2 SPECIFICATIONS
EM210F-1
2-3
When the EM-20458 polepiece is used:
±
60
°
(single tilt)
·
Specimen shift:
Motor driven (X, Y and Z directions), A trackball and
buttons are used.
2.4 CAMERA
CHAMBER
·
Film
Standard size:
A, E, J or S size
Loading capacity:
Up to 50.
Feeding: Automatic.
Exchange mechanism:
Airlock type.
·
Exposure:
Automatic and manual.
·
Data recording:
Film number, magnification/camera length, accelerating
voltage, micron bar and calibrated length, and characters
(keyboard entry).
2.5 EVACUATION
SYSTEM
2.5.1 For Microscope Column
·
Vacuum pumps
For rough evacuation:
Oil rotary pump/oil diffusion pump or dry pump/turbo
molecular pump
For fine evacuation:
Sputter-ion pump or turbo molecular pump
·
Ultimate pressure:
10
–5
Pa order (specimen chamber).
·
Vacuum gauges:
Penning and Pirani gauges.
2.5.2 For Electron Gun Chamber
·
Vacuum pumps:
Ion pump
·
Vacuum gauge:
By means of ion pump current
·
Ultimate pressure:
10
–8
Pa order
2.5.3 Vacuum
Valves
·
Automatically controlled pneumatic and solenoid valves
2.6 CONTROL
SYSTEM
·
Control panels (located beside the viewing chamber)
Used for setting the observation condition
·
Monitor:
Used for displaying the observation condition.
·
Personal
computer:
Used for displaying and setting the observation
condition.
