In this appendix:
Cascade Summit 12000 prober software ................................. J-1
Probe station configuration ....................................................... J-1
Probesites Clarius Project example ........................................ J-19
Probesubsites Clarius Project example .................................. J-21
Commands and error symbols ............................................... J-27
Cascade Summit 12000 prober software
Use the following program, which is on the Summit 12000, to configure and operate the Summit
12000 prober with the Keithley Instruments 4200A-SCS:
•
Nucleus UI prober control software
: Provides access to configuration and help programs.
Software version
The following software version was used to verify the configuration of the Summit-12000 prober with
the 4200A-SCS:
•
Nucleus UI ver. 2.0
Probe station configuration
Make sure that you are familiar with the Cascade Summit-12000 Prober and its supporting
documentation before attempting setup, configuration, or operation.
The general steps required to set up and configure the Summit-120000 prober for use with the
4200A-SCS:
•
(on page J-1)
•
(on page J-8)
•
Create a site definition and define a probe list
(on page J-13)
•
Load, align, and contact the wafer
(on page J-15)
Set up communications
The Cascade Summit-12000 prober is configured for GPIB communications only. Make sure that the
prober configuration file is set up properly for the GPIB communications interface. See
(on page J-7) for information.
Appendix J
Using a Cascade Summit-12000 Prober
