Model 4200A-SCS Parameter Analyzer Reference Manual
Appendix D: Using a Model 82 C-V System
4200A-901-01 Rev. C / February 2017
D-49
Series resistance
The series resistance, R
SERIES
, is an error term that can cause measurement and analysis errors
unless this series resistance error factor is taken into account. Without series compensation,
capacitance can be lower than normal, and C-V curves can be distorted. The software compensates
for series resistance using the simplified three-element model shown in the simplified model below. In
this model, C
OX
is the oxide capacitance. CA is the capacitance of the accumulation layer. The series
resistance is represented by R
SERIES
.
Figure 612: Simplified model to determine series resistance
From Nicollian and Brews 224, the correction capacitance, C
C
, and corrected conductance, G
C
, are
calculated as follows:
and:
Where:
•
a = G
M
- (G
2
M
+
ω
2
C
2
M
) R
SERIES
•
C
C
= series resistance compensated parallel model capacitance
•
C
M
= measured parallel model capacitance
•
G
C
= series resistance compensated conductance
•
G
M
= measured conductance
•
R
SERIES
= series resistance
