Appendix K: Using a Signatone CM500 Prober
Model 4200A-SCS Parameter Analyzer Reference Manual
K-14
4200A-901-01 Rev. C / February 2017
Configure the prober project:
1. Select
Configure
. Make sure
prober-init
is selected in the project tree.
Figure 821: Set prober-init parameters
2. Set the
mode
to 6.
3. Set the
xdie_size
and
ydie_size
for your wafer.
4. Set units to either
0
for English or
1
for metric.
5. Check the
subprobtype
. If the CM500 prober is presently not at its first site, set
subprobtype
to
1
; otherwise, set it to
0
.
Set up actions:
1. In the project tree, select
Subsite
.
2. Choose
Select
.
3. Select the
Actions
library.
4. Add the
Prober Chuck Position (prober-contact)
action twice.
5. Select the
prober-contact_1
action.
6. Rename the action
prober-separate
.
7. Select
Configure
.
8. Set
chuckposition
to
0
. This moves the Z chuck to the down (separate) position.
