Instrutech VGC301A User Manual Download

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Instruction Manual VGC301A Controller

InstruTech, Inc.

Page 22

7.1

Non-Linear Analog Output - Torr / mTorr

Non-Linear analog output for selected gases - Engineering units in Torr/mTorr

Freon12

Freon22

mTorr

0.3751

0.3750

0.1

mTorr

0.3759

0.3757

0.3755

0.3760

0.3755

0.3760

0.3757

0.3766

0.2

mTorr

0.3768

0.3760

0.3765

0.3770

0.3768

0.3780

0.3770

0.3763

0.3780

0.5

mTorr

0.3795

0.3780

0.3790

0.3800

0.3810

0.3772

0.3820

0.3810

0.3782

0.3825

mTorr

0.3840

0.3810

0.3820

0.3840

0.3850

0.3790

0.3880

0.3860

0.3810

0.3896

mTorr

0.3927

0.3870

0.3890

0.3920

0.3950

0.3840

0.4010

0.4000

0.3960

0.3880

0.4030

mTorr

0.4174

0.4030

0.4090

0.4170

0.4120

0.3950

0.4370

0.4320

0.4250

0.4050

0.4380

mTorr

0.4555

0.4290

0.4410

0.4530

0.4620

0.4150

0.4880

0.4800

0.4700

0.4330

0.4920

mTorr

0.5226

0.4770

0.4970

0.5210

0.5360

0.4510

0.5810

0.5660

0.5490

0.4840

0.5840

mTorr

0.6819

0.5950

0.6370

0.6790

0.7050

0.5440

0.7780

0.7640

0.7270

0.6080

0.7960

100

mTorr

0.8780

0.7450

0.8140

0.8680

0.9000

0.6680

1.0090

0.9900

0.9440

0.7680

1.0530

200

mTorr

1.1552

0.9620

1.0680

1.1410

1.1790

0.8470

1.3150

1.2910

1.2650

1.0020

1.3920

500

mTorr

1.6833

1.3860

1.5890

1.6640

1.6680

1.1940

1.8260

1.8050

1.9140

1.4690

2.0140

Torr

2.2168

1.8180

2.1640

2.1950

2.1720

1.5360

2.2570

2.2470

2.6030

1.9760

2.6320

Torr

2.8418

2.3330

2.9390

2.8140

2.6950

1.9210

2.6470

2.6660

3.5080

2.6310

3.3130

Torr

3.6753

3.0280

4.3870

3.6720

3.3160

2.4290

3.0290

3.0900

5.0590

3.7150

Torr

4.2056

3.4800

5.7740

4.2250

3.6700

2.7340

3.2040

3.3300

6.3610

4.6050

4.6990

Torr

4.5766

3.8010

7.3140

4.6200

3.9030

2.9660

3.3080

3.4140

5.4060

5.1720

Torr

4.8464

4.0370

4.9160

4.0710

3.0750

3.4300

3.5090

6.1590

5.5830

100

Torr

4.9449

4.1220

5.0260

4.1540

3.1340

3.6180

3.6600

6.4830

5.7200

200

Torr

5.0190

4.1920

5.1060

4.3360

3.2690

3.8270

3.8830

6.6610

5.8600

300

Torr

5.1111

4.2830

5.2000

4.5020

3.3840

3.9380

4.0050

6.7260

400

Torr

5.2236

4.3860

5.3150

4.6210

3.4660

4.0160

4.0880

6.7670

6.1030

500

Torr

5.3294

4.4770

5.4220

4.7080

3.5260

4.0760

4.1510

6.8030

600

Torr

5.4194

4.5500

5.5150

4.7750

3.5730

4.1240

4.2030

6.8430

6.3420

700

Torr

5.4949

4.6110

5.5920

4.8300

3.6130

4.1660

4.2470

6.8900

760

Torr

5.5340

4.6430

5.6330

4.8600

3.6320

4.1900

4.2710

6.9200

800

Torr

5.5581

4.6630

5.6580

4.8770

3.6450

4.2030

4.2860

6.9420

6.5190

900

Torr

5.6141

4.7060

5.7130

4.9190

3.6740

4.2370

4.3210

7.0000

1000

Torr

5.6593

4.7450

5.7620

4.9550

3.6900

4.2700

4.3540

7.0560

6.6420

True Total

Pressure

Values listed under each gas type are in volts.

Note: By design, these values are identical to the outputs from Brooks Automation, Inc. / Granville-Phillips

Convectron

gauges, Mini-Convectron

modules and controllers so that equivalent units can be interchanged

without affecting your process system or software.

An analog output of less than 0.01 volts to near 0 volt indicates a damaged or faulty sensor.

Summary of Contents for VGC301A

Page 1: ...InstruTech Inc VGC301A Convection Vacuum Gauge Controller User Manual InstruTech Inc 1475 S Fordham St Longmont CO 80503 USA Phone 1 303 651 0551 Fax 1 303 678 1754 E mail info instrutechinc com www instrutechinc com ...

Page 2: ...m or by any means electronic or mechanical including photocopying and recording or by any information storage or retrieval system except as may be expressly permitted in writing by InstruTech Inc Printed in the United States of America Convectron and Granville Phillips are registered trademarks of Brooks Automation Inc Chelmsford MA ...

Page 3: ... 2 Safety Precautions VGC301A service and operation 6 2 3 Electrical Conditions 6 2 3 1 Proper Equipment Grounding 6 2 4 Overpressure 7 2 5 Gases other than Nitrogen air 8 3 Installation 9 3 1 Mechanical Installation 9 3 2 Electrical Installation 10 3 2 1 Grounding 10 3 2 2 Electrical Connections 10 4 Setup and Operation 12 4 1 User Interface Basics 12 4 2 Programming 12 4 3 Return to Factory Defa...

Page 4: ...mTorr 22 7 2 Non Linear Analog Output mbar 23 7 3 Log Linear Analog Output Torr 24 7 4 Log Linear Analog Output mbar 26 8 RS485 RS232 serial communications 28 8 1 Device Specific Serial Communication Info 28 8 2 RS485 RS232 Command Protocol Summary 29 9 Service 30 9 1 Calibration 30 9 2 Maintenance 30 9 3 Troubleshooting 30 10 Factory Service and Support 31 11 Warranty 31 ...

Page 5: ...ontroller CVG101 vacuum gauge tube and gauge cable can be directly interchanged with Brooks Automation Inc Granville Phillips 375 controller 275 Convectron gauge and gauge cable Remote interface relay and power connectors are different 1 2 Specifications measurement range signal 1 0 x 10 4 to 1000 Torr 1 3 x 10 4 to 1333 mbar 1 3 x 10 2 Pa to 133 kPa display LCD 4 digits user selectable Torr mbar ...

Page 6: ...ech CVG101 Worker Bee or Brooks Automation Inc Granville Phillips 275 Convectron gauge 10 ft 3m CB 421 1 10F 25 ft 6m CB 421 1 25F 50 ft 15m CB 421 1 50F custom lengths over 50 ft 15m up to 100 ft 30 m CB 421 1 xxxF Connector Kit One set of mating connectors is included with the VGC301 one AC power cord one 6 pin pluggable terminal strip connector and one 2 pin pluggable terminal strip connector D...

Page 7: ...e enclosure removed unless equivalent protection of the operator from accidental contact with hazardous internal voltages is provided WARNING There are no operator serviceable parts or adjustments inside the product enclosure Refer servicing to service trained personnel Do not modify this product or substitute any parts without authorization of qualified InstruTech service trained personnel Return...

Page 8: ...uipment grounding or electrical insulation has been compromised Do not use if the unit has been dropped or the enclosure has been damaged Contact InstruTech for return authorization and instructions for returning the product to InstruTech for evaluation 2 3 Electrical Conditions WARNING When high voltage is present in any vacuum system a life threatening electrical shock hazard may exist unless al...

Page 9: ...tion For example use a pressure relief device in an automatic backfill operation where a malfunction could result in high internal pressures if the pressure relief device was not installed on the chamber The CVG101 vacuum gauge tube connected to the VGC301A controller is not intended for use at pressures above 20 psia 1000 torr DO NOT exceed 35 psig 2 bars pressure inside the sensor If your chambe...

Page 10: ...ly used Refer to sections titled Using the gauge with different gases Display and Analog Output for a more complete discussion WARNING Do not use the convection gauge connected to this device in an explosive atmosphere or in the presence of flammable gases vapors or fumes Do not use this device to measure the pressure of explosive or combustible gases or gas mixtures The sensor wire in the gauge n...

Page 11: ...s well as connectors and cables at the rear of the instrument 2 Gently pry the front panel bezel loose and remove 3 Slide the VGC301 into the panel hole cutout 4 On either side of the VGC301 are two screw mounting brackets When the screws in the front of the instrument are turned counterclockwise the hold down brackets recess out of the way into the VGC301 housing When these screws are turned cloc...

Page 12: ...Many of these other controllers employ the same 9 pin and 15 pin D connectors but they do not all use the same signal pinout configurations If you wish to use your existing cables be sure to check compatibility with the tables on the next page Rewire your cables as necessary AC Power Input Universal AC power cord input plug The VGC301 accepts AC power from 100 to 240 VAC 50 60Hz The VGC301 include...

Page 13: ... applying a continuous ground to pin 9 This will prevent any switching of the relay contactors during operation of the VGC301 Relay Connector 6 pin pluggable terminal strip Mating connector Phoenix p n1803617 or InstruTech p n 000347 pin number pin description 1 relay 1 common 2 relay 1 NC 3 relay 1 NO 4 relay 2 common 5 relay 2 NC 6 relay 2 NO Gauge cable assembly P N CB 421 1 XXXF is a custom ca...

Page 14: ...arameter that is set This will be the units of measure Torr mbar Pa that are used for all other settings If your VGC301 has been previously configured and relay setpoints and linear analog output pressure settings have been programmed changing units of measure will return the relays setpoints and the linear analog output pressure settings to factory default setting values in Torr In this case you ...

Page 15: ...the turn off points for each relay The relays will turn off when the pressure is above this value Factory default 200 mTorr If you are unable to decrease the values of SP1 OFF or SP2 OFF you must first go to SP1 ON or SP2 ON and decrease those values to a number lower than the values of SP1 OFF or SP2 OFF you are trying to set SET ADDR This is the lower nibble of the one byte RS485 device address ...

Page 16: ...Set the maximum pressure d Set the maximum voltage corresponding to the maximum pressure The linear output voltage can be any value between 10 mV and 10 V corresponding to pressures between 1 mTorr and 1000 Torr Factory default is 10 mV to 10 Vdc corresponding to 1 mTorr to 1 Torr INFO This screen shows the InstruTech telephone number for questions and the unit firmware version 4 3 Return to Facto...

Page 17: ...Instruction Manual VGC301A Controller InstruTech Inc Page 15 4 4 VGC301 User Interface Map ...

Page 18: ...Instruction Manual VGC301A Controller InstruTech Inc Page 16 VGC301 User Interface Map continued ...

Page 19: ...y and mounting position as well as gas properties Generally air and N2 are considered the same with respect to thermal conductivity but even N2 and air will exhibit slight differences in readings at higher pressures For example when venting a system to atmosphere using N2 you may see readings change by 30 to 40 Torr after the chamber is opened and air gradually displaces the N2 in the gauge For mo...

Page 20: ...re is 500 Torr the gauge will read 500 Torr Ex B If the gas is argon Ar when the true pressure is 100 Torr the gauge will read about 9 Torr If you are backfilling your vacuum system with Ar when your system reaches a pressure of 760 Torr true pressure your gauge will be reading about 23 Torr Continuing to backfill your system attempting to increase the reading up to 760 Torr you will over pressuri...

Page 21: ...81 1 Torr 1 00 600 940 970 950 400 1 05 1 04 1 55 745 1 60 2 Torr 2 00 1 14 2 22 1 94 1 71 700 1 62 1 66 4 13 1 59 3 33 5 Torr 5 00 2 45 13 5 4 98 3 34 1 28 2 45 2 62 246 5 24 7 53 10 Torr 10 0 4 00 OP 10 3 4 97 1 78 2 96 3 39 OP 21 5 27 9 20 Torr 20 0 5 80 OP 22 3 6 59 2 29 3 32 3 72 OP 584 355 50 Torr 50 0 7 85 OP 77 6 8 22 2 57 3 79 4 14 OP OP 842 100 Torr 100 8 83 OP 209 9 25 2 74 4 68 4 91 OP...

Page 22: ... 1 33 mbar 1 33 0 790 1 25 1 29 1 26 0 530 1 39 1 38 2 06 0 990 2 13 2 66 mbar 2 66 1 51 2 95 2 58 2 27 0 930 2 15 2 21 5 50 2 11 4 43 6 66 mbar 6 66 3 26 17 9 6 63 4 45 1 70 3 26 3 49 327 6 98 10 0 13 3 mbar 13 3 5 33 OP 13 7 6 62 2 37 3 94 4 51 OP 28 6 37 1 26 6 mbar 26 6 7 73 OP 29 7 8 78 3 05 4 42 4 95 OP 778 473 66 6 mbar 66 6 10 4 OP 103 10 9 3 42 5 05 5 51 OP OP 1012 133 mbar 133 11 7 OP 27...

Page 23: ...4 contain the lookup data and provides the formulas for converting the log linear output voltage into pressure values for nitrogen and various other gases Linear 0 10 Vdc Analog Output The VGC301 also provides a linear 0 10 Vdc analog output The linear output voltage can be any value between 10 mV and 10 V corresponding to displayed pressure between 1 mTorr and 1000 Torr However the useful range o...

Page 24: ...0 2 2470 2 6030 1 9760 2 6320 2 Torr 2 8418 2 3330 2 9390 2 8140 2 6950 1 9210 2 6470 2 6660 3 5080 2 6310 3 3130 5 Torr 3 6753 3 0280 4 3870 3 6720 3 3160 2 4290 3 0290 3 0900 5 0590 3 7150 10 Torr 4 2056 3 4800 5 7740 4 2250 3 6700 2 7340 3 2040 3 3300 6 3610 4 6050 4 6990 20 Torr 4 5766 3 8010 7 3140 4 6200 3 9030 2 9660 3 3080 3 4140 5 4060 5 1720 50 Torr 4 8464 4 0370 4 9160 4 0710 3 0750 3 4...

Page 25: ...5 2 172 1 536 2 257 2 247 2 603 1 976 2 632 2 66 mbar 2 8418 2 333 2 939 2 814 2 695 1 921 2 647 2 666 3 508 2 631 3 313 6 66 mbar 3 6753 3 028 4 387 3 672 3 316 2 429 3 029 3 09 5 059 3 715 13 3 mbar 4 2056 3 48 5 774 4 225 3 67 2 734 3 204 3 33 6 361 4 605 4 699 26 6 mbar 4 5766 3 801 7 314 4 62 3 903 2 966 3 308 3 414 5 406 5 172 66 6 mbar 4 8464 4 037 4 916 4 071 3 075 3 43 3 509 6 159 5 583 1...

Page 26: ... 6 013 5 696 5 250 5 471 5 530 8 041 6 332 6 446 20 0000 6 301 5 763 8 041 6 348 5 819 5 360 5 521 5 571 8 041 7 766 7 550 50 0000 6 699 5 895 8 041 6 890 5 915 5 410 5 579 5 617 8 041 8 041 7 925 100 0000 7 000 5 946 8 041 7 320 5 966 5 438 5 670 5 691 8 041 8 041 8 041 200 0000 7 301 5 991 8 041 7 470 6 090 5 521 5 777 5 808 8 041 8 041 8 041 300 0000 7 477 6 053 8 041 7 580 6 228 5 555 5 838 5 ...

Page 27: ...near Analog Output Voltage vs Pressure 0 1 2 3 4 5 6 7 8 9 0 0001 0 001 0 01 0 1 1 10 100 1000 Pressure Torr Output Signal Volts This is a plot of the calculated pressures using the formulas and data for the log linear output signal for nitrogen from the previous page ...

Page 28: ...62 6 002 5 514 5 680 5 722 8 125 8 125 7 930 100 0000 7 000 6 045 8 125 7 282 6 065 5 548 5 751 5 780 8 125 8 125 8 125 200 0000 7 301 6 093 8 125 7 526 6 157 5 606 5 851 5 877 8 125 8 125 8 125 300 0000 7 477 6 131 8 125 7 625 6 253 5 654 5 918 5 950 8 125 8 125 8 125 400 0000 7 602 6 178 8 125 7 705 6 353 5 679 5 962 6 000 8 125 8 125 8 125 500 0000 7 699 6 237 8 125 7 786 6 448 5 710 5 996 6 03...

Page 29: ...Instruction Manual VGC301A Controller InstruTech Inc Page 27 This is a plot of the calculated pressures using the formulas and data for the log linear output signal for nitrogen from the previous page ...

Page 30: ... or the front panel push buttons 3 The parity can be changed only through the serial interface command set and the number of data bits will change according to the parity selected 4 The stop bit is always 1 5 All Responses are 13 characters long 6 xx is the address of the device 00 thru FF 7 CR is a carriage return 8 _ is a space 9 The z in the set or read trip point commands is a or The plus is t...

Page 31: ...CR eg 01RL CR xx_y yyEzyy CR eg 01_7 60E 02 CR READ TRIP POINT 2 Read the turns on below pressure point for relay 2 and read the turns off above pressure point for relay 2 xxRHz CR eg 01RH CR eg 01RH CR xx_y yyEzyy CR eg 01_7 60E 02 CR READ SW VERSION Read the revision number of the firmware xxVER CR eg 01VER CR xx_mmnnv vv eg 0105041 00 SET FACTORY DEFAULTS Force unit to return ALL settings back ...

Page 32: ...Cause Possible Solution Display is off blank No power Check power supply power cable Readings appear very different from expected pressure The process gas is different from the gas used to calibrate the CVG101 gauge Correct readings for different gas thermal conductivity See section on using the gauge on different gases CVG101 gauge has not been calibrated or has been calibrated incorrectly Check ...

Page 33: ... of serial numbers or other identification marks renders this warranty void The warranty does not apply to products or components which have been abused altered operated outside of the environmental specifications of the product improperly handled or installed or units which have not been operated in accordance with SELLER s instructions Furthermore the warranty does not apply to products that hav...

Page 34: ...p n 000363 106 InstruTech Inc 1475 S Fordham St Longmont CO 80503 USA Phone 1 303 651 0551 Fax 1 303 678 1754 E mail info instrutechinc com www instrutechinc com ...

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