Model 4200A-SCS Parameter Analyzer Reference Manual
Appendix F: Set up a probe station
4200A-901-01 Rev. C / February 2017
F-3
Supported probers
Supported probe station
Additional information
Cascade Microtech Model PA200
Cascade Microtech PA200 Prober
(on
page G-1)
Micromanipulator Model 8860
page H-1)
Manual or Fake
page I-1)
Cascade Summit-12000
(on
page J-1)
Signatone CM500
(on page K-
Contact Keithley Instruments for the most up-to-date list of supported probe stations.
Use
(on page 7-1) to add the prober to the instrument list. See the information for the specific
prober for details.
PRBGEN user modules
Prober-control software provided by supported prober vendors gives access to the full feature set of
each prober. You use the prober-control software to define a list of wafer locations to be probed. The
4200A-SCS relies on the prober controller and associated software to maintain this probe list. The
PRBGEN
user modules communicate with the prober controller, normally through the GPIB bus or
COM1 (serial bus) port, to instruct it to step through the probe list. This technique of prober control is
referred to as learn mode because the prober-control software is taught the physical location of each
probe location. The following table summarizes the user modules included in the
PRBGEN
prober
control user library.
User module
Description
PrInit
Initializes the prober driver and establishes the reference site or die.
PrChuck
Instructs the prober to move the probe station into contact or to break
contact between the wafer and the test system pins (probe needles).
PrSSMovNxt
Instructs the prober to move to the next subsite or test element group in
the probe list.
PrMovNxt
Instructs the prober to move to the next site or die in the probe list.
