Appendix H: Using a Micromanipulator 8860 Prober
Model 4200A-SCS Parameter Analyzer Reference Manual
H-16
4200A-901-01 Rev. C / February 2017
Set the units and die size
To set the units and die size:
1. Set
Units
to either microns or mils from the Prb8860 window (lower left corner) of pcNav.
Figure 702: Unit of measure list
2. Click
Set X, Y die size
button in the lower middle of the Prb8860 window. The Set X, Y Die Size
dialog box opens. If die size is known, enter it. If not known, calculate. See
(on page H-16) for more information.
Figure 703: Set X, Y die size button
Figure 704: 4200-901_Set X, Y Die Size dialog box
Calculate die sizes
To calculate die sizes:
1. Place pins over pads in upper left corner of wafer (although the upper left corner die is used in
this example, any die may be selected as a base point).
2. Click
Set Base Pt
.
3. Move over and down a known number of dies. Enter these values into Column moved (columns)
and Row moved (rows).
4. Click the
Set 2nd Pt
button.
5. Check the
Copy Die Size to Index
button.
6. Click the
Calculate Die Size
button.
This determines the accurate die size.
7. To complete, click
Done
(the grayed-out button will turn active after the calculation is completed).