Appendix F: Set up a probe station
Model 4200A-SCS Parameter Analyzer Reference Manual
F-8
4200A-901-01 Rev. C / February 2017
Probe sites (die)
Dies marked as probe sites in the prober software define the areas to be tested. The physical location
of the probe site can be any coordinates selected on the wafer. Marking a die as a probe site also
selects the site for probing. The coordinates of each probe site are referenced with respect to the
coordinates of the reference site. For example, with the reference site of (3, 1), the coordinates of the
five probe sites shown in the following figure are (3,1), (3, 2), (3, 4), (-1, 4), and (-2, 3).
Figure 626: Sample probe site location
Chuck movement
Coordinate movements are described using a first quadrant coordinate system and x, y coordinates
(+x values move east and +y values move north). To accommodate this system, you must configure
the correct quadrant (prober dependent). Applicable quadrant setup instructions are in the appendix
for your prober. When you specify chuck movements, use the coordinates of the site. The chuck will
automatically move in the proper direction to position the probe pins over the correct die. For
example, to move from the reference site to the die up one and over one, command the chuck to
move (1, 1). Refer to the following figure for a representation of the relationship between chuck
movement and (x, y) coordinates.
The chuck moves and the probe pins remain stationary. Notice that the chuck movement is opposite
of the coordinate system of the probe pins.
