background image

c.

 

Hint: For easier operation, in HV mode, use the SEI detector to set up the 
instrument and focus, etc. Switch to the BEIW mode mostly to look at or record 
slow scan images. 

d.

 

If you are working at high magnification, select a smaller spot size for a sharper 
image. If the image is too noisy select a larger spot size.  Remember there is a 
trade off between noise (fast scanning) and attainable resolution. 

e.

 

Tilt and Z must be adjusted only if you are sure it is safe to do so (do not run 
into detectors!!). Use the IR chamber-scope always for these adjustments!! 

f.

 

Scan Rotation is available (SRT icon). This is very useful for orientating the 
image the way you want without rotating the stage (be aware the perception of 
the image can change due to the apparent direction of oblique illumination 
changing (relative position of the detector). It is also very useful for working 
with cross-section samples (changing the orientation of the tilt axis). 

g.

 

Watch out for Tools 

Æ

 Neutralizer being checked. When neutralizer mode is 

selected the voltage on the collector grid is changed. This mode reduces 
secondary electron collection of the lowest energy electrons and may help with 
some kinds of charging artifacts. 

h.

 

Many commonly used functions are available on the knob panel (magnification, 
brightness, contrast, stigmator x and y, image fine shift x and y, scanning mode, 
and auto functions {focus, stigma, contrast brightness}). 

i.

 

Scan4 (80 seconds) will automatically freeze at end of frame to save image. 
While scanning the image observed is just a preview, the actual image quality is 
much better (just watch the image as the scan finishes, then press the Zoom 
button) 

j.

 

Scan3 (10 or 20 seconds) will freeze at end of frame if freeze is clicked. 

k.

 

Photo (160 seconds) can be used to decrease noise and get the best possible 
quality. 

l.

 

Saved images are 1280 x 960 pixels.  
For Scan3 the images are 640 x 480(10 sec) or 1280 x 960 (20 sec pixels). 

m.

 

In the Save Image dialog box there is a check box,

 

Merge Text. When this is 

checked the saved image will have the data area text embedded in the image. 

n.

 

Displayed images are 640 x 480. Click Zoom on frozen image to see full 
resolution image (1024 x 768) or (1280 x 960 with pan). 

o.

 

Measuring functions are available under the Image menu for a frozen image.  
The measurements can be burned into the image with the 
Write button prior to 
saving the image. 

p.

 

SIS AnalySIS software (on SEM computer) can be also used to do image 
measurements. 

q.

 

ImageJ (Java version of NIH Image) is free software which also can be used 
for image analysis on your own computer. 

Summary of Contents for 6060LV

Page 1: ...computer use the account USER jeol PASSWORD jeol Please do not log into other accounts Use portable media ftp or UIUC NetFiles to transfer your data 3 Prepare your samples before venting Please keep...

Page 2: ...the height gauge for desired working distance No part of the sample should extend above the ruler end A 10 mm W D should be used for nearly all work except low magnification imaging or if you need to...

Page 3: ...contact these when observing your sample 10 Turn on the IR chamber scope if off using the switch button on the control box and a switch on CRT monitor and adjust illumination as needed Always use cham...

Page 4: ...filament heating or Auto Gun Control We found the use of these seem to shorten filament life significantly a Select an area on the sample or sample holder that has reasonably homogeneous brightness a...

Page 5: ...ases after going through a maximum before beginning of orange indicator the gun tilt shifts are misaligned This is usually because the filament was significantly under saturated when you started Resta...

Page 6: ...cus 21 Click ACB auto contrast brightness 22 Focus and check the objective aperture centering especially for high magnification work 23 Fine focus and correct the astigmatism the image manually or cli...

Page 7: ...rging artifacts h Many commonly used functions are available on the knob panel magnification brightness contrast stigmator x and y image fine shift x and y scanning mode and auto functions focus stigm...

Page 8: ...chassis stops blinking slide open stage drawer 6 If changing samples go to step 7 of general operation 7 Change vacuum mode to HV if in LV mode 8 Carefully slide the stage drawer closed Press EVAC bu...

Page 9: ...other translation control Iterate to fine tune Correct any severe astigmatism see below to be able to better fine tune 5 Deselect Wobb Manually Correcting the Astigmatism Note You need an image with...

Page 10: ...10 30 kV is the condition the instrument provides it s best resolution 100 kX possible This is a fairly noisy image even on a Au C sample You must choose the spot size according to your sample and wh...

Page 11: ...focus astigmatism correction a little more difficult to do ACB and manual knob adjustment function in all the BEIW modes Selecting the Operating Voltage 1 Click Acc Volt to get 2 Double Click value t...

Page 12: ...samples but this requires addition procedures wet In general use as low as pressure as possible that works for imaging the sample 1 to 10 s of Pa Again BEIW Shadow mode provides secondary electron lik...

Page 13: ...computer is responding use the software restart START Menu If the computer is locked press and hold the power button on the front of the computer until it turns off Release the button then press it a...

Page 14: ...d Manual control buttons Manual adjusting buttons spotsize contrast brightness etc and image size switching button are arranged Image display area A SEM image of 640 480 pixels can be displayed and th...

Reviews: