５
MEASUREMENT OPERATION
TMPM5200-2
5-195
■
t.
not stop the stage
automatically even when the tip approaches the specimen. When you bring the tip
close to the specimen, move the stage carefully while watching the Z piezoelectric
Z Stage control
This controls the Z stage axis. Use this if you need to adjust the Z stage-axis position
manually when retracting the tip at the end of measuremen
This operation, contrary to the approach movement, does
position indicator.
•
Z direction
Select a direction in which you want to move the Z stage.
In :
Approaches the tip to the specimen.
Out :
Separates the tip from the specimen.
•
Move
The Z stage moves to the selected direction only while you are pressing the button.
•
Start
When you click on this button, the Z stage starts to move in the selected direction.
During movement, the button changes to Stop; so if you click on the button again,
the stage stops.
•
Z stage indicator
This displays the current Z stage position. Use this to confirm whether the Z stage
position lies within the approachable range.
■
Z piezo position indicator (Z Piezo Position)
This displays the current Z piezo scanner position. This indicator is effective only while
the scan stops. The In side shows the direction in which the piezo scanner stretches, and
the Out side shows the direction in which the piezo scanner contracts. During the tip is
retracted, this indicator shows the position of the tip at the end of the Out (right) side.
When you cancel tip retraction, if this indicator moves to the end of the In (left) side, it
shows that the approach has not been completed. On the contrary, when you cancel tip
retraction, if this indicator does not move from the end of the Out side or extremely
closes to the Out side, adjust the distance between the tip and specimen by moving the Z
stage to the Out direction because the tip is too close to the specimen.
