Appendix B: Using a Model 590 C-V Analyzer
Model 4200A-SCS Parameter Analyzer Reference Manual
B-6
4200A-901-01 Rev. C / February 2017
Cable compensation example
This example assumes that the 590 is connected directly to the DUT. The DUT could be a device
installed in a test fixture or a MOS capacitor on a wafer.
The user modules for cable compensation must share the same file for capacitance source values.
Therefore, the same file directory path must be used in all three user modules. For this example, use
the default file directory path (see line 1 of the parameter list in the following figures).
Enter and save capacitance source values (save-cap-file)
To enter and save the capacitance source values:
1. Select
Configure
.
2. In the project tree, select
save-cap-file
. The default parameters for the user module are
displayed, as shown in the following figure.
Figure 552: save-cap-file action and SaveCableCompCaps590 user module
3. Enter the capacitance source calibration value for each range and frequency. If you are using the
5909, each capacitor has a label indicating the calibration value at 100 kHz and at 1 MHz.
For example, assume the low capacitance source for the 2 pF range is 0.47773 pF (100 kHz) and
0.47786 pF (1 MHz). Enter these values using scientific notation:
Lo2p100k: Enter
0.47773e-12
Lo2p1M: Enter
0.47786e-12
4. In the project tree, select the action.
5. Click
Run
to execute the action.
