In this appendix:
Cascade Microtech PA200 prober software ............................ G-1
Probe station configuration ...................................................... G-2
Set up communications ........................................................... G-2
Set up wafer geometry .......................................................... G-10
Create a site definition and define a probe list ....................... G-13
Load, align, and contact the wafer ......................................... G-14
Clarius probesubsites project example .................................. G-20
Commands and error symbols .............................................. G-27
Cascade Microtech PA200 prober software
To configure and operate the PA200 prober with the Keithley Instruments 4200A-SCS, you need the
following applications:
•
ProberBench NT: Provides easy access to configuration and help programs.
•
Wafer Map: Use to configure wafer geometry, set origin, set home, select dies to probe, and align
the wafer.
•
Chuck Navigator: Use to move the chuck and select subsites.
•
PB-GPIB: Use to configure the GPIB interface.
•
PB-RS-232: Use to configure the serial interface.
•
Prober Setup (in the service programs folder): Use to initialize the serial communications port.
Software versions
The following list contains the software versions used to verify the configuration of the PA200 prober
with the 4200A-SCS.
Product Name:
WaferMap for ProberBench NT
Product Version:
3.1 (Feb 12, 1999)
Copyright:
©
Karl Suss 1998 - All Rights Reserved
Kernel:
3.000000 ProberBench Kernel Version 3.10 12-7-98
Control Box:
2.400000 ProberBench Control Box 2.4
Product Name:
NI-GPIB for ProberBench NT
Product Version:
3.10 (Feb 12, 1999)
Copyright:
©
Karl Suss 1998 - All Rights Reserved
Kernel:
3.000000 ProberBench Kernel Version 3.10 12-7-98
Control Box:
2.400000 ProberBench Control Box 2.4
Appendix G
Using a Cascade Microtech PA200 Prober
