5.3.5 Checking the Stage Position
In the WinSPM system, the approach operation is done automatically by a motor. An
approach cannot be performed when the Z stage has already risen to the top position.
Befo
an approach, confirm th
f the Z
s in the
approachable range by means of the following procedu
tage
n indicato
he SPM
Parameters
. Make sure that the position of the stage is 1/4 of the
n In a
re performing
at the position o
stage i
re.
Observe the Z s
positio
r (
△
) in the lower section of t
window
distance betwee
nd Out.
5-22
TMPM5200-2
