５
MEASUREMENT OPERATION
Lithography in Vector mode
5-130
TMPM5200-2
T
ing lithography in the Vector mode.
1.
C
rs
n the
5.
M
write, and
click on the mouse; then drag it by holding the mouse to draw a line, and
he following is the procedure for perform
lick on the Lithography button in the Advanced tab window.
The Lithography window opens.
2.
Observe an image as usual and grab it.
3.
Specify the lithography conditions in the “Settings” frame.
Set paramete according to the specimen to write on.
4.
Select Vector in the Write Mode frame; then click on the Define button i
Vector Settings frame.
Move the cursor to the Display Window. The cursor changes to the
+
mark.
ove the
+
mark to the initial point of the pattern that you want to
click on the mouse again to determine the final point.
When determining the
cursor position, click on
Click on the mouse.
the mouse.
You can continuously define the pattern as explained above. To stop the pattern
definition, click on the right mouse-button.
6.
Click on the Write button to perform lithography.
Lithography will be performed along the defined pattern.
Lithography in Trace mode
The following is the procedure for performing lithography in the Trace mode.
1.
Click on the Lithography button in the Advanced tab window.
The Lithography window opens.
2.
Observe the image as usual and grab it.
3.
Specify the lithography conditions in the Settings frame.
4.
Select Trace in the Write Mode frame; then click on the Write button.
Move the cursor to the Display Window. The cursor changes to the
+
mark.
5.
Execute lithography by moving the mouse while holding the left
mouse-button.
Click the right mouse-button to stop the lithography.
6.
Check the written pattern using the ordinary image-observation procedure.
—— CAUTION ———————
To prevent the tip from colliding with the specimen surface, the speed
of the tip movement must not be faster than 200 nm/s.
