Model 4200A-SCS Parameter Analyzer Reference Manual
Appendix D: Using a Model 82 C-V System
4200A-901-01 Rev. C / February 2017
D-65
Series resistance compensation
a = G
M
- (G
2
M
+
ω
2
C
2
M
) R
SERIES
Threshold voltage
Work function
Zerbst plot (generation lifetime and velocity)
References
The references below are cited in this chapter:
Nicollian, E.H. and Brews, J.R.,
MOS Physics and Technolog
y. Wiley, New York (1982).
Sze, S.M.,
Physics of Semiconductor Devices 2nd edition
. Wiley, New York (1985).
Snow, E.H. Grove, A.S., Deal, B.E., and Sah, C.T.J.,
Ionic Transport Phenomena in Insulating Films
,
Appl. Phys., 36, 1664 (1965).
Bibliography of C-V Measurements
Texts
Grove, A.S.,
Physics and Technology of Semiconductor Devices
, Wiley, New York (1967).
Sze, S.M.,
Semiconductor Devices, Physics and Technology
, Wiley, New York (1985).
