５
MEASUREMENT OPERATION
TMPM5200-2
5-177
eters (Simple)
■
Scan
5.10.2 SPM Param
Scan Size
Specify the scanning area in this selection box. Two methods are provided:
Click on the
button in the selection box and select a scanning area from
the pull-down menu showing some scanning areas.
Enter a value in the selection box using the keyboard. Then, the nearest
scanning area value is selected.
The selected scanning area value is not always the same as the one entered because
the value is rounded off.
The maximum scanning area depends on the scanner calibration value selected in
the SPM Calibration
･･･
window.
You can also enter the following units:
nm: 10
–9
m
um: 10
–6
m
For example, when you have entered 3.000 um, the scanning area is 3.0
µ
m. If you
have not entered a unit, the previously displayed unit is applied.
The value displayed in the Scan–Size selection box will differ a little from the value
that you entered, because of torsion correction and voltage resolving power.
Clock/ms
m 6.67
µ
s/point to 10.0 ms/point. You can change the scan speed during
canning.
speed and Scan time
AFM
Specify scanning speed in this selection box, selecting the time per pixel. You can select
a speed fro
s
•
Scan
Under the selected scanning speed, the relative speed between the tip and specimen,
and the required time for scanning one image appear in the Scan speed and Scan
time respectively.
Mode
This appears only for AC and AFM modes. You use this for setting the feedback mode
(AC or FM).
