2.
Click on the
button in the Source selection box in the Channel B frame;
3
then select Force from the pull-down menu.
.
Click on the
button in the Sensitivity selection box in the Channel B
frame; then select 5 from the pull-down menu.
Y
V.
■
Approac
Move the can
to the specimen until the voltage of Force (A–B) becomes the
voltage specified in Reference/V. The cantilever movement automatically stops when the
voltage of Force (A–B) reaches the Referen
wing is the procedure
for approaching.
1.
Click on the Probe button on the Advanced tab window.
The Tip window will appear.
ou can monitor the Force (A–B) signal. The Force (A–B) signal can be output up to ±15
hing
tilever closer
ce/V voltage. The follo
2.
Specify each parameter according to the following procedure.
a.
Click on the Reference/V input box. When the value in the box is highlighted,
enter the desired value using the keyboard. Press the Tab key on the
keyboard to finalize the value.
b.
Click on the
button in the Feedback Filter/Hz selection box; then select
2.0 from the pull-down menu.
Now, the Reference/V voltage and the response speed of the feedback circuit, which
are used for approaching, have been determined. To prevent the cantilever from
c.
Click on Tip Retract to deselect Tip Retract.
3.
Before performing approaching confirm that the voltage applied to the Z
scanner reaches the maximum voltage (+150 V or 200 V).
colliding with the specimen, set Feedback Filter/Hz to a value higher than that for
image observation.
5-106
TMPM5200-2
