Model 4200A-SCS Parameter Analyzer Reference Manual
Appendix D: Using a Model 82 C-V System
4200A-901-01 Rev. C / February 2017
D-9
Model 82 projects
The Model 82 projects are:
•
simcv
: This project uses the
qtsweep
test (
QTsweep82
user module) to make quasistatic
capacitance measurements. This test optimizes delay time for quasistatic measurements so that
the entire simultaneous C-V test is done at DUT equilibrium. Then the
system82-cvsweep
test
(
SIMCVsweep82
user module) makes simultaneous C-V measurements.
•
stvs
: This project uses the
ThermalChuck
test to prompt the user to increase the temperature
of the thermal chuck, and then uses the
cvsweep
test (
SIMCVsweep82
user module) to make
simultaneous C-V measurements.
•
lifetime
: This project uses the
cvsweep
test (
SIMCVsweep82
user module) to make
simultaneous C-V measurements, and then uses the
ctsweep
test (
CTsweep82
user module) to
make C-t measurements at the condition determined by the
cvsweep
test.
Each project begins by performing cable compensation.
The project trees for these projects are shown in the following figure.
Details on all parameters for the compensation and capacitance tests are provided in the
(on page 6-313).
Cable compensation tests
Complete the following steps to do cable compensation.
These tests assume that the calibration capacitors are installed as close to the wafer-chuck end of
the cable as possible.
The user modules for cable compensation must share the same file for capacitance source values.
Therefore, the same file directory path must be used in all three user modules. For this example, use
the default file directory path (see line 1 of the parameter lists for the user modules).
