2 SPECIFICATIONS AND INSTALLATION REQUIREMENTS
TMPM5200-2
2-3
SPM Control System
•
Scanning capabilities
Scanning range:
Continuously variable from 0 to maximum scanning
range (25 bits)
Scanning speed:
0.00167 ms to 200 s/point
Bias voltage:
Continuously variable from 0 to
±
10 V, 0 to
±
150 V (16
bits)
Scanning in a region of 1024
×
1024, 512
×
512, 256
×
256
and 128
×
128 pixels and Top Mirror scanning
Line scanning in 1024, 512, 256 and 128 pixels
Maximum 4 channels simultaneous input and simulta-
neous displayed
Automatic distortion correction, automatic tilt correction,
automatic contrast and brightness control
Zooming at any position
Scanning rotation:
±
180
°
, in 1
°
step
Lithography function
•
AFM capability
Contact mode, Constant-force mode, constant-height
mode, force-curve mode and friction-force curve mode
Force setting: 10
-8
to 10
-11
N
AC mode:
Detection method:
Amplitude detection, phase detection and FM detection
Excitation frequency: 1 kHz to 1MHz
•
STM capability
Constant-current mode, constant-height mode, I-V, CITS, S-V and I-S
Current setting:
30 pA to 1 µA
•
Optional capabilities available
Surface potential difference, lateral-modulation FFM, viscoelasticity and magnetic
force
•
Map scan capability
I-V mapping (CITS), I-S mapping, S-V mapping, force-curve mapping, fric-
tion-force curve mapping
Computer Control System
•
Computer:
IBM-PC/AT compatible
•
High-resolution color display: 21 inches, 1,280
×
1,024 pixels
•
Keyboard and mouse:
Provided
•
External storage:
Magneto-optical disk (optional)
SPM Software
•
File operations
File writing:
TIFF, BMP, Binary and ASCII
File reading
File searching
