Mini Convectron compatible 6 Analog Ground 7 RS232 TX This pin is typically connected to pin 2 of your PC seri...

Page 25: ...calibration by setting zero and atmosphere with the gauge installed in your actual system Please note the following Setting zero SET VAC Setting zero optimizes performance of the gauge when operating...

Page 26: ...tup parameters operation for adde soft keys located play These keys a nctions available D display will identify ramming press an te a choice of func on the display to er desired tinb he pressure decre...

Page 27: ...m the gauge should be evacuated to a pressure below 1 00 10 4 Torr 2 Go to the SET VAC screen When the vacuum system pres sure is below 1 00 10 4 Torr press the PRESS TO SET VAC key The zero point dis...

Page 28: ...own local uncorrected barometric pressure is 760 Torr enter 760 in the SET ATM screen The main pressure mea surement screen will now display 760 Torr while the gauge is at atmosphere It is good practi...

Page 29: ...ss Assuming the address offset RS485 OFFSET is equal to 0 setting the ADDR to a 5 will make the address be 0x05 in hexa decimal A 15 will set the ADDR to 0x0F in hexadecimal Note that the address ADDR...

Page 30: ...ut see Analog Output section a Set the minimum pressure b Set the minimum voltage corresponding to the minimum pressure c Set the maximum pressure d Set the maximum voltage corresponding to the maximu...

Page 31: ...section 7 3 the expected analog output at 760 Torr is 7 881 V Use the INC or DECR soft keys in the AOUT CAL screen to set the analog output to 7 881 V as rec orded by your voltmeter PLC etc Alternati...

Page 32: ...h when the displayed pressure is zero To perform this adjustment pump your system down to below 0 1 mTorr and SET VAC zero so that the PGE500 displayed pressure shows 0 0 mTorr Connect the PGE500 anal...

Page 33: ...lso reads 0 0 mTorr 4 4 Return to Factory Default Settings You can reset all values to the original factory default settings by simultaneously pressing the upper left and upper right soft keys The use...

Page 34: ...nting position and N2 are consid ctivity but even N ngs at higher pres o atmosphere usin to 40 Torr after the aces the N2 in the uch more significa as described below tinb h different ga enses heat lo...

Page 35: ...ophilizatio hange significantly an significantly ch rection should be inants condense coat or response to diffe ge can be calibra s are small enough the gauge should and possible clean sing gases othe...

Page 36: ...or may not b d note the followin the gas is nitrogen rr the gauge will r the gas is argon A gauge will read ab kfilling your vacuum es a pressure of 76 about 23 Torr Co tinb re test gases N2 s actual...

Page 37: ...in injury to per sonnel and or damage to equipment Suggested precautions when using gases other than nitrogen N2 Install a pressure relief valve or burst disk on your chamber to protect it from overp...

Page 38: ...1 5 3 1 7 6 14 7 29 9 72 5 143 KR 0 0 0 1 0 2 0 5 0 4 1 0 2 3 4 8 9 5 23 5 46 8 CO 2 0 0 0 1 0 2 0 5 1 1 2 3 4 4 11 0 22 2 54 9 107 O 2 0 0 0 1 0 2 0 5 1 0 2 0 5 0 9 7 19 8 49 2 97 2 He 0 0 0 1 0 2 0...

Page 39: ...72 4 14 4 91 6 42 Freon 12 275 611 1 05 1 62 2 45 2 96 3 32 3 79 4 68 5 99 KR 91 1 217 400 700 1 28 1 78 2 29 2 57 2 74 3 32 CO 2 210 489 950 1 71 3 34 4 97 6 59 8 22 9 25 12 3 O 2 194 486 970 1 94 4...

Page 40: ...1 4 12 0 12 7 Freon 12 6 89 7 63 8 28 8 86 9 42 9 76 9 95 10 5 11 1 KR 3 59 3 94 4 21 4 44 4 65 4 75 4 84 4 99 5 08 CO 2 16 9 22 4 28 7 36 4 46 1 53 9 59 4 79 5 111 O 2 380 485 604 730 859 941 997 OP...

Page 41: ...used is argon Ar Display shows pressure measure ment of 600 mTorr True pressure of argon is 1 Torr 3 Gas used is oxygen O2 Display shows pressure measure ment of 486 mTorr True pressure of oxygen is...

Page 42: ...0 0 0001 0003 0006 0020 0041 0101 0195 0398 0966 0 190 KR 0 0 0001 0003 0004 0005 0013 0031 0064 0126 0313 0 0623 CO 2 0 0 0001 0003 0006 0015 0031 0059 0146 0295 0731 0 140 O 2 0 0 0001 0003 0006 00...

Page 43: ...3 49 4 51 4 95 5 51 6 54 8 55 Freon 12 0 360 0 810 1 39 2 15 3 26 3 94 4 42 5 05 6 23 7 98 KR 0 120 0 280 0 530 0 930 1 70 2 37 3 05 3 42 3 65 4 42 CO 2 0 270 0 650 1 26 2 27 4 45 6 62 8 78 10 9 12 3...

Page 44: ...OP Freon 22 10 0 11 2 12 2 13 2 14 2 14 7 15 1 16 0 16 9 Freon 12 9 18 10 1 11 0 11 8 12 5 13 0 13 2 13 9 14 7 KR 4 78 5 25 5 61 5 91 6 19 6 33 6 45 6 65 6 77 CO 2 22 5 29 8 38 2 48 5 61 4 71 8 79 1...

Page 45: ...d is nitrogen Display shows pressure measurement of 13 3 mbar True pressure of nitrogen is 13 3 mbar 2 Gas used is argon Display shows pressure measurement of 11 7 mbar True pressure of argon is 133 m...

Page 46: ...put although in recent years some Granville Phillips con trollers may output variations of the original S curve The non linear output from INFICON convection gauges mod ules and controllers duplicates...

Page 47: ...put The linear output voltage can be any value between 10 mV and 10 V corresponding to displayed pressure between 1 mTorr and 1000 Torr However the useful range of the linear analog output is three de...

Page 48: ...e using a multi segment nth order polynomial function calculation The coefficients for the nth order polynomial equation defined for various pressure measurement ranges are given in the following tabl...

Page 49: ...0 V From first table shown above use equation y x a bx cx2 dx3 ex4 fx5 x 0 3840 volts a 0 02585 b 0 03767 c 0 04563 d 0 1151 e 0 04158 f 0 008738 y x Pressure 1 0E 03 Torr The equations listed above a...

Page 50: ...0 0 7780 1 0090 KR 0 3750 0 3755 0 3768 0 3772 0 3790 0 3840 0 3950 0 4150 0 4510 0 5440 0 6680 CO 2 0 3750 0 3760 0 3770 0 3810 0 3850 0 3950 0 4120 0 4620 0 5360 0 7050 0 9000 O 2 0 3750 0 3760 0 37...

Page 51: ...0 2 6470 3 0290 3 2040 3 3080 3 4300 3 6180 3 8270 KR 0 8470 1 1940 1 5360 1 9210 2 4290 2 7340 2 9660 3 0750 3 1340 3 2690 CO 2 1 1790 1 6680 2 1720 2 6950 3 3160 3 6700 3 9030 4 0710 4 1540 4 3360 O...

Page 52: ...3 9380 4 0160 4 0760 4 1240 4 1660 4 1900 4 2030 4 2370 4 2700 KR 3 3840 3 4660 3 5260 3 5730 3 6130 3 6320 3 6450 3 6740 3 6900 CO 2 4 5020 4 6210 4 7080 4 7750 4 8300 4 8600 4 8770 4 9190 4 9550 O 2...

Page 53: ...odules and controllers so that equivalent units can be interchanged without affecting your process system or software An analog output of less than 0 01 volts to near 0 volt indicates a damaged or fau...

Page 54: ...382 0 388 0 401 0 437 0 488 0 581 0 778 1 009 KR 0 375 0 376 0 377 0 381 0 379 0 384 0 395 0 415 0 451 0 544 0 668 CO 2 0 375 0 376 0 377 0 381 0 385 0 395 0 412 0 462 0 536 0 705 0 9 O 2 0 375 0 376...

Page 55: ...883 Freon 12 1 315 1 826 2 257 2 647 3 029 3 204 3 308 3 43 3 618 3 827 KR 0 847 1 194 1 536 1 921 2 429 2 735 2 966 3 075 3 134 3 269 CO 2 1 179 1 668 2 172 2 695 3 316 3 67 3 903 4 071 4 154 4 336 O...

Page 56: ...47 4 271 4 286 4 321 4 354 Freon 12 3 938 4 016 4 076 4 124 4 166 4 19 4 203 4 237 4 270 KR 3 384 3 466 3 526 3 573 3 613 3 632 3 645 3 674 3 69 CO 2 4 502 4 621 4 708 4 775 4 83 4 86 4 877 4 919 4 95...

Page 57: ...tron modules and controllers so that equivalent units can be interchanged without affecting your process system or software An analog output of less than 0 01 volts to near 0 volt indicates a damaged...

Page 58: ...1 2 881 3 167 3 476 3 860 4 155 4 439 KR 1 000 1 301 1 477 1 602 2 000 2 362 2 681 2 978 3 371 3 670 3 960 CO 2 1 000 1 301 1 699 2 041 2 362 2 643 3 041 3 346 3 740 4 029 4 322 O 2 1 000 1 301 1 699...

Page 59: ...76 Freon 12 4 786 5 021 5 210 5 389 5 471 5 521 5 579 5 670 5 777 5 838 KR 4 336 4 602 4 845 5 107 5 250 5 360 5 410 5 438 5 521 5 555 CO 2 4 689 4 978 5 233 5 524 5 696 5 819 5 915 5 966 6 090 6 228...

Page 60: ...041 8 041 8 041 8 041 8 041 D 2 8 041 8 041 8 041 8 041 8 041 8 041 8 041 8 041 Freon 22 5 925 5 964 5 998 6 029 6 045 6 057 6 079 6 104 Freon 12 5 883 5 918 5 947 5 974 5 989 5 998 6 021 6 045 KR 5 5...

Page 61: ...otted on the Y sing the units of pa ed above applies ge of about 3 00 V t 133 kPa near Analog Outp alculated pressure output signal for n r Analog Outp r alog output for sel ollowing table 01 volts to...

Page 62: ...7 2 883 3 172 3 473 3 863 4 157 4 445 KR 1 000 1 301 1 699 1 668 1 970 2 370 2 675 2 979 3 372 3 671 3 963 CO 2 1 000 1 301 1 523 2 028 2 355 2 672 3 012 3 345 3 741 4 033 4 325 O 2 1 000 1 301 1 699...

Page 63: ...reon 12 4 798 5 044 5 250 5 447 5 556 5 621 5 680 5 751 5 851 5 918 KR 4 341 4 614 4 865 5 141 5 309 5 433 5 514 5 548 5 606 5 654 CO 2 4 696 4 982 5 249 5 550 5 743 5 886 6 002 6 065 6 157 6 253 O 2...

Page 64: ...5 962 5 996 6 025 6 050 6 063 6 072 6 092 6 111 6 128 6 146 KR 5 679 5 710 5 734 5 754 5 765 5 772 5 787 5 799 5 812 5 822 CO 2 6 353 6 448 6 532 6 611 6 658 6 687 6 766 6 847 6 936 7 028 O 2 7 705 7...

Page 65: ...analog output of less than 0 01 volts to near 0 volt indicates a damaged or faulty sensor The chart on the following page shows the graphical results of the table and formulas given above for nitroge...

Page 66: ...near sing the units of pa ed above applies range of about 3 0 t 133 kPa alculated pressure output signal for n tinb ascals the same This results in a l 00 V dc at 01 pa es using the formu nitrogen fro...

Page 67: ...easurement range 1 15 10 16 V p 10 0 778 U c U c 1 286log10 p valid in the range 1 3 10 4 mbar p 1333 mbar U p c U p c V mbar 6 143 V micron 2 448 V bar 2 287 V Pa 3 572 V Torr 6 304 V kPa 7 429 V mTo...

Page 68: ...pressure Constructing a table of these parameters may be useful in docu menting the relationship of displayed pressure to the analog out put voltage For example the following table is representative...

Page 69: ...best practice when using this type of analog output signal with the PGE500 If your application requires the analog output voltage to cover a pressure range exceeding three decades then consider using...

Page 70: ...l push buttons 3 The parity can be changed only through the serial interface command set and the number of data bits will change according to the parity selected 4 The stop bit is always 1 5 All Respo...

Page 71: ...eg 01SH 5 00E 02 CR xxRLz CR eg 01RL CR eg 01RL CR BRIEF DESCRIPTION Read the current pressure in Torr Set the communications RS485 address offset upper nibble and Address 1 Set the span or atmosphere...

Page 72: ...CR BRIEF DESCRIPTION Read the turns on below pressure point for relay 2 and read the turns off above pressure point for relay 2 Read the revision number of the firmware Force unit to return ALL setti...

Page 73: ...signed to be 100 compatible with the Granville Phillips Mini Convectron 2 Commands marked with a 2 under the BRIEF DESCRIPTION column will not take effect until after ADDR OFFSET ADDRESS command is re...

Page 74: ...m operating pressure is higher than 1 00 10 3 Torr it is not normally necessary to perform cali bration at zero and thus span calibration should be adequate If you are able to evacuate your system to...

Page 75: ...ssible cleaning Ensure gauge is not mounted where excessive vibration is present Return to factory for possible cleaning Replace sensor inside PGE500 module continued Possible Cause No power The proce...

Page 76: ...sensor inside PGE500 module Return to factory for possible cleaning Possible Cause Incorrect setup Sensor wire damaged System pressure over 1000 Torr Faulty electronics Contamination Sensor wire damag...

Page 77: ...this failure mode is possible In this case cleaning can t solve the problem because the sensor has been destroyed The sensor or module must be replaced If you experience this failure mode quickly or f...

Page 78: ...ping on the gauge between process cycles A dry N2 purge will help speed up drying or the gauge may be gently heated provided temperature doesn t exceed the specified limit of 40 C operating Coatings S...

Page 79: ...entum from entering your vacuum gauge or other components it is advisable to install some form of apparatus that will block the line of sight In many cases a simple 90 elbow may help prevent or reduce...

Page 80: ...ated products e g radioactive toxic caustic or microbiological hazard can be detrimen tal to health and environment Products returned to INFICON should preferably be free of harmful substances Adhere...

Page 81: ...l to the environ ment Products or parts thereof mechanical and electric components operating fluids etc can be detrimen tal to the environment Dispose of such substances in accordance with the relevan...

Page 82: ...andards Harmonized and international national standards and specifi cations EN 61000 6 2 2005 EMC generic immunity standard EN 61000 6 4 2007 A1 2011 EMC generic emission standard EN 61010 1 2010 Safe...

Page 83: ...tinb21e1 2016 06 83 Notes...

Page 84: ...LI 9496 Balzers Liechtenstein Tel 423 388 3111 Fax 423 388 3700 Original English reachus inficon com www inficon com t i nb21e1...