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APPENDIX
3.
Click on Install WinSPM System.
The WinSPM System CD installer selection window opens.
4.
Click on the WinSPM System radio button and on the Install button.
The installer starts to operate. Follow the instructions issued by the installer. (Use
the default settings throughout this process.)
5.
When the SPM software is completely installed, restart the system, as the
Administrator, in the WinSPM System measurement mode.
Make sure that the WinSPM software has started normally.
6.
Set up the calibration values for the scanner and the stage positions.
For more information, refer to Sect. 7.2.2 and 7.2.3.
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TMPM5200-2
