５
MEASUREMENT OPERATION
5-182
TMPM5200-2
measurement tab window
•
Electrostatic force
In the electrostatic force measurement (EFM/SCFM), both reference and offset-bias
voltage settings appear because offset-bias voltage control is required. You can
specify the offset-bias voltage up to
±
10 V.
STM mode
The reference signal is a Log Cu
ly the reference signal but also
the bias voltage. You can specify the bias voltage u
10 V. Although the setting range
of the reference signal changes depending on the range of the preamplifier, it is normally
0 to 10 nA.
rrent signal. Set not on
p to
±
