In this appendix:
Signatone CM500 prober software ........................................... K-1
Probe station configuration ....................................................... K-1
Clarius project example for probe sites .................................. K-12
Clarius project example .......................................................... K-13
Probesites Clarius project example ........................................ K-16
Probesubsites Clarius project example .................................. K-18
Commands and error symbols
................................................
Signatone CM500 prober software
This section describes set up for the Signatone CM500 prober. Note that the CM500 driver provided
with the Keithley Instruments 4200A-SCS also works with other Signatone probers with Interlink
controllers, such as the WL250 and S460SE. The name CM500 used in the configuration and setup
in this documentation applies to all Signatone semi-auto prober systems with Interlink controllers.
Software versions
The following software versions on the CM500 prober was used to verify the configuration of the
prober with the 4200A-SCS:
•
CM500.exe version 2.5
•
For the S460-SE prober: S460SE.exe version 2.5
Probe station configuration
Refer to the Signatone CM500 or S460 Prober supporting documentation before attempting setup,
configuration, or operation.
The general steps required to set up and configure the CM500 or S460 prober for use with the
4200A-SCS are:
•
(on page K-2)
•
(on page K-5)
•
Load, align, and contact the wafer
(on page K-6)
•
Set up programmed sites without a subsite
(on page K-9)
•
Set up programmed sites with a subsite
(on page K-11)
Appendix K
Using a Signatone CM500 Prober
