Keithley 6517B Reference Manual Download

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Model 6517B Electrometer Reference Manual

Section 15: Calibration procedure

6517B-901-01 Rev. C / August 2015

15-3

20 pA to 200 pA range voltage offset

To calibrate the voltage offset for each range:

1. Set the DMM range to 1 V DC, with an integration rate of 10 NPLC with a repeating filter count of

10. Connect a 10 G



resistor between the Model 6517B input HI and input LO.

:CAL:PROT:VOFF:STEP 1

:CAL:PROT:VOFFSETZ2.

2. Allow the input to settle for 120 seconds, then take the DMM voltage reading.

:CAL:PROT:VOFFZERO <dmm voltage reading>

3. Connect a 1 G



resistor between the Model 6517B input HI and input LO.

:CAL:PROT:VOFF1

4. Allow the input to settle for 10 seconds, then take the DMM voltage reading.

:CAL:PROT:VOFF2 <dmm voltage reading>

:CAL:PROT:VOFF3

5. Allow the input to settle for 10 seconds, then take the DMM voltage reading.

:CAL:PROT:VOFF4 <dmm voltage reading>

2 nA to 200 nA range voltage offset

To calibrate the voltage offset for each range:

1. Connect a 10 M



resistor between the Model 6517B input HI and input LO. Set the DMM range

to 1 VDC.

:CAL:PROT:VOFF:STEP

:CAL:PROT:VOFFSETZ

2. Allow the input to settle for 10 seconds, then take the DMM voltage reading.

:CAL:PROT:VOFFZERO <dmm voltage reading>

3. Connect a 1 M



resistor between the Model 6517B input HI and input LO.

:CAL:PROT:VOFF1

4. Allow the input to settle for 10 seconds, then take the DMM voltage reading.

:CAL:PROT:VOFF2 <dmm voltage reading>

:CAL:PROT:VOFF3

5. Allow the input to settle for 10 seconds, then take the DMM voltage reading.

:CAL:PROT:VOFF4 <dmm voltage reading>

Summary of Contents for 6517B

Page 1: ...Reference Manual 6517B 901 01 Rev D February 2016 P6517B90101D 6517B 901 01 www tek com keithley Model 6517B Electrometer A Greater Measure of Confidence...

Page 2: ...ks of Keithley Instruments All Keithley Instruments product names are trademarks or registered trademarks of Keithley Instruments Other brand names are trademarks or registered trademarks of their res...

Page 3: ...be connected to mains These instruments will be marked as category II or higher Unless explicitly allowed in the specifications operating manual and instrument labels do not connect any instrument to...

Page 4: ...y disposed of according to federal state and local laws The WARNING heading in the user documentation explains dangers that might result in personal injury or death Always read the associated informat...

Page 5: ...Inspection for damage 1 6 Shipment contents 1 6 Repacking for shipment 1 7 Getting started 2 1 Introduction 2 1 Front panel summary 2 1 Rear panel summary 2 3 Power up 2 5 Line power connection 2 5 L...

Page 6: ...1 Introduction 4 1 Voltage measurements 4 1 Basic measurement procedure 4 2 Volts configuration 4 4 Voltage measurement considerations 4 6 Current measurements 4 9 Basic measurement procedure 4 10 Am...

Page 7: ...bs ranges 5 14 Logarithmic currents 5 15 Non decade current gains 5 17 Range and resolution 5 17 Measurement range 5 17 Display resolution 5 18 Zero check relative and zero correct 5 19 Zero check 5 1...

Page 8: ...ata elements 8 1 Configuring data storage 8 3 Data store configuration menu 8 3 Storing and recalling readings 8 6 Buffer multiple displays 8 7 Filters and math 9 1 Introduction 9 1 Filters 9 1 Digita...

Page 9: ...el operation 11 9 Error and status messages 11 9 IEEE 488 status indicators 11 9 LOCAL key 11 10 Programming syntax 11 10 Command words 11 10 Program messages 11 13 Response messages 11 15 Message exc...

Page 10: ...register 13 12 Service request enable register 13 13 Serial poll and SRQ 13 14 SCPI command reference 14 1 Introduction 14 1 Signal oriented measurement commands 14 1 FETCh 14 2 CONFigure function 14...

Page 11: ...MMediate 14 45 DISPlay subsystem 14 45 TEXT commands 14 46 DATA a 14 46 STATe b 14 47 ATTRibutes 14 48 DATA 14 48 CNDisplay 14 49 SMESsage b 14 49 ENABle b 14 50 FORMat subsystem 14 50 DATA type lengt...

Page 12: ...g b 14 82 GUARd b 14 83 ADIScharge commands 14 83 STATe b 14 83 LEVel NRf 14 84 XFEedback b 14 84 VSControl name 14 85 MSELect name 14 85 RESistivity commands 14 85 FSELect name 14 86 STHickness NRf 1...

Page 13: ...24 KEY NRf 14 125 CLEar 14 126 DATE yr mo day 14 127 TIME hr min sec 14 127 TSTamp commands 14 127 TYPE name 14 128 RELative RESet 14 128 RNUMber RESet 14 128 Zero check and zero correct commands 14 1...

Page 14: ...ous commands 14 153 ILINe NRf 14 153 OLINe NRf 14 153 SSYNchronous LINE NRf 14 154 RTCLock commands 14 154 DATE yr mo day 14 154 TIME hr min sec 14 155 TSEQuence subsystem 14 155 General test sequence...

Page 15: ...14 Calibration command reference 15 17 Voltage offset calibration commands 15 17 Current offset calibration commands 15 18 Charge calibration commands 15 19 Current calibration commands 15 20 Voltage...

Page 16: ...ode summary C 1 IEEE 488 bus overview D 1 Introduction D 1 Bus description D 2 Bus lines D 3 Data lines D 3 Bus management lines D 4 Handshake lines D 5 Bus commands D 6 Uniline commands D 7 Universal...

Page 17: ...e Manual This section contains general information about the Keithley Instruments Model 6517B Electrometer Capabilities and features overview The Model 6517B is a 6 digit Electrometer high resistance...

Page 18: ...sequences Remote operation using the IEEE 488 GPIB bus or the RS 232 interface Scan measure channels of an external scanner Scan measure channels of an internal scanner card for example Model 6521 or...

Page 19: ...ial cable lengths Model Metric length Imperial length Model 7078 TRX 3 0 9 m 3 ft Model 7078 TRX 10 3 m 10 ft Model 7078 TRX 20 6 m 20 ft Model 7078 TRX TBC Connector This is a 3 lug female triaxial b...

Page 20: ...This sensor allows the Model 6517B to make relative humidity measurements 0 to 100 Also included is an extension cable part number CA 129 1 Model 6517 TP Thermocouple with Leads This type K thermocou...

Page 21: ...tact your local Keithley Instruments office sales partner or distributor You can also call the corporate headquarters of Keithley Instruments toll free inside the U S and Canada only at 1 800 935 5595...

Page 22: ...tive film over the display lens which can be removed Report any damage to the shipping agent immediately Save the original packing carton for possible future shipment Before removing the Model 6517B f...

Page 23: ...aterial Authorization RMA number please contact your local Keithley Instruments office sales partner or distributor You can also call the corporate headquarters of Keithley Instruments toll free insid...

Page 24: ...n contains identification and descriptions of controls and components of the Keithley Instruments Model 6517B Electrometer and detailed information for powering up the Model 6517B Front panel summary...

Page 25: ...ing functions REL Enables disables relative reading FILTER Displays digital filter status for present function and toggles filter on off MATH Displays math calculation and toggles math on off if confi...

Page 26: ...descriptions of the rear panel components follow Figure 2 Model 6517B rear panel 1 INPUT CONNECTOR Unguarded Configuration Disable GUARD for amps ohms coulombs and unguarded volts measurements Guarded...

Page 27: ...he fuse needs to be replaced refer to Line fuse replacement on page 2 5 9 IEEE 488 CONNECTOR Connects the instrument to the IEEE 488 GPIB bus use shielded IEEE 488 cables 10 INTERLOCK Connects the saf...

Page 28: ...ke sure that the front panel power switch is in the off O position Be sure that line input voltage is set to the correct range for the power supply being used to power the Model 6517B Line voltage is...

Page 29: ...on page 2 7 If a failure is detected the instrument momentarily displays an error message and the ERR annunciator turns on If a problem develops while the instrument is under warranty return it to Ke...

Page 30: ...n the buffer Error 511 GPIB address lost GPIB address is reset to factory default 27 and stored into EEPROM Error 512 Power up state lost Power up defaults are reset to factory defaults bench and stor...

Page 31: ...ineering units or in scientific notation as shown in the table below In scientific mode the exponent can be fixed to a specified value or it can be floating In floating mode the instrument automatical...

Page 32: ...ment or that the signal exceeds 120 of the range Generally the OUT OF LIMITS condition can be eliminated by better shielding of the signal source or by using other noise reduction methods Another solu...

Page 33: ...Section 2 Getting started Model 6517B Electrometer Reference Manual 2 10 6517B 901 01 Rev C August 2015 Figure 3 Input signal Figure 4 Measurement on 20 nA range...

Page 34: ...NATED EE 410 Query INTERRUPTED EE 350 Queue overflow EE 330 Self test failed EE 314 Save recall memory lost EE 285 Program syntax error EE 284 Program currently running EE 282 Illegal program name EE...

Page 35: ...gram mnemonic too long EE 111 Command Header Separator Error EE 110 Command Header Error EE 109 Missing Parameter EE 108 Parameter not allowed EE 105 GET not allowed EE 104 Data Type Error EE 103 Inva...

Page 36: ...lost EE 514 Calibration dates lost EE 515 Calibration tolerances lost 516 Calibration tables lost EE 517 Voltage Offset lost EE 518 Current Offset lost EE 519 Installed option id lost EE 520 Option c...

Page 37: ...bottom line of the front panel display The PREV and NEXT display keys scroll through the selections for the present function The multiple displays can show a reading in a different form or give addit...

Page 38: ...ual values Limits bar graph Relative humidity and external temperature stamp R Source V and measure I values Bar graph The normal bar graph with a zero at the left end is a graphical representation of...

Page 39: ...67 are shown rounded to the nearest integer percent Perform the following to view or change the plus and minus percentage of range 1 From a measurement function press CONFIG and then NEXT or PREV dis...

Page 40: ...rameter is keyed in by placing the cursor on the digit to be changed and using the RANGE up or down key to increment or decrement the digit 5 A change is only executed when ENTER is pressed Entering a...

Page 41: ...r on to GPIB default setup conditions Power on to setup stored at a memory location 0 9 Reset Menu Return 6517B to bench default setup Return 6517B to GPIB default setup 2 COMMUNICATION GPIB ADDRESS E...

Page 42: ...ines Checks changes sense of digital output lines Displays serial number memory option SCPI version and firmware revisions A D menu Enables disables line synchronization Also displays power line frequ...

Page 43: ...and press ENTER The instrument immediately restores that setup configuration POWERON Use this menu item to select the instrument setup that goes into effect when the instrument is turned on The instru...

Page 44: ...ditions Function or operation Bench default SYSTem PRESet GPIB default RST A D Controls Line Synchronization On On Data Stamp Temperature external Off Off Humidity Off Off Hardware Limit On On Buffer...

Page 45: ...ise Tolerance Level 1 1 Filter Mode Moving Repeat Median Filter On On Rank 1 1 I Amps Damping Off On Range Manual 20 mA Manual 20 mA Autorange Off Off Limits Use all ranges Use all ranges Limits Limit...

Page 46: ...all ranges Manual 200 k Off N A Manual 2 M On Use all ranges Manual 200 k Off N A Manual Relative Value Auto Off 0 0 Off 0 0 Resolution Auto 5 5 d Auto 5 5 d Scanning Scan Type Internal Scan Channels...

Page 47: ...Bias Time Measure Voltage Measure Time Discharge Time Volume Resistivity Pre discharge Time Bias Voltage Bias Time Measure Voltage Measure Time Discharge Time Alternating polarity Offset Voltage Alter...

Page 48: ...ink Mode Triglink Input Triglink Output Delay Count Control Scan layer Source Triglink Input Triglink Output Delay Count Control Arm layer Source Triglink Input Triglink Output Count Control Basic Tri...

Page 49: ...late problems with the Model 6517B front panel display Each SELF TEST menu item features prompts to guide the user through the diagnostics LIMITS The LIMITS menu is used to set and control the limit v...

Page 50: ...nd external temperature To configure time stamp To choose the character displayed for a decimal and select measurement units To set the real time clock DIGOUT Digital I O menu DIGOUT controls the Digi...

Page 51: ...D conversions assume an integration time of 1 PLC Power Line Cycle Changing the state of line synchronization halts triggers and puts the instrument into idle Press TRIG to return to re arm triggers...

Page 52: ...time stamp types are described as follows RELATIVE TIME With this selection time stamps are oriented to a timer and reference each reading to a point in time The timer starts at 0 000000 seconds when...

Page 53: ...or F for internal or external temperature measurements CLOCK The Model 6517B has a real time clock that is used for time stamping bus and buffer readings real time time stamp and as a control source f...

Page 54: ...rements on page 4 1 Hazardous voltages may be present on the output and guard terminals To prevent electrical shock that could cause injury or death NEVER make or break connections to the Model 6517B...

Page 55: ...shown in the following figure Input low is accessed through the COMMON connector on the rear panel This configuration is used for guarded voltage measurements only Note that guard can only be enabled...

Page 56: ...tection The Model 6517B incorporates protection circuitry against nominal overload conditions However a high voltage 250 V and resultant current surge could damage the input circuitry A typical test c...

Page 57: ...trometer input Figure 13 Capacitor test circuit with protection Connection methods High resistance meter connections The Model 6517B uses the force voltage measure current FVMI configuration to measur...

Page 58: ...n the following figure Figure 15 Force voltage measure current equivalent circuit Voltage source output connections The voltage source output is accessed at the rear panel V SOURCE OUT HI and LO bindi...

Page 59: ...ard V source probes and cables The following probe and cable sets are available from Keithley Instruments as options Model 8606 High Performance Probe Tip Kit Consists of two spade lugs two alligator...

Page 60: ...s is the same as the Model 7078 TRX 3 except that it is 10 feet in length Model 7078 TRX 20 This is the same as the Model 7078 TRX 3 except that it is 20 feet in length When using cables keep the foll...

Page 61: ...est noise performance Do not make floating measurements with electrometer LO connected to chassis ground If the rear panel ground link is installed between COMMON and chassis ground remove it before f...

Page 62: ...nique guard technique is used in a high impedance test circuit where significant leakage current may exist between the ammeter input and test circuit common Safety shield A safety shield is required w...

Page 63: ...ltage source The V source of the Model 6517B can also be operated above earth ground as shown in the figure below In this circuit the V source is floating 100 V above ground Therefore a shock hazard 1...

Page 64: ...s Keithley Instruments Model 8009 test fixture This test fixture allows volume resistivity in the range from 103 to 1018 cm and surface resistivity in the range from 103 to 1017 sq cm Features include...

Page 65: ...see Handling and cleaning test fixtures on page 3 15 Test fixture chassis The chassis of the test fixture should be metal so that it can function as a shield for the DUT or test circuit mounted insid...

Page 66: ...l connector must be referenced to chassis ground Therefore DO NOT insulate the outer shell of the triaxial connector from the metal chassis of the test fixture The DUT and test circuits are to be moun...

Page 67: ...henever the test fixture lid is open or ajar The switch must be mounted inside the test box such that it is closed when the lid of the test fixture is closed Opening the lid must cause the interlock s...

Page 68: ...all them in the test fixture Do not touch any connector or terminal insulator If installing a test circuit that is on a pc board handle the board only by the edges do not touch any board traces or com...

Page 69: ...ns 4 35 Introduction This section discusses front panel triggering trigger configuration and external triggering including example setups Voltage measurements The Keithley Instruments Model 6517B Elec...

Page 70: ...rement range 2V and press REL The REL indicator turns on and the ZCor message is displayed Correcting zero on the lowest range corrects all ranges because of internal scaling If guard is enabled the Z...

Page 71: ...6517B Electrometer Reference Manual Section 4 Basic measurements 6517B 901 01 Rev C August 2015 4 3 Figure 29 Guard voltage measurements connections Figure 30 Guarded voltage measurements equivalent c...

Page 72: ...ISABLE ENABLE Filter menu Configure digital averaging filter Select type of average filter No average filtering performed Program a simple average filter 1 100 readings Program a simple average filter...

Page 73: ...PLC Use MEDIUM when a compromise between noise performance and speed is acceptable NORMAL Sets integration time to 1 PLC A compromise like MEDIUM but NORMAL provides better noise performance at the e...

Page 74: ...g the formula in the illustration To keep the error under 0 1 the input resistance RIN must be about 1000 times the value of the source resistance RS The input resistance of the Model 6517B is 2 10E14...

Page 75: ...short the cable can be Using guard can reduce these effects by up to a factor of 1000 refer to Guarding on page 4 16 Guarding Guarding should be used for high impedance voltage measurements and for v...

Page 76: ...Section 4 Basic measurements Model 6517B Electrometer Reference Manual 4 8 6517B 901 01 Rev C August 2015 Figure 32 Unguarded voltage measurements...

Page 77: ...able are at virtually the same potential the potential across RL is zero so no current flows Also with a zero potential across CL there is no capacitor charging process to slow down the measurement re...

Page 78: ...at the input circuit configuration changes with zero check enabled 2 To achieve optimum accuracy for low current measurements it is recommended that you zero correct the instrument To do so select the...

Page 79: ...rence Manual Section 4 Basic measurements 6517B 901 01 Rev C August 2015 4 11 Figure 36 Guarded floating current measurement connections Use for floating circuit where leakage from ammeter input to ci...

Page 80: ...average filtering performed Program a simple average filter 1 100 readings Program a simple average filter 1 100 readings with noise tolerance window 0 100 of range Select moving average or repeating...

Page 81: ...itance seen at the input increases reading noise This capacitance can be attributed to a long input cable or to the capacitance of the source or a combination of both Enabling damping reduces this typ...

Page 82: ...nt error Percent error in a measured reading IM due to voltage burden can be calculated as follows The voltage burden of the Model 6517B depends on the selected range see Accuracy Calculations on page...

Page 83: ...e measurement range Range Minimum recommended source resistance pA nA A mA 1 G to 100 G 1 M to 100 M 1 k to 100 k 1 to 100 Source capacitance DUT source capacitance also affects the noise performance...

Page 84: ...istor is a series diode or two diodes in parallel back to back The diodes can be small signal types and should be in a light tight enclosure Guarding For current measurements guarding is used to drast...

Page 85: ...y RL The current through RL is approximately 10 nA 10 V 1 G 10 nA Thus the current that is measured by the Model 6517B is the sum of the two currents I IR 10 nA Obviously if IR is a low level current...

Page 86: ...te that with AUTO V source selected you are not able to manually adjust the V source or change the V source range when in the ohms function If AUTO V source ohms is on the voltage limit of the V sourc...

Page 87: ...e NEXT display that provides the actual measured current This allows you to check that the selected amps range is the lowest range that can handle the measured current Note that with AUTO range select...

Page 88: ...hile the output is on Power off the equipment from the front panel or disconnect the main power cord from the rear of the Model 6517B before handling cables connected to the outputs Putting the equipm...

Page 89: ...keys and to select the resistance measurement range or select AUTO range Note that with AUTO range selected the instrument does not go to the 2 T 20 T and 200 T ranges For optimum accuracy leakage cu...

Page 90: ...akage current reading 6 Press OPER to place the V source in standby and enable zero check 7 Perform the following steps to establish the amps REL value for the ohms function a Press CONFIG and then R...

Page 91: ...e insulator sample Surface resistivity is measured by applying a voltage potential across the surface of the insulator sample and measuring the resultant current as shown in the following figure Figur...

Page 92: ...olume resistivity Volume resistivity is defined as the electrical resistance through a cube of insulating material When expressed in ohm centimeters it would be the electrical resistance through a one...

Page 93: ...he Circular electrode dimensions in Surface resistivity on page 4 23 to determine dimensions D1 and g An effective area of coefficient B of 0 is typically used for volume resistivity General measureme...

Page 94: ...R 6 If the manual V source adjustment mode is selected use the cursor and the VOLTAGE SOURCE adjust keys to set the voltage level The V source range can be changed from the RANGE item of the CONFIGUR...

Page 95: ...ter No average filtering performed Program a simple average filter 1 100 readings Program a simple average filter 1 100 readings with noise tolerance window 0 100 of range Select moving average or rep...

Page 96: ...s AUTORNG The AUTORNG option is used to configure autorange for the ohms function This option allows you to speed up the autoranging search process by eliminating upper and lower measurement ranges Fo...

Page 97: ...ure After selecting this option you are prompted to enter the value for Ks VOLUME Select this option to make volume resistivity measurements After the option is selected the following menu items are u...

Page 98: ...the test fixture can be cancelled by performing a REL on the current component of the measurement Voltage coefficient The measured value of a high megohm resistor often varies with the applied voltag...

Page 99: ...of the amplifier so that the voltage developed is proportional to the integral of the input current in accordance with the formula The voltage is scaled and displayed as charge Basic measurement proc...

Page 100: ...he desired manual measurement range or auto range 3 Auto discharge is configured from the Coulombs Configuration menu see Coulombs configuration on page 4 33 4 Connect the test cable to the Model 6517...

Page 101: ...aging filter Select type of average filter No average filtering performed Program a simple average filter 1 100 readings Program a simple average filter 1 100 readings with noise tolerance window 0 10...

Page 102: ...gh ranges LO 2 nC 20 nC Use this option to limit the autorange search to the low measurement ranges HIGH 200 nC 2 C Use this option to limit the autorange search to the high measurement ranges Charge...

Page 103: ...ly after zero check is disabled or when auto discharge resets the charge reading This action nulls out the charge reading caused by the hop Other measurement considerations The following measurement c...

Page 104: ...ance that causes the current flow For example bending a triaxial cable causes friction between the center conductor HI and its surrounding insulator resulting in triboelectric currents Triboelectric c...

Page 105: ...connectors in the test system clean Light Some components such as semiconductor junctions and MOS capacitors on semiconductor wafers are excellent light detectors Consequently these components must b...

Page 106: ...duces the amount of electrostatic interference seen in the measurement Magnetic fields A magnetic field passing through a loop in a test circuit generates a magnetic EMF voltage that is proportional t...

Page 107: ...6517B can measure relative humidity and external temperature Humidity and external temperature readings are provided as a multiple NEXT display for each function These readings can also be included as...

Page 108: ...10 mA 5 mV 1000 V 1000 V 1 mA 50 mV The maximum common mode voltage for the V source is 750 Vpeak That is the voltage between V source LO and earth chassis ground must never exceed 750 Vpeak and the...

Page 109: ...ng CONFIG and then OPER The various items of this configuration menu are explained in the following sections Configure V Source menu structure Menu item Description RANGE Select V source range 100 V o...

Page 110: ...ted to ammeter LO refer to Ammeter LO to V source LO connection on page 5 4 for more information Figure 53 V source independent configuration Figure 54 V source independent configuration equivalent ci...

Page 111: ...to V source LO place the cursor on the ON option and press ENTER Conversely to disconnect meter LO from V source LO place the cursor on OFF and press ENTER 3 Use the EXIT key to back out of the menu s...

Page 112: ...e EDIT annunciator turns on and the cursor position for the voltage source value is denoted by the flashing digit Note that the voltage source edit mode will be cancelled if no edit operations are per...

Page 113: ...re V SOURCE menu select RESISTIVE LIMIT to display the options on or off 2 To select resistive current limiting place the cursor on the ON option and press ENTER Conversely to de select resistive curr...

Page 114: ...ashing VOLTAGE SOURCE OPERATE indicator denotes that the voltage source is in current limit A relay switch in series with OUTPUT HI is opened when the voltage source is placed in standby The transitio...

Page 115: ...5 may appear at this output depending on function and range selection Note that the output impedance is 10 k to minimize the effects of loading the input impedance of the device connected to the 2 V A...

Page 116: ...the input signal Connecting PREAMP OUT COMMON or 2 V ANALOG OUTPUT to earth while floating input may damage the instrument The PREAMP OUTPUT accuracy is uncalibrated Note that the PREAMP OUT output re...

Page 117: ...connections equivalent circuits Using external feedback The external feedback function provides a means to extend the capabilities of the Model 6517B Electrometer to such uses as logarithmic currents...

Page 118: ...lowing figure An input current applied to the inverting input of the operational amplifier op amp is nulled by a current feedback through the internal feedback network made up of RFB and CFB Because t...

Page 119: ...feedback network AV is the open loop gain of the electrometer typically greater than 55 106 Note that the input impedance is ZIN 10 M ZFB when zero check is enabled The voltage at the PREAMP OUT termi...

Page 120: ...connectors For convenience a banana jack can be mounted on the box to make the necessary PREAMP OUT connection Alternately a wire could be run through a rubber grommet mounted in a hole in the side o...

Page 121: ...fferent charge measurement ranges can be used by placing an external feedback capacitor between the PREAMP OUT and Input HI and then placing the instrument in the external feedback mode Charge is rela...

Page 122: ...hese limitations most diodes have a limited range of logarithmic behavior A solution to these constraints is to use a transistor configured as a transdiode in the feedback path as shown in in the figu...

Page 123: ...or across the input However the nominal voltage burden of 1 mV must be considered as an error signal that must be taken into account Further processing of the current response can be achieved by using...

Page 124: ...e 2 V range is 2 1 V 2 V 1 05 2 1 V When the integrated average input level exceeds the selected range the OVERFLOW message is displayed However if a stray out of range transient such as a noise spike...

Page 125: ...below The display resolution for ohms readings may be less than what was selected For example assume for an ohms measurement that the measured current is 00 100 pA 20 pA range 4 digit resolution If y...

Page 126: ...second time disables zero check To ensure proper operation always enable zero check before changing functions V I R or Q In coulombs enabling zero check dissipates the charge That is the charge readin...

Page 127: ...figuring REL Pressing CONFigure REL displays the REL value for the present measurement function You can change the REL value using the cursor keys and the manual RANGE keys When ENTER is pressed the i...

Page 128: ...heck 3 Select the range for the measurement 4 Press REL to zero correct the instrument REL indicator is lit and Zcor displayed Note that for the volts function the Zcor message is not displayed if gua...

Page 129: ...stivity tests Normal surface and volume Alternating polarity Surface insulation resistance SIR test Sweep tests Square wave Staircase Test descriptions The following information describes each test sh...

Page 130: ...o 20 mA or less This test allows you to measure the current at various voltage levels When the test is configured you specify the start voltage START V the step voltage STEP V the stop voltage STOP V...

Page 131: ...Model 6517B Electrometer Reference Manual Section 6 Test sequences 6517B 901 01 Rev C August 2015 6 3 Figure 68 Diode leakage current test default measurement points...

Page 132: ...ollowing figure shows the connections for this test A resistor and a diode are used to limit noise for the measurement For this test a fixed voltage BIAS V is applied to the capacitor for specified ti...

Page 133: ...a fixed voltage BIAS V is applied across the insulator for a specified time to allow the charging effects of cable capacitance to stabilize The resistance is then measured and stored in the buffer Th...

Page 134: ...sistivity surface or volume of an insulator sample When used with the Keithley Instruments Model 8009 Resistivity Test Fixture the test conforms to the ASTM D 257 standard See Resistance and resistivi...

Page 135: ...ing sample current from a typical high resistance sample Note that the sample currents shown exhibit some capacitive decay as many high resistance samples also tend to have significant capacitance Whe...

Page 136: ...Section 6 Test sequences Model 6517B Electrometer Reference Manual 6 8 6517B 901 01 Rev C August 2015...

Page 137: ...Y test pattern for the measurement This is a typical test pattern for SIR tests When this test is run a specified voltage BIAS V is applied to the test pattern for a specified time BIAS TIME This bia...

Page 138: ...low level LO TIME and the number of cycles to repeat CYCLE COUNT The following figure shows an example using the default test parameters When the test is run 20 measurements are performed at each hig...

Page 139: ...Model 6517B Electrometer Reference Manual Section 6 Test sequences 6517B 901 01 Rev C August 2015 6 11 Figure 76 Staircase sweep test default measurement points...

Page 140: ...ltage Specify delay Capacitor leakage current test Specify bias voltage Specify number of readings Specify time interval Cable insulation resistance test Specify bias voltage Specify number of reading...

Page 141: ...SWEEP SQUARE WAVE HI LEVEL HI TIME LO LEVEL LO TIME CYCLE COUNT STAIRCASE START STOP STEP STEP TIME Sweep tests Square wave sweep test Specify high level voltage Specify time at high level Specify low...

Page 142: ...e standard method resistivity tests or the alternating polarity test NORMAL Use this menu item to select and configure one of the standard method resistivity tests SURFACE Use this option to select an...

Page 143: ...isabled and the test runs 6 When the test is finished zero check stays disabled and the V source goes into standby 7 The measured readings for the test are stored in the buffer To access these reading...

Page 144: ...onfiguration menu 7 2 Trigger models 7 3 Trigger configuration 7 9 External triggering 7 16 Introduction This section discusses front panel triggering trigger configuration and external triggering inc...

Page 145: ...urce of triggers Use to make measurements immediately Use TRIG key to control measuring Use bus triggers to control measuring Use external triggers to control measuring Use a timer to control measurin...

Page 146: ...ger control mode Enable source bypass Disable source bypass ARM SOURCE IMMEDIATE EXTERNAL MANUAL GPIB TRIGLINK RT CLOCK HOLD COUNT INFINITE ENTER ARM COUNT CONTROL SOURCE ACCEPTOR Arm layer menu Selec...

Page 147: ...ont panel ARM indicator is off when the instrument is in idle Pressing TRIG takes the instrument out of idle ARM indicator turns on Trigger mode With the continuous trigger mode selected operation con...

Page 148: ...17B must be taken out of remote before it responds to the TRIG key Pressing LOCAL takes the instrument out of remote GPIB Event detection is satisfied when a bus trigger GET or TRG is received by the...

Page 149: ...figure is the advanced trigger model which provides more triggering options programmed from the ADVANCED menu item of the CONFIGURE TRIGGER menu Note that scanning operations use this trigger model Fi...

Page 150: ...down to the device action where a measurement occurs Control sources Control sources In general each layer contains a control source which holds up operation until the programmed event occurs The cont...

Page 151: ...e make Also included in the device action is the internal settling time delay for the relay Output triggers In the arm layer and scan layer the output triggers are enabled only if their respective sou...

Page 152: ...ction bus triggers control the measurement interval When the Model 6517B receives a bus trigger GET or TRG it performs a measurement The front panel TRIG key see MANUAL is active with bus triggering s...

Page 153: ...re layer is used for the following operations To select the measuring event SOURCE for the instrument To delay operation in the measure layer To designate the number of measurements the instrument mak...

Page 154: ...rolled by the trigger link of the Model 6517B trigger link is an enhanced trigger system that uses up to six lines to direct trigger pulses to and from other instruments When the Model 6517B receives...

Page 155: ...list For example if the scan list is made up of four channels you can program a count of 12 With this count value the instrument repeats the scan three times An advantage of repeating channels rather...

Page 156: ...e measure layer TRIGLINK With this selection the scan source is controlled by the trigger link of the Model 6517B trigger link is an enhanced trigger system that uses up to six lines to direct trigger...

Page 157: ...gram the Model 6517B to arm up to 99999 times CONTROL Use this menu item to enable or disable the source bypass The source bypass is used to bypass the scan event on the first pass through the scan la...

Page 158: ...s up to six lines to direct trigger pulses to and from other instruments Operation passes into the scan layer when the Model 6517B receives a trigger over the trigger link The front panel TRIG key see...

Page 159: ...ns are done the instrument goes into idle Halting triggers The HALT option of the ADVANCED TRIGGERING menu is used to disarm the instrument and place it in the idle state You can press the TRIG key to...

Page 160: ...n micro DIN sockets used for the trigger link is shown in the below figure Figure 79 Trigger link connector Asynchronous operation The asynchronous mode uses separate lines for input and output trigge...

Page 161: ...g operation in the measure layer each trigger link input trigger makes a measurement After the user programmed DELAY and the measurement settling time the Model 6517B outputs a trigger link completion...

Page 162: ...measure ten DUTs switched by a 10 channel multiplexer card in a Model 7001 7002 Switch System Model 6517B Idle State Bench reset INIT CONT ON Arm layer Arm source Immediate Arm count 1 Arm trigger co...

Page 163: ...e Models 6517B and 7001 7002 are configured as follows Figure 83 Trigger link connections asynchronous example Model 7001 or 7002 Idle State Reset INIT CONT OFF Scan List 1 1 1 10 Arm layer Arm spacin...

Page 164: ...both the arm layer and scan layer are programmed for immediate source operation immediately drops down to the measure layer at point A B Pressing STEP takes the Model 7001 7002 out of the idle state a...

Page 165: ...ne is pulled low 0 V a trigger occurs on the negative going edge When the trigger line is released a trigger occurs on the positive going edge See the following figure for an example The advantage of...

Page 166: ...l 7001s 7002s are in the process of closing a channel they hold the trigger line low Ten milliseconds after switch closure the first Model 7001 7002 releases the trigger line However the second Model...

Page 167: ...Model 7001 or 7002 Idle state Reset INIT CONT OFF Scan list 1 1 1 10 Arm layer Arm spacing Immediate Arm count 1 Arm trigger control Acceptor Scan layer Scan spacing Immediate Number of scans 1 Scan...

Page 168: ...first channel point C Note that the Bypass is in effect only on the first pass through the model d After the relay settles the Model 7001 7002 pulls down the trigger link trigger line point D Since t...

Page 169: ...d when using this command regardless of what elements are stored The number of data points can be set using the front panel Data elements The basic data elements include the reading units reading and...

Page 170: ...0 1 1 0 0 1 1 0 0 1 1 0 0 1 1 0 0 1 1 0 0 1 1 0 1 0 1 0 1 0 1 0 1 0 1 0 1 0 1 0 1 0 1 0 1 0 1 0 1 0 1 0 1 0 1 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 15847 11885 11885 9507 105...

Page 171: ...RELATIVE TIME REAL TIME FORMAT ABSOLUTE DELTA ELEMENTS DISPLAY Select buffer size Enter number of readings to store Use finite measure count from trigger model Select type of buffer control Fill buff...

Page 172: ...dings stored before the trigger event and 50 readings stored after the trigger The first reading after the trigger is reading zero Pretrigger readings have reading numbers and relative time stamps wit...

Page 173: ...mped with the actual time and date Time can be expressed in the 12 hour AM PM format or the 24 hour format With the DELTA format selected the first buffer reading is time stamped at 00000d 00h 00m 00...

Page 174: ...l number is not displayed even though it is a selected data element V source When selected the sourced voltage level is available as a multiple NEXT display DISPLAY This menu item is used to enable or...

Page 175: ...age complete press RECALL Rdg 00050 Time 004 999990 sec Rdg 00000 Time 000 000000 sec Rdg 00049 Time 004 899996 sec normal reading display on off A manual trigger is used as an example Other pretrigge...

Page 176: ...5e 00 The equation used to calculate the mean is Where xi is a stored reading and n is the number of stored readings Note that if n 0 the result is NAN not a number StdDev This operation displays the...

Page 177: ...is enabled by pressing the FILTER key FILT annunciator turns on Pressing FILTER a second time disables filter When FILTER is enabled the status of the two filters is briefly displayed For example Filt...

Page 178: ...additional filter parameter is the mode either moving or repeating A moving filter is a first in first out stack where the newest reading conversion replaces the oldest An average of the stacked read...

Page 179: ...of sample readings used for the median calculation is determined by the selected rank 1 to 5 as follows Sample readings 2 R 1 Where R is the selected rank 1 to 5 For example a rank of 5 uses the last...

Page 180: ...Section 9 Filters and math Model 6517B Electrometer Reference Manual 9 4 6517B 901 01 Rev C August 2015...

Page 181: ...Model 6517B Electrometer Reference Manual Section 9 Filters and math 6517B 901 01 Rev C August 2015 9 5 Figure 90 Digital filter moving filter mode Figure 91 Digital filter repeating filter mode...

Page 182: ...ogram a simple average filter 1 100 rdgs with noise tolerance 0 100 of range Select moving average or repeating average mode Configure median filter Disable median filter Enable median filter and spec...

Page 183: ...the averaging filter AVERAGING MODE This selection determines the mode of an average filter for a measurement function either a moving or repeating average MOVING This item selects a moving filter whe...

Page 184: ...displayed reading is expressed as a percentage of the target value often in scientific notation The percentage calculation is performed as follows As an example consider the default target value for...

Page 185: ...ivides the normal display reading by the user specified reference value Where X is the normal display reading Y is the specified reference value Ratio is enabled through the CONFIGURE MATH menu Logari...

Page 186: ...nd enter constants Percent Select percent calculation and enter target reference value DEV Select percent deviation calculation and enter reference value DEVIATION Select deviation calculation and ent...

Page 187: ...e input reading is converted to its log base 10 equivalent and displayed Math multiple display One of the multiple displays lets you view the reading on the bottom line of the display and the result o...

Page 188: ...nts To set the digital output patterns that signify passing or failing limit checks To enable disable a binning strobe signal on digital output 4 for triggering a user supplied device handler Since th...

Page 189: ...0 6 M reading equals 600 000 FAIL Limit set 1 is available as a multiple display which shows a bar graph and a pass fail indication for the measurements While the limits bar graph is displayed the pro...

Page 190: ...limit is displayed To change the limit use the cursor keys and the RANGE keys to display the desired value Note that you must enter values in scientific notation Press ENTER to select your value and d...

Page 191: ...al device handler binning is enabled from the front panel or with the bus command CALCulate3 BSTRobe STATe ON the binning strobe signal is set to FALSE When binning is disabled the strobe signal is le...

Page 192: ...t Value Action LOLIM1 HILIM1 LOLIM2 HILIM2 90 k 110 k 99 k 101 k DIGOUT1 ON others OFF DIGOUT2 ON others OFF DIGOUT1 ON DIGOUT2 ON others OFF DIGOUT3 ON others OFF 2 Enable the binning strobe signal f...

Page 193: ...y the next menu item LOGIC SENSE The state ON or OFF of a digital output line is changed by placing the cursor on the desired line and pressing the manual RANGE keys These keys simply toggle the state...

Page 194: ...t high 5 V or low 0 V and sinks up to 100 mA The four output lines can also operate external supplies from 5V to 30V Use the DIGITAL I O Menu to select the following options STATE ON or OFF selectable...

Page 195: ...t exceed 100 mA Do not apply more than 100 mA maximum current or exceed 30 V maximum voltage on pin 5 of the digital I O port Applying current or voltage exceeding these limits may damage the instrume...

Page 196: ...check the logic sense setting of the Model 6517B output lines TTL1 through TTL4 Make sure the correct LOGIC SENSE value is selected for each output line The LOGIC SENSE value varies according to the t...

Page 197: ...he Model 6517B for measurement The channel control and scanning capabilities depend on whether an internal or external scanner card is being used as well as on the capabilities of the scanner card in...

Page 198: ...mpty The displayed message prompts you to reset the external scanner Press ENTER when ready b Card installed in option slot Select the PERFORM SCAN option from the menu and select EXTERNAL scanning Th...

Page 199: ...n the buffer If you select YES the number of readings that are stored in the buffer are displayed Note that the buffer size is limited see Buffer data store on page 8 1 for details 12 The last message...

Page 200: ...ts standard IEEE 488 2 defines a syntax for sending data to and from instruments how an instrument interprets this data what registers should exist to record the state of the instrument and a group of...

Page 201: ...t connections remain secure Figure 98 Standard IEEE 488 connectors A typical connecting scheme for a multi unit test system is shown in the following figure Although any number of connectors could the...

Page 202: ...onnecting method Note that the IEEE 488 bus is limited to a maximum of 15 devices including the controller The maximum cable length is 20 meters or two meters times the number of devices whichever is...

Page 203: ...ecting interface parameters Communication menu The COMMUNICATION menu option allows you to select and configure the GPIB or RS 232 bus Use the MENU key to access this menu option see Menu on page 2 18...

Page 204: ...MENTS This menu item lets you select the data elements sent Use one of the RANGE keys and to toggle between yes y and no n RDG The numeric value of the reading RDG The buffer location of the reading T...

Page 205: ...and no n RDG The numeric value of the reading RDG The buffer location of the reading The reading number can be reset to zero from the GENERAL MENU UNIT The units of the reading CH The channel number t...

Page 206: ...t primary address of the instrument is displayed For example if the instrument is set to primary address 27 the following message is displayed ADDRESS 27 0 30 6 To retain the displayed address press E...

Page 207: ...inimum of 100 seconds LLO local lockout The LLO command is used to prevent local operation of the instrument After the unit receives LLO all its front panel controls except POWER are inoperative In th...

Page 208: ...instrument Each of these indicators is briefly described below REM This indicator shows when the instrument is in the remote state Note that REM may not always show the state of the REN line because t...

Page 209: ...mplete information on SCPI commands Command words Program messages are made up of one or more command words Commands and command parameters Common commands and SCPI commands may or may not use a param...

Page 210: ...umber or one of the following name parameters DEFault MINimum or MAXimum When the DEFault parameter is used the instrument is programmed to the RST default value When the MINimum parameter is used the...

Page 211: ...DEFault Query the lowest allowable value TRIGger TIMer MINimum Query the largest allowable value TRIGger TIMer MAXimum Case sensitivity Common commands and SCPI commands are not case sensitive You ca...

Page 212: ...of one or more command words sent by the computer to the instrument Each common command is simply a three letter acronym preceded by an asterisk SCPI commands are categorized into subsystems and are s...

Page 213: ...an error would occur Command path rules 1 Each new program message must begin with the root command unless it is optional for example SENSe If the root is optional simply treat a command word on the...

Page 214: ...message for all the queries is sent to the computer when the Model 6517B is addressed to talk The responses are sent in the order that the query commands were sent and are separated by semicolons Ite...

Page 215: ...the IEEE 488 bus The flowchart below which summarizes operation over the bus is called the Trigger model It is called the trigger model because operation is controlled by SCPI commands from the Trigg...

Page 216: ...tion does not occur until the selected control source event is detected The control sources are explained as follows Immediate With this control source selected event detection is immediately satisfie...

Page 217: ...ge 11 20 for more information IMMediate Each time an IMMediate command is sent operation loops around the respective control source It is used when you do not wish to wait for the programmed event to...

Page 218: ...primary device action is a measurement However the device action could include a function change and a channel scan if scanner is enabled A channel is scanned closed before a measurement is made When...

Page 219: ...rigger layer control source A counter resets when operation loops back to a higher layer or idle RS 232 serial interface The Model 6517B has a built in RS 232 serial interface Over this interface you...

Page 220: ...lect CR CR LF LF or LF CR Select FLOW CTRL NONE or XON XOFF Select STOP Select 1 or 2 3 Continue on to select the data elements that you want to include for each conversion Use a manual range key to t...

Page 221: ...7B also recognizes X_OFF and X_ON sent from the controller An X_OFF causes the Model 6517B to stop outputting characters until it sees an X_ON Incoming commands are processed after the LF character is...

Page 222: ...match between computer and Model 6517B 802 RS 232 overrun detected Data received before previous data can be read 803 RS 232 break detected A break occurred device clear occurs 804 RS 232 noise detect...

Page 223: ...1 Common command summary 12 2 Common command descriptions 12 3 Introduction This section provides detailed information on common IEEE 488 2 commands for the Keithley Instruments Model 6517B Electrome...

Page 224: ...ll pending commands have been executed OPC Operation complete query Places an ASCII 1 into the output queue when all pending selected device operations have been completed OPT Option identification qu...

Page 225: ...mmand is used to clear reset to 0 the bits of the following registers in the Model 6517B Standard event status register Operation event register Error queue trigger event register Sequence event regis...

Page 226: ...d event is unmasked enabled the occurrence of that event sets the ESB bit For information on the standard event status register and descriptions of the standard event bits A cleared bit 0 in the enabl...

Page 227: ...E bits of the standard event enable register where CME Bit B5 32 QYE Bit B2 4 NRf 36 Also see None ESR event status register query This command reads the standard event status register and clears it D...

Page 228: ...vent PON URQ CME EXE DDE QYE OPC Decimal Weighting 128 27 64 26 32 25 16 24 8 23 4 22 1 20 Value 0 1 0 1 0 1 0 1 0 1 0 1 0 1 Bits B8 through B15 are not shown since they are not used Values are 1 Even...

Page 229: ...tes that a command error has occurred Command errors include IEEE 488 2 syntax error Model 6517B received a message that does not follow the defined syntax of the IEEE 488 2 standard Semantic error Mo...

Page 230: ...sets the OPC bit and returns to OCIS When used with the INITiate or INITiate CONTinuous ON command the OPC bit of the standard event status register does not set until the Model 6517B goes back into t...

Page 231: ...17B goes back into the idle state The initiate operations are not considered finished until the instrument goes into the idle state The INITiate POFLag command is used to include or exclude the no ope...

Page 232: ...stored at a memory location The SAV command is used to store a setup configuration at a memory location The Model 6517B is shipped from the factory with SYSTem PRESet defaults loaded into the availab...

Page 233: ...ese commands program and read the service request enable register Usage SRE NRf SRE NRf 0 Clears enable register 1 Set MSB bit Bit 0 4 Set EAV bit Bit 2 8 Set QSB bit Bit 3 16 Set MAV bit Bit 4 32 Set...

Page 234: ...e register can be read using the SRE query command Service request enable register Bit position B7 B6 B5 B4 B3 B2 B1 B0 Event OSB ESB MAV QSB EAV MSB Decimal Weighting 128 27 32 25 16 24 8 23 4 22 1 2...

Page 235: ...structure on page 13 1 For example for an acquired decimal value of 48 the binary equivalent is 00110000 This binary value indicates that Bits 4 and 5 of the status byte register are set Status bye re...

Page 236: ...et bit indicates that one or more enabled status byte conditions have occurred The MSS bit can be read using the STB query command or the occurrence of a service request RQS bit set can be detected by...

Page 237: ...le device operations of the Overlapped command are still in progress The WAI command holds off the execution of subsequent commands until the device operations of all previous Overlapped commands are...

Page 238: ...sets The status structure for the Model 6517B is summarized in Model 6517B status structure on page 13 1 Instrument events such as errors are monitored and manipulated by seven status register sets N...

Page 239: ...Section 13 Status structure Model 6517B Electrometer Reference Manual 13 2 6517B 901 01 Rev C August 2015 Figure 104 Model 6517B status structure...

Page 240: ...rence Manual Section 13 Status structure 6517B 901 01 Rev C August 2015 13 3 Standard event status registers Figure 105 Standard event status registers Operation event status registers Figure 106 Oper...

Page 241: ...Section 13 Status structure Model 6517B Electrometer Reference Manual 13 4 6517B 901 01 Rev C August 2015 Figure 107 Arm event status registers...

Page 242: ...Model 6517B Electrometer Reference Manual Section 13 Status structure 6517B 901 01 Rev C August 2015 13 5 Figure 108 Sequence event status registers...

Page 243: ...Section 13 Status structure Model 6517B Electrometer Reference Manual 13 6 6517B 901 01 Rev C August 2015 Figure 109 Trigger event status registers...

Page 244: ...Model 6517B Electrometer Reference Manual Section 13 Status structure 6517B 901 01 Rev C August 2015 13 7 Figure 110 Measurement event status register...

Page 245: ...t have a condition register A condition register is a real time read only register that is constantly updated to reflect the present operating conditions of the instrument For example while a calculat...

Page 246: ...uery commands are used to read the registers see SCPI command reference on page 14 1 for details Reading a transition filter register does not affect its bit pattern The following operations set 1 all...

Page 247: ...et clears the following enable registers Operation event enable register Questionable event enable register Measurement event enable register STATus PRESet sets all bits of the following enable regist...

Page 248: ...ue when it is read The error queue is considered cleared when it is empty An empty error queue clears the EAV bit in the status byte register An error message from the error queue is read by sending e...

Page 249: ...ter Bit B6 in the status byte register is either The master summary status MSS bit sent in response to the STB command indicates the status of any set bits with corresponding enable bits set The reque...

Page 250: ...ce request enable register is cleared 0 When the masked summary bit in the status byte register sets it is ANDed with the corresponding cleared bit in the service request enable register The logic 0 o...

Page 251: ...the Model 6517B If an SRQ does not occur Bit B6 RQS of the status byte register remains cleared and the program proceeds normally after the serial poll is performed If an SRQ does occur Bit B6 of the...

Page 252: ...Keithley Instruments Model 6517B Electrometer Standard Communications for Programmable Instrumentation SCPI commands including signal oriented commands Signal oriented measurement commands The signal...

Page 253: ...6517B to talk the reading is sent to the computer This command does not affect the instrument setup This command does not trigger a measurement It simply requests the last available reading Note that...

Page 254: ...17B is configured as follows The function specified by this command is selected All controls related to the selected function are defaulted to the RST values Continuous initiation is disabled INITiate...

Page 255: ...n sent a measurement conversion occurs and the reading is acquired When this command is sent the following commands are executed in the order that they are presented ABORt INITiate FETCh When ABORt is...

Page 256: ...nds to perform a one shot measurement and acquire the reading Usage MEASure function function The function CURRent DC Amps function RESistance Ohms function CHARge Coulombs function Details This comma...

Page 257: ...4 25 TRACe subsystem on page 14 136 Trigger TRIGger command summary on page 14 26 TRIGger subsystem on page 14 144 TSEQence TSEQuence command summary on page 14 29 TSEQuence subsystem on page 14 155 U...

Page 258: ...99e20 to 9 999999e20 Query a1 factor 1 MA1Factor MA2Factor NRf Query a1 factor Set a2 for POLynominal 9 999999e30 to 9 999999e30 0 MA2Factor PERCent NRf Query a2 factor Specify target value for percen...

Page 259: ...ry source LOWer Path to configure lower limit DATA n Set lower limit 9 999999e35 to 1 9 999999e35 DATA Query lower limit SOURce NRf Specify digital output 0 to 15 0 SOURce Query source STATe b Enable...

Page 260: ...e limits FAIL Query composite result of LIMIT 1 and LIMIT 2 tests 1 pass 0 fail BSTRobe Path to control limit binning strobe STATe b Enable or disable strobe OFF STATe Query state of binning strobe IM...

Page 261: ...Notes 1 RST and SYSTem PRESet has no effect on a user defined message Cycling power cancels all user defined messages 2 RST and SYSTem PRESet has no effect on the state of the message mode Cycling po...

Page 262: ...active low ALOW LSENse Query polarity of line 2 TTL3 Path to set polarity of digital output line 3 LSENse name Select polarity active high AHIGh AHIGh or active low ALOW LSENse Query polarity of line...

Page 263: ...cify external scan list 1 to 400 channels 10 EXTernal Query the external scan list LSELect name Select scan operation INTernal EXTernal or NONE NONE LSELect Query scan operation STIMe n Specify settli...

Page 264: ...ate line cycles 0 01 to 10 1 AUTO b Enable or disable auto NPLC OFF AUTO ONCE Enable and then disable auto NPLC AUTO Query auto line cycle integration NPLCycles Query line cycle integration rate RANGe...

Page 265: ...able or disable median filter STATe Query state of median filter RANK NRf Specify rank for median filter 1 to 5 1 RANK Query rank GUARd b Enable or disable guard OFF GUARd Query state of guard XFEedba...

Page 266: ...e average filter TYPE name Select filter type NONE SCALar ADVanced SCALar TYPE Query filter type TCONtrol name Select filter type MOVing or REPeat Note 3 TCONtrol Query filter type COUNt n Specify fil...

Page 267: ...Mit n Set lower limit for auto range 0 to 100e18 2e6 LLIMit Query lower limit AUTO Query auto range RESistance MANual Path to configure Manual V source ohms CRANge Path to configure measurement range...

Page 268: ...re and control advanced filter NTOLerance n Specify noise tolerance level 0 to 100 1 NTOLerance Query noise tolerance level STATe b Enable or disable digital filter OFF STATe Query state of digital fi...

Page 269: ...NPLCycles n Set integration rate line cycles 0 01 to 10 OFF AUTO b Enable or disable auto NPLC AUTO ONCE Enable and then disable auto NPLC AUTO Query auto line cycle integration NPLCycles Query line c...

Page 270: ...lerance level 0 to 100 1 NTOLerance Query noise tolerance level STATe b Enable or disable filter OFF STATe Query state of digital filter MEDian Path to control the median filter STATe b Enable or disa...

Page 271: ...tude n Set V source level 0 to 1000 volts 0 AMPLitude Query V source level RANGe n Select V source range 100 selects 100V range 100 selects 1000V range 100 RANGe Query V source range LIMit Path to con...

Page 272: ...e transition register CONDition Read the condition register ARM Path to control arm event registers EVENt Read the event register Note 2 ENABle NRf Program the enable register Note 3 ENABle Read the e...

Page 273: ...default states QUEue Path to access error queue NEXT Read the most recent error message Note 6 ENABle list Specify error and status messages for queue Note 7 ENABle Read the enabled messages DISable l...

Page 274: ...ages from the error queue DATE yr mo day Set date DATE Query date TIME hr min sec Set time 24 hour format TIME Query time TSTamp Path to configure and control time stamp TYPE name Select time stamp ty...

Page 275: ...RS 232 only REMote Put 6517B in remote RS 232 only OFF LLOCkout b Enable or disable local lockout RS 232 only SYSTem MACRo TRIGger Paths to configure Basic triggering EXECute Select basic triggering M...

Page 276: ...pecify number of pre trigger readings PERCent n Specify 0 to 100 of buffer PERCent Query percentage READings n Specify as a number READings Query number of readings SOURce name Select pre trigger sour...

Page 277: ...arm count SOURce name Select control source HOLD IMMediate RTCLock MANual BUS TLINk or EXTernal IMMediate Note 2 SOURce Query control source SIGNal Loop around control source TCONfigure Path to confi...

Page 278: ...put line 1 to 6 2 ILINe Query input line OLINe NRf Select output line 1 to 6 1 OLINe Query output line TRIGger SEQuence 1 Path to program trigger layer IMMediate Loop around control source COUNt n Set...

Page 279: ...h to configure semi synchronous trigger link LINE NRf Select trigger line 1 to 6 1 LINE Query trigger line Notes 1 Defaults for continuous initiation SYSTem PRESet enables continuous initiation RST di...

Page 280: ...000 to 1000 1 V STARt Query start voltage STOP NRf Specify stop voltage 1000 to 1000 10 V STOP Query stop voltage STEP NRf Specify step voltage 1000 to 1000 1 V STEP Query step voltage MDELay NRf Spec...

Page 281: ...SVOLtage Query bias voltage STIME NRf Specify bias time 0 to 99999 9 sec 1 sec STIME Query bias time MVOLtage NRf Specify measure voltage 1000 to 1000 500 V MVOLtage Query measure voltage MTIMe NRf S...

Page 282: ...nsulation resistance test path SVOLtage NRf Specify bias voltage 1000 to 100 50 V SVOLtage Query bias voltage STIME NRf Specify bias time 0 to 99999 9 sec 1 sec STIME Query bias time MVOLtage NRf Spec...

Page 283: ...1 sec STIME Query step time UNIT command summary Command Description Power up defaults UNIT TEMPerature name TEMPerature Select temperature units C CEL F FAR K Query temperature units C SCPI command s...

Page 284: ...se 10 calculation Details This command is used to specify the format for the CALC 1 math calculation With NONE selected no CALC 1 calculation is performed With one of the other formats selected and CA...

Page 285: ...Also see None MA2Factor NRf This command is used to specify the a2 factor Usage CALCulate 1 KMATh MA2Factor NRf MA2Factor NRf 9 999999e20 to 9 999999e20 Details This command is used to specify the a2...

Page 286: ...TATe b This command is used to control the CALC 1 calculation Usage CALCulate 1 STATe b STATe b 0 or OFF Disable CALC 1 calculation 1 or ON Enable CALC 1 calculation Details This command is used to en...

Page 287: ...continuous measurement mode for example waiting for a trigger the displayed reading does not update to reflect the new calculation until the next reading conversion occurs This action command allows...

Page 288: ...for CALC 2 use data stored in the buffer With NONE selected no CALC 2 calculation is performed With one of the other formats selected and CALC 2 enabled the calculation is performed every time the IMM...

Page 289: ...the calculation and read the result is by using the query form of the command IMMediate When this command is sent the calculation is performed and the result is queried Also see None DATA This command...

Page 290: ...er MINimum LOWer MAXimum n 9 999999e35 to 9 999999e35 Specify limit value DEFault Set specified upper limit to 1 set specified lower limit to 1 MINimum Set specified limit to 9 999999e35 MAXimum Set s...

Page 291: ...igital output pattern on the output port Each output line is assigned a decimal weight as follows Digital Output Decimal Weight Line 1 1 Line 2 2 Line 3 4 Line 4 8 The parameter value for the digital...

Page 292: ...at when a limit test LIMIT 1 or LIMIT 2 is enabled the digital output port cannot be controlled from the source Subsystem A fail indication for LIMIT 1 or LIMIT 2 is cleared when the respective limit...

Page 293: ...e that a failure is also cleared when the limit test is disabled STATe OFF Also see None AUTO b This command controls auto clear for LIMIT 1 and LIMIT 2 Usage CALCulate3 LIMit 1 CLEar AUTO b CALCulate...

Page 294: ...ine 2 2 Line 3 4 Line 4 8 The parameter value for the digital pattern is determined by adding the decimal weights of the desired output lines For example if you want output lines 2 and 3 to go true wh...

Page 295: ...of each limit LIMit1 FAIL and LIMit2 FAIL This command like other fail commands does not clear the fail indication for LIMIT 1 or LIMIT 2 Also see None BSTRobe STATe b This command controls the binni...

Page 296: ...ing conversion occurs This action command allows you to re process the current input data to test new limits For example assume the instrument is in a non continuous measurement mode and requires a ma...

Page 297: ...ge Up to 20 for top display Up to 32 for bottom display X number of digits that make up Y 1 or 2 These commands define text messages for display A message can be as long as 20 characters for the top d...

Page 298: ...ed display Details These commands enable and disable the text message modes When enabled a defined message is displayed When disabled the message is removed from the display GPIB operation A user defi...

Page 299: ...ng 0 Character is not blinking For example assume the following menu is displayed with the SAVESETUP option blinking MAIN MENU SAVESETUP COMMUNICATION TEST The response message for disp attr primary d...

Page 300: ...ncel the operations associated with them This command has no effect on any other message types Also see None SMESsage b This command is used to control the status messages Usage DISPlay SMESsage b SME...

Page 301: ...ing message FRONT PANEL DISABLEDPress LOCAL to resume As reported by the message all front panel controls except LOCAL are disabled Normal display operation can be resumed by using the ENABle command...

Page 302: ...hen using the ASCII SREal or DREal parameter a length parameter is not required This command is used to select the data format for transferring readings over the bus For every reading conversion the d...

Page 303: ...n is made up of three 32 bit data blocks Note that the data string for each reading conversion is preceded by a 2 byte header that is the binary equivalent of an ASCII sign and 0 Figure 114 IEEE754 si...

Page 304: ...r starts at zero when the instrument is turned on or when SYStem RNUMber RESet is sent over the bus When a reading is sent over the bus for example FETCh the RNUMber element indicates the reading numb...

Page 305: ...the SYSTem Subsystem A reading of 999 99 means humidity is disabled This data element includes the humidity reading in in the data string ETEMperature External temperature can be measured by connecti...

Page 306: ...yte 1 Byte 2 Byte 8 Double precision For reverse byte order the data format for each element is sent as follows Byte 4 Byte 3 Byte 2 Byte 1 Single precision Byte 8 Byte 7 Byte 1 Double precision The 0...

Page 307: ...subsystem LSENse name This command is used to set the polarity of lines 1 through 4 Usage OUTPut2 TTL 1 LSENse name OUTPut2 TTL2 LSENse name OUTPut2 TTL3 LSENse name OUTPut2 TTL4 LSENse name LSENse n...

Page 308: ...me VOLTage DC Select volts CURRent DC Select amps RESistance Select ohms CHARge Select coulombs Details The FUNCtion command is used to select the measurement function of the instrument Note that para...

Page 309: ...in the response message Thus you may want to perform a function query after a reading query Also see CALCulate subsystems on page 14 32 FRESh This command is used to return a new reading Usage SENSe...

Page 310: ...s the integration rate in seconds per integration NPLC is the number of power line cycles per integration is the power line frequency For 400 Hz line power use 50 Hz to calculate aperture When the int...

Page 311: ...T BY RSLN AUTO Note that the times are provided as NPLC values To convert to aperture times use the formula on the previous page The ONCE parameter is analogous to a momentary toggle switch When AUTO...

Page 312: ...egration period measurement speed for the Model 6517B can be set using either of two commands APERture or NPLCycle Aperture specifies time in seconds per integration while NPLC expresses the integrati...

Page 313: ...RSLN AUTO The ONCE parameter is analogous to a momentary toggle switch When AUTO ONCE is sent auto NPLC turns on momentarily and then disables While enabled it automatically selects the appropriate v...

Page 314: ...g in volts 0 to 21e 3 Expected reading in amps 0 to 2 1e 6 Expected reading in coulombs DEFault 21e 3 amps 2 1e 6 coulombs MINimum 0 all functions MAXimum Same as DEFault Details This command is used...

Page 315: ...etained Note that the instrument must currently be on the specified function in order for ONCE to be effective Using ONCE while on any other function results in an error The autorange command RANGe AU...

Page 316: ...omatic range changes slow down the reading rate By setting upper and lower measurement range limits you can prevent inadvertent range changes to ranges that you are not going to use The upper range li...

Page 317: ...s UPPer n This command is used to set the measurement range for Auto and Manual V source Ohms Usage SENSe 1 RESistance AUTO RANGe UPPer n SENSe 1 RESistance MANual CRANge UPPer n UPPer UPPer DEFault U...

Page 318: ...selected measurement range is retained Note that the instrument must be on the ohms function in order for ONCE to be effective Using ONCE while on any other function results in an error The autorange...

Page 319: ...nt range limits you can prevent inadvertent range changes to ranges that you are not going to use Note that these limits can only be set for Auto V source Ohms They are not available for Manual V sour...

Page 320: ...DEFault 100V range MINimum 100V range MAXimum 1000V range Details This command is used to select the optimum V source range for Auto V source Ohms Specifying the output voltage value automatically sel...

Page 321: ...lue that exceeds 100V results in a Settings Conflict error The amplitude may also be limited by the SOURce VOLTage LIMit AMPLitude command Attempts to set an amplitude that exceeds this programmed lim...

Page 322: ...nabled see STATe b on page 14 72 for REFerence STATe the result is the algebraic difference between the input signal and the reference value Reading Input signal Reference On the ohms function the inp...

Page 323: ...ference for volts amps ohms and coulombs Usage SENSe 1 VOLTage DC REFerence ACQuire SENSe 1 CURRent DC REFerence ACQuire SENSe 1 RESistance REFerence ACQuire SENSe 1 CHARge REFerence ACQuire Details W...

Page 324: ...ished amps reference for the resistance measurement When an amps reference is established and this command is used to enable the amps reference for ohms the current value used to compute resistance Io...

Page 325: ...DIGits MAXimum n 4 3 5 digits 5 4 5 digits 6 5 5 digits 7 6 5 digits DEFault 6 5 5 digits MINimum 4 3 5 digits MAXimum 7 6 5 digits Details These commands are used to select display resolution for th...

Page 326: ...utomatically selects the optimum resolution for the present integration time setting The ONCE parameter is analogous to a momentary toggle switch When AUTO ONCE is sent auto resolution turns on moment...

Page 327: ...er of readings that are averaged by the filter is set with the COUNt command and the TCONtrol command is used to select the filter mode moving or repeating The STATe command is used to enable or disab...

Page 328: ...e filter buffer for the averaging calculation The larger the filter count the more filtering that is performed Also see None STATe b This command is used to control the filter for volts amps ohms and...

Page 329: ...n 1 to 100 Specify noise tolerance in percent DEFault 1 MINimum 0 MAXimum 100 Details Each measurement function can utilize the advanced filter which adds a noise tolerance window to the averaging alg...

Page 330: ...ian filter Details This command is used to control on or off the median filter When enabled the instrument determines and displays the median reading for the specified number of readings The RANK comm...

Page 331: ...1 CHARge MEDian RANK NRf RANK NRf 1 to 5 Specify rank Details The number of sample readings used for the median calculation is determined by the selected range 1 to 5 as follows Sample readings 2 R 1...

Page 332: ...edian filter 0 or OFF Disable median filter Details This command is used to control on or off the median filter When enabled the instrument determines and displays the median reading for the specified...

Page 333: ...ected range 1 to 5 For example a rank of 5 uses the last 11 readings to determine the median 2 5 1 11 Each new reading replaces the oldest reading and the median is then determined from the updated sa...

Page 334: ...hen disabled input LO is placed on the inner shell of the triaxial connector see Shielding and guarding on page 3 7 for more information Also see None ADIScharge commands Auto discharge is used to res...

Page 335: ...This command is used to specify the coulombs level for auto discharge Charge resets when the charge reading reaches the specified level Also see None XFEedback b This command is used to control exter...

Page 336: ...type Usage SENSe 1 RESistance MSELect name MSELect name NORMal Normal resistance measurements RESistivity Resistivity measurements Details This command is used to select the ohms measurement type NORM...

Page 337: ...that needs to be entered is the sample thickness for volume resistivity Specify USER when using any other resistivity test fixture When using this type of test fixture you have to be enter the other p...

Page 338: ...o read the switch setting Surface or Volume of the Model 8009 Resistivity Test Fixture Also see None USER commands The following commands are used to configure the instrument for resistivity measureme...

Page 339: ...rded electrode g Distance mm between the guarded electrode and the ring electrode Also see None KVOLume NRf This command is used to specify the Kv parameter for volume resistivity Usage SENSe 1 RESist...

Page 340: ...commands are used to set the logic levels for the digital output port The actual level high or low of a digital output line depends on its programmed polarity If the polarity of a line is active high...

Page 341: ...by brackets to indicate that they are optional Thus this command can be sent in the following form SOURce VOLTage n Note that the amplitude level is limited by the selected range and programmed volta...

Page 342: ...the 100 V range Specifying a value 100 selects the 1000 V range You cannot select the 100 V range if the programmed amplitude value is greater than 100 A Settings Conflict error results Also see None...

Page 343: ...elected range Attempts to enable voltage limit when the present V source level amplitude exceeds the limit value generates a Settings Conflict error Also see None MCONnect b This command is used to co...

Page 344: ...aced in series with the HI V SOURCE OUT lead to extend the current limit capabilities of the V source When disabled normal current limit occurs at 1 mA Also see None LIMit STATe This command is used t...

Page 345: ...ecified by the list parameter For this command the chanlist can consist of multiple channels The following examples demonstrate the various forms for expressing the channel list List 2 Single channel...

Page 346: ...is used to determine the state opened or not opened of each channel specified by the list parameter For this command the chanlist can consist of multiple channels See CLOSe list on page 14 94 for exa...

Page 347: ...10 to be scanned Details This command is used to define the scan list for the internal scanner card The scan list can contain 2 to 10 channels The following examples demonstrate the various forms for...

Page 348: ...odel 6517B is enabled by the ROUTe SCAN LSELect EXTernal command Also see None LSELect name This command is used to perform a specific scan operation Usage ROUTe SCAN LSELect name LSELect name INTerna...

Page 349: ...r each switch closes a measurement does not occur until after the specified settling time expires Also see None SMEThod name This command is used to select the switching method Usage ROUTe SCAN SMETho...

Page 350: ...uld damage them With the 200V limit enabled the V source can never source more than 200V Note that the SOURce VOLTage LIMit command is also used to set the voltage limit of the V source Of the two vol...

Page 351: ...Bit B0 reading overflow ROF Set bit indicates that the reading exceeds the measurement range of the instrument PTR or the instrument has gone from an overflow condition to a normal reading condition...

Page 352: ...bit indicates that the trace buffer pretrigger event has occurred PTR or the operations associated with the pretrigger have been completed NTR Bit B12 out of limits OL Set bit indicates that signal tr...

Page 353: ...This error clears after successful calibration of the instrument Bit B9 humidity summary Hum Set bit indicates that an invalid relative humidity measurement has occurred PTR or a subsequent valid temp...

Page 354: ...arm Arm Set bit indicates that the instrument is waiting in an arm layer of the trigger model PTR or operation has proceeded from the arm layers into the trigger layer NTR Bits B7 and B8 Not used Bit...

Page 355: ...he trigger layer PTR or that the instrument has exited from the trigger layer NTR Bits B2 through B14 Not used Bit B15 Always zero Figure 119 Trigger event register Arm event register Bit B0 Not used...

Page 356: ...s that instrument operation is in arm layer 1 PTR or that operation has exited from arm layer 1 NTR Bit B2 layer 2 Lay2 Set bit indicates that instrument operation is in arm layer 2 PTR or that operat...

Page 357: ...rmines the desired state 0 or 1 of each bit in the appropriate register Each event enable register is used as a mask for events See EVENt on page 14 100 for descriptions of events When a bit in an eve...

Page 358: ...tion 14 SCPI command reference 6517B 901 01 Rev C August 2015 14 107 Figure 122 Measurement event enable register Figure 123 4200_QuestionableEventEnableRegister Figure 124 Operation event enable regi...

Page 359: ...tion 14 SCPI command reference Model 6517B Electrometer Reference Manual 14 108 6517B 901 01 Rev C August 2015 Figure 126 Arm event enable register Figure 127 Sequence event enable register Also see N...

Page 360: ...en an event is programmed for a positive transition the appropriate bit in the corresponding event register sets when the corresponding bit in the condition register changes from 0 to 1 For example if...

Page 361: ...high limit 2 setting Reading available Sets B5 after a reading is taken and processed Reading underflow Sets B6 when an ohms reading is below the lower range limit Buffer available Sets B7 when the t...

Page 362: ...alid volts measurement occurs Amps summary Sets B1 when an invalid amps measurement occurs Temperature summary Sets B4 when an invalid external temperature reading occurs Humidity summary Sets B9 when...

Page 363: ...ransition effect on operation event register Calibrating Sets B0 at the start of calibration Trigger layer Sets B5 when waiting in the trigger layer Arm layer Sets B6 when waiting in an arm layer Calc...

Page 364: ...mmand reference 6517B 901 01 Rev C August 2015 14 113 Positive transition effect on trigger event register Trigger event Positive transition effect on trigger event register Sequence 1 Sets B1 when wa...

Page 365: ...lectrometer Reference Manual 14 114 6517B 901 01 Rev C August 2015 Positive transition effect on arm event register Arm event Positive transition effect on arm event register Sequence 1 Sets B1 when i...

Page 366: ...B 901 01 Rev C August 2015 14 115 Positive transition effect on sequence event register Sequence event Positive transition effect on sequence event register Layer 1 Sets B1 when in Arm Layer 1 Layer 2...

Page 367: ...as a 1 to 0 state change in the condition register Thus when an event is programmed for a negative transition the appropriate bit in the corresponding event register sets when the corresponding bit i...

Page 368: ...source compliance Sets B14 when V source comes out of compliance Negative transition effect on questionable event register Questionable event Negative transition effect on questionable event register...

Page 369: ...s are used to read the contents of the condition registers Each set of event registers except the standard event register set has a condition register A condition register is similar to its correspond...

Page 370: ...ansition filter registers are set to one 1 2 All bits of the negative transition filter registers are cleared to zero 0 3 All bits of the following registers are cleared to zero 0 a Operation event en...

Page 371: ...f the queue becomes full the message 350 Queue Overflow occupies the last memory location in the register On power up the error queue is empty When the error queue is empty the message 0 No error is p...

Page 372: ...ify which messages you want enabled Messages not specified are disabled and prevented from entering the queue When this command is sent all messages are disabled then the messages specified in the lis...

Page 373: ...ssages are specified by numbers see Status and error messages on page 2 11 Also see ENABle list on page 14 121 CLEar This command is used to clear the error queue Usage STATus QUEue CLEar Details This...

Page 374: ...conditions With PRESet selected the instrument powers up to the SYStem PRESet default conditions Default conditions are listed in the SCPI tables refer to the SCPI command summary on page 14 6 With o...

Page 375: ...ges and positive numbers are used for Keithley Instruments defined messages Refer to Status and error messages on page 2 11 for a list of the messages The SYSTem ERRor query command performs the same...

Page 376: ...MENU 19 OPER 5 Q 20 TRIG 6 FILTER 21 RECALL 7 LOCAL 22 I 8 PREV 23 Z CHK 9 AUTO 26 V source Down Arrow 10 Right Arrow 27 SEQ 11 EXIT 28 CONFIG 12 CARD 29 R 13 MATH 30 REL 14 STORE 31 INFO 15 V Detail...

Page 377: ...PREV key a similar number of times or by sending the DISPlay CNDisplay command For example you can display the bar graph by pressing the NEXT key twice as follows syst key 16 key 16 To return to the...

Page 378: ...us date is retained Also see None TIME hr min sec This command is used to set the time for the clock Usage SYSTem TIME hr min sec TIME hr 0 to 23 Specify hour 24 hr format min 0 to 59 Specify minute s...

Page 379: ...to a timer The timer starts at zero seconds when the instrument is turned on or when the time stamp is reset RELative is a 55 day max clock with 1 s resolution Also see RELative RESet on page 14 128 R...

Page 380: ...01 Rev C August 2015 14 129 Zero check and zero correct commands ZCHeck b This command controls zero check Usage SYSTem ZCHeck b ZCHeck b 0 or OFF Disable zero check 1 or ON Enable zero check Details...

Page 381: ...to first acquire the zero correct value and then use this command to enable Zero Correct Example 2 demonstrates this method Example 1 SYSTem ZCHeck ON SYSTem ZCORrect ON Enable zero check Perform zero...

Page 382: ...to NORMal delays measurements after changing ranges to help avoid oscillating between ranges Also see None TSControl b This command controls external temperature readings Usage SYSTem TSControl b TSC...

Page 383: ...humidity reading in the data string Also see None HLControl b This command controls the A D hardware limit Usage SYSTem HLControl b HLControl b 0 or OFF Disable A D hardware limit 1 or ON Enable A D...

Page 384: ...mmunications This action command is used to take the Model 6517B out of the remote state and enables the operation of front panel keys Note that this command can only be sent over the RS 232 interface...

Page 385: ...out of remote restores front panel key operation but does not change the status of the LLOCkout command Note that this command can only be sent over the RS 232 interface Also see LOCal on page 14 133...

Page 386: ...etails This command specifies which control source is used as the trigger event for instrument readings If in the continuous trigger mode the instrument continuously makes readings when the specified...

Page 387: ...is used to determine if the safety interlock cable is connected to the Model 6517B The response message is interpreted as follows 1 Interlock cable connected to the 6517B and fixture or not connected...

Page 388: ...ar the buffer of readings If you do not clear the buffer a subsequent store overwrites the old readings If the subsequent store is aborted before the buffer becomes full you could end up with some old...

Page 389: ...y number or readings DEFault 100 MAXimum See Data elements on page 8 1 MINimum 1 Details This command is used to specify the size of the buffer When the specified number of readings are stored in the...

Page 390: ...50 000 readings Disabling auto buffer sizing does not affect the size of the buffer It simply means that you must then use the POINts command to change the buffer size If you use the POINts command t...

Page 391: ...dings When a pre trigger store is started readings are continuously stored in the buffer When the pre trigger event occurs post trigger readings fill the part of the buffer that is not reserved for pr...

Page 392: ...enerates an error The command is ignored Also see POINts n on page 14 138 SOURce name This command is used to specify a pre trigger event Usage TRACe FEED PRETrigger SOURce name SOURce name TLINk Use...

Page 393: ...lls readings overwrite the previously stored readings When PRETrigger is selected the buffer stores readings continuously like ALWays until the programmed pre trigger event occurs When the pre trigger...

Page 394: ...stem Note that this command only works while the alternating polarity test sequence is running or waiting for a control source event to start the test sequence Also see None TSTamp FORMat name This co...

Page 395: ...d by commas Details READing STATus RNUMber reading number and UNIT are always enabled for the buffer and are included in the response for the query ELEMents This command is used to include additional...

Page 396: ...completed the instrument leaves the trigger layers and returns to the idle state if continuous initiation is disabled Also see CONTinuous b on page 14 145 CONTinuous b This command is used to control...

Page 397: ...all pending operations of an initiate command are completed Also see OPC operation complete on page 12 8 OPC operation complete query on page 12 9 ABORt This command is used to abort the operation Us...

Page 398: ...when this command is sent Otherwise an error occurs and the command is ignored When the command is sent the bypass occurs and operation continues on Also see None COUNT n This command is used to set...

Page 399: ...Lay MINimum DELay MAXimum n 0 to 999999 999 Specify delay in seconds DEFault 0 second delay MINimum 0 second delay MAXimum 999999 999 second delay Details These delay periods are used to delay operati...

Page 400: ...nt is 1 HOLD is again enforced when operation loops back around With IMMediate selected do not confuse SOURce IMMediate with IMMediate operation immediately passes through the specified layer A specif...

Page 401: ...erval for the scan layer and measure layer timers Note that the timer is in effect only if the timer is the selected control source Also note that the arm layer Arm Layer 1 does not use a timer Also s...

Page 402: ...s Asynchronous trigger link mode Synchronous Semi synchronous trigger link mode Details This command is used to select the protocol for the measure layer trigger link With ASYNchronous selected separa...

Page 403: ...the delay If programmed for another pass through the specified layer count 1 the bypass loop is not in effect even though it is still enabled The bypass loop is in effect if operation first goes back...

Page 404: ...not share the same line If you assign the input to a line that is already being used for the output an error occurs and the command is ignored Also see OLINe NRf on page 14 153 OLINe NRf This command...

Page 405: ...ronous trigger link Also see None RTCLock commands The following commands are used to specify the date and time for the RTCLock control source see TSTamp commands on page 14 127 for more information D...

Page 406: ...hundredth of a second Also see None TSEQuence subsystem The commands in this subsystem are used to configure and control the built in test sequences and are summarized in TSEQuence command summary on...

Page 407: ...nt occurs When using this command for the alternating polarity High resistance resistivity transition filters wait at least 0 3 seconds before using the TRG trigger command Also see TSOurce name on pa...

Page 408: ...ent test SRESistivity Surface resistivity test VRESistivity Volume resistivity test SIResistivity Surface insulation resistance test SQSWeep Square wave sweep test STSWeep Staircase sweep test ALTPola...

Page 409: ...is taken out of the idle state The INITiate and INITiate CONTinuous ON commands take the instrument out of the idle state Note that if the instrument is already in the continuous measurement mode not...

Page 410: ...selected TLINe queries the trigger link line Also see TSOurce name on page 14 158 STARt NRf This command specifies the start voltage for a diode leakage or staircase sweep test Usage TSEQuence DLEaka...

Page 411: ...he specified test TSEQuence DLEakage STOP NRf stops voltage diode leakage test TSEQuence STSWeep STOP NRf stops voltage staircase sweep test STOP queries the stop voltage Also see None STEP NRf This c...

Page 412: ...leakage test Details This command is used to specify the measure time for the specified test Note that the resistor voltage coefficient test uses two measure delays delay 1 and delay 2 This configura...

Page 413: ...n command is used for the following tests Capacitor leakage test Cable insulation resistance test Resistor voltage coefficient test Surface resistivity test Volume resistivity test Surface insulation...

Page 414: ...Details This command is used to specify the bias time for the specified test This configuration command is used for the following tests Surface resistivity test Volume resistivity test Surface insulat...

Page 415: ...pecifies the discharge time for the volume resistivity test DTIMe queries the discharge time Also see None PDTime NRf This command specifies the pre discharge time for the specified test Usage TSEQuen...

Page 416: ...range Details This command is used to specify the measure voltage for the specified test This configuration command is used for the following tests Surface resistivity test Volume resistivity test Su...

Page 417: ...cify the measure time for the specified test This configuration command is used for the following tests Surface resistivity test Volume resistivity test Surface insulation resistance test Alternating...

Page 418: ...0 to 100 0 Volts 100V range 1000 to 1000 Volts 1000V range Details This configuration command is used for the square wave sweep test HLEVel queries the high level voltage Also see None HTIMe NRf This...

Page 419: ...f 100 0 to 100 0 Volts 100V range 1000 to 1000 Volts 1000V range Details This configuration command is used for the square wave sweep test LLEVel queries low level voltage Also see None LTIMe NRf This...

Page 420: ...t Also see None OFSVoltage NRf This command specifies the offset voltage for the alternating polarity resistance resistivity test Usage TSEQuence ALTPolarity OFSVoltage NRf OFSVoltage NRf 1000 to 1000...

Page 421: ...f 1 to MAXimum Number of readings DEFAULT 1 MAXimum See Table 8 2 MINimum 1 Details READings queries number of readings to store Also see None DISCard NRf This command specifies the number of initial...

Page 422: ...eakage test points TSEQuence CIResistance SPOints specifies the resistance test points SPOints queries the number of points Also see None SPINterval NRf This command specifies the time interval betwee...

Page 423: ...readings TEMPerature name These commands select and query temperature units Usage UNIT TEMPerature name TEMPerature name C or CEL C temperature units F or FAR F temperature units K K temperature units...

Page 424: ...ent is still under warranty and its performance is outside specified limits contact your Keithley Instruments representative or the factory to determine the correct course of action Calibration Proced...

Page 425: ...cedure should only be performed by qualified service personnel and only after the instrument has met the warm up criteria described in Warm up period on page 15 2 The following steps are for a complet...

Page 426: ...en take the DMM voltage reading CAL PROT VOFF2 dmm voltage reading CAL PROT VOFF3 5 Allow the input to settle for 10 seconds then take the DMM voltage reading CAL PROT VOFF4 dmm voltage reading 2 nA t...

Page 427: ...PROT VOFF2 dmm voltage reading CAL PROT VOFF3 5 Allow the input to settle for 10 seconds then take the DMM voltage reading CAL PROT VOFF4 dmm voltage reading 2 mA to 20 mA range voltage offset To cali...

Page 428: ...CAL PROT VOFF4 dmm voltage reading Coulombs ranges voltage offset To calibrate the voltage offset for each range 1 Connect the DMM to the Model 6517B preamp output Set the DMM range to 1 V DC Place th...

Page 429: ...rate the current offset for each range 1 Connect the DMM to the Model 6517B preamp output and place the triaxial cap on the Model 6517B input CAL PROT IOFF STEP 2 CAL PROT IOFF1 2 Allow the input to s...

Page 430: ...elay CAL PROT AZERO2M Obtains measured A D zero for 2 mA Range 1 s delay CAL PROT AZERO200U Obtains measured A D zero for 200 mA Range 3 s delay CAL PROT AZERO20U Obtains measured A D zero for 20 mA R...

Page 431: ...Turn the DC current calibrator output on c For each polarity apply the currents between 20 A and 20 mA listed in the Model 6517B range full scale current column of the below table to the model 6517B...

Page 432: ...lue CAL PROT A20P value 200 pA CAL PROT AN200P value CAL PROT A200P value 2 nA CAL PROT AN2N value CAL PROT A2N value 20 nA CAL PROT AN20N value CAL PROT A20N value 200 nA CAL PROT AN200N value CAL PR...

Page 433: ...nF 2 mC 2 Connect the capacitor stated in the Standard capacitor column in the above table 3 Set the calibrator voltage output to 0 0 V 4 Calculate the actual charge see Step 1 and send the command i...

Page 434: ...ted calibrate each polarity of each range a Apply the voltage listed in the first column of the below table b Send the calibration command listed in the second column of the below table with the volta...

Page 435: ...ROT VSRCN100 DMM voltage reading CAL PROT VSET40 5 Take the DMM voltage reading and then send the following command CAL PROT VSRC40 DMM voltage reading 1000 V range calibration To calibrate the 1000 V...

Page 436: ...calibrate 100 C 4 096 mV CAL PROT T100 0 004096 3 Set the calibrator to 0 C and then send the following command to calibrate 0 C CAL PROT TZERO 4 Set the calibrator to 25 C and then send the followin...

Page 437: ...performed the calibration date and the next calibration due date must be set before the calibration can be saved Voltage offset partial calibration All calibration steps are to be performed if perform...

Page 438: ...n If an individual current range of the Model 6517B is calibrated the three steps corresponding to a single current range need to be performed 1 Calibration of the range zero 2 Calibration of the posi...

Page 439: ...sitive full scale point 5 Starting the voltage source negative full scale calibration step 6 Calibrating the voltage source negative full scale point 7 Starting the voltage source positive 40 calibrat...

Page 440: ...nt ranges 3 2 mA 20 mA and 200 mA current ranges 4 2 mA and 20 mA current ranges 5 2 V 20 V and 200 V voltage ranges 6 2 nC 20 nC 200 nC and 2 mC charge ranges Note that for each voltage offset calibr...

Page 441: ...rrent ranges 3 2 nC and 20 nC charge ranges 4 200 nC and 2 mC charge ranges 5 2 V 20 V and 200 V voltage ranges For current offset calibration steps 1 and 2 only the commands in the following table mu...

Page 442: ...CZEROB2N Start 2 nC range calibration CAL PROT CN2N 2nC value Calibrate the 2 nC range CAL PROT CZEROA20N Start 20 nC range calibration CAL PROT C20N 20nC value Calibrate the 20 nC range CAL PROT CZER...

Page 443: ...ge CAL PROT AN2N 2 nA value Calibrate the 2 nA range CAL PROT AZERO20N Calibrate the 20 nA range zero CAL PROT A20N 20 nA value Calibrate the 20 nA range CAL PROT AN20N 20 nA value Calibrate the 20 nA...

Page 444: ...odel 6517B voltage measurement calibration commands Voltage measurement calibration commands Command Description CAL PROT VZERO2 Calibrate the 2 V range zero CAL PROT V2 2 V value Calibrate the 2 V ra...

Page 445: ...nge CAL PROT VSET40 Start the 40 V calibration CAL PROT VSRC40 measured voltage Calibrate the 40 V output CAL PROT VSETZ1000 Start the 1000 V range zero calibration CAL PROT VSRCZ1000 measured voltage...

Page 446: ...te the temperature 25 C range Miscellaneous calibration commands This is a list of the remaining Model 6517B calibration commands Miscellaneous calibration commands Command Description CAL PROT COUNT...

Page 447: ...dlocked 420 Query unterminated 410 Query interrupted 363 Input buffer overrun 350 Queue overflow 314 Save recall memory lost 259 Expression error 241 Hardware missing 230 Data corrupt or stale 225 Out...

Page 448: ...data not allowed 144 Character data too long 141 Invalid character data 140 Character data error 124 Too many digits 123 Exponent too large 121 Invalid character in number 120 Numeric data error 113...

Page 449: ...in trigger layer 172 Waiting in arm layer 1 173 Waiting in arm layer 2 174 Re entering idle layer 301 Reading overflow 302 Low limit 1 event 303 High limit 1 event 304 Low limit 2 event 305 High limit...

Page 450: ...tion 358 200 V negative gain out of specification 359 20 pA offset out of specification 360 20 pA positive gain out of specification 361 20 pA negative gain out of specification 362 200 pA offset out...

Page 451: ...e gain out of specification 385 2 mA negative gain out of specification 386 20 mA offset out of specification 387 20 mA positive gain out of specification 388 20 mA negative gain out of specification...

Page 452: ...egative gain out of specification 421 Current offset not converging 422 Voltage offset not converging 423 Date of calibration not set 424 Next date of calibration not set 425 Calibration data invalid...

Page 453: ...ity current out of limits 700 Low battery detected 800 RS 232 framing error detected 802 RS 232 overrun detected 803 RS 232 break detected 805 Invalid system communication 808 ASCII only with RS 232 8...

Page 454: ...e if calibration is required Following calibration to make sure it was performed properly The information in this section is intended for qualified service personnel only Do not attempt these procedur...

Page 455: ...istors with a value known to the listed uncertainty 100 G 850 ppm 10 G 550 ppm 1 G 550 ppm 100 M 250 ppm Uncalibrated precision resistors 10 M 1 M 10 K 1 K 10 1 Precision capacitors with a value known...

Page 456: ...eft or right arrow keys and press then ENTER The following menu is displayed Restoring PRESET Verification procedures All test configurations must be properly grounded If the triaxial to BNC adapter t...

Page 457: ...nder Considerations on page 16 3 4 Select the DCV 2 V range from the front panel Refer to Measurement range on page 5 17 for more information on page 5 17 5 With zero check enabled press REL to turn o...

Page 458: ...do not include test equipment uncertainties DC amps verification The DC amps verification procedure is performed by applying known currents to the Model 6517B input and verifying that the reading fal...

Page 459: ...cord the calibrator voltage 9 Set the calibrator to the actual voltage See the calibrator documentation for detailed instructions 10 Make sure the calibrator is in operate 11 Allow the reading to sett...

Page 460: ...et the calibrator to 0 0 amps then turn off zero check Allow the reading to stabilize completely before continuing 7 Press REL to enable the Model 6517B REL function 8 Set the calibrator to output 19...

Page 461: ...n charge values derived from a voltage source and capacitor to the Model 6517B input jack and then verifying that the Model 6517B readings fall within specified limits 1 Connect the Model 6517B to the...

Page 462: ...nge as the nominal value to be used 8 Turn off zero check and then set the calibrator output to the desired voltage Allow the reading to settle completely 9 Verify that the Model 6517B reading is with...

Page 463: ...e and turn the voltage source on 8 Set the voltage source to 0 0 V and then verify the readings are within the range specified in the table below 9 Repeat step 8 for each voltage listed in the 100 V r...

Page 464: ...select TEMPERATURE and use the range up or range down key to select ON Press ENTER then press EXIT three times to return to the measurement display Press PREV to view the external temperature 4 Set t...

Page 465: ...or each of the voltage setting list in the table Limits for humidity verification Applied voltage Humidity reading limits 1 year 18 to 28 C 0 0 V 0 to 1 0 25 V 24 to 26 0 5 V 49 to 51 0 75 V 74 to 76...

Page 466: ...dures you must make certain that the instrument is properly configured as follows Failure to do so results in erroneous or erratic measurements Step 1 Select the auto voltage source mode 1 Press CONFI...

Page 467: ...for the 20M and 200M ranges 10 Turn off the Model 6517B voltage source then disconnect the resistance calibrator from the Model 6517B Figure 139 Connections for ohms verification 2 M to 200 M range Mo...

Page 468: ...re that zero check is disabled and allow the reading to settle 6 Verify that the displayed reading is within the calculated reading limits listed in the Limits for ohms verification table 7 Repeat ste...

Page 469: ...eck is disabled and allow the reading to settle 5 Verify that the displayed reading is within the calculated limits listed in the Limits for ohms verification table 6 Repeat steps 2 through 5 for the...

Page 470: ...s Accuracy rdg counts The following example shows how to compute accuracy for the 2 V range Assume that the voltage you are measuring is reading exactly 1 00000 V on the 2 V range From the specificati...

Page 471: ...he 20 mA range equals 00 0005 mA Therefore the accuracy range for the 10 0000 mA reading is 9 9895 mA to 10 0105 mA Calculating ohms accuracy The following information shows how to calculate auto V so...

Page 472: ...curacy rdg counts The following example shows how to compute accuracy for the 2 C range Assume that the charge you are measuring is reading exactly 1 00000 C on the 2 C range From the specifications A...

Page 473: ...alternating polarity measurement is 15 seconds IBG is measured with no voltage applied under normal measurement conditions and 15 seconds according to the user s choice for the measurement of readings...

Page 474: ...listed in the below table Model 6517B interface function codes Code Interface function SH1 Source handshake capability AH1 Acceptor handshake capability T5 Talker basic talker talk only serial poll u...

Page 475: ...bus from other devices is provided by the L function Listener capabilities L4 of the instrument exist only after it has been addressed to listen SR service request function SR1 defines the ability of...

Page 476: ...Decimal Hexadecimal ASCII IEEE 488 messages Decimal Hexadecimal ASCII IEEE 488 messages 0 1 2 3 4 5 6 7 00 01 02 03 04 05 06 07 NUL SOH STX ETX EOT ENQ ACK BEL GTL SDC PPC 16 17 18 19 20 21 22 23 10 1...

Page 477: ...13 MLA 14 MLA 15 71 72 73 74 75 76 77 78 79 47 48 49 4A 4B 4C 4D 4E 4F G H I J K L M N O MTA 7 MTA 8 MTA 9 MTA 10 MTA 11 MTA 12 MTA 13 MTA 14 MTA 15 48 49 50 51 52 53 54 55 30 31 32 33 34 35 36 37 0 1...

Page 478: ...PE 112 113 114 115 116 117 118 119 70 71 72 73 74 75 76 77 p q r s t u v w MSA 16 PPD MSA 17 PPD MSA 18 PPD MSA 19 PPD MSA 20 PPD MSA 21 PPD MSA 22 PPD MSA 23 PPD 104 105 106 107 108 109 110 111 68 69...

Page 479: ...r Each listener is then referred to as an active listener Devices that do not need to listen are instructed to unlisten The reason for the unlisten instruction is to optimize the speed of bus informat...

Page 480: ...E 488 bus is limited to 15 devices including the controller Therefore any number of talkers and listeners up to that limit may be present on the bus at one time Although several devices may be command...

Page 481: ...ement and handshake lines ensure that proper data transfer and operation takes place Each bus line is active low with approximately zero volts representing a logic 1 true The following paragraphs desc...

Page 482: ...more important management lines because the state of this line determines how information on the data bus is interpreted IFC interface clear As the name implies the IFC line controls clearing of instr...

Page 483: ...e data byte The complete handshake sequence for one data byte is shown in the below figure Once data is placed on the data lines the source checks to see that NRFD is high indicating that all active d...

Page 484: ...commands and their general purposes are summarized in the following table IEEE 488 bus command summary Command type Command State of ATN line Comments Uniline REN remote enable EOI IFC interface clear...

Page 485: ...s to be transmitted easily IFC interface clear IFC is used to clear the interface and return all devices to the talker and listener idle states ATN attention The controller sends ATN while transmittin...

Page 486: ...y command groups and a secondary address group ATN is true when these commands are asserted The commands include LAG listen address group These listen commands are derived from an instrument s primary...

Page 487: ...y the instrument manufacturer and are based on the instrument model defined by the Standard Commands for Programmable Instruments SCPI Consortium s SCPI standard Generally these commands are sent as o...

Page 488: ...e Manual D 10 6517B 901 01 Rev C August 2015 Command codes Command codes for the various commands that use the data lines are summarized in the below figure Figure 144 Command codes Typical addressed...

Page 489: ...1 2 3 4 UNL LAG SDC Set low Stays low Stays low Returns high EOT 3F 3B 04 63 59 4 Assumes primary address 27 Typical common command sequence Step Command ATN state Data bus ASCII Hex Decimal 1 2 3 4...

Page 490: ...ypical addressed command sequence Step Command ATN state Data bus ASCII Hex Decimal 1 2 3 4 UNL LAG SDC Set low Stays low Stays low Returns high EOT 3F 3B 04 63 59 4 Assumes primary address 27 The bel...

Page 491: ...SPD Serial poll disable SPE Serial poll enable Address command group LISTEN TALK LAG Listen address group MLA My listen address UNL Unlisten TAG Talk address group MTA My talk address UNT Untalk OTA...

Page 492: ...In this appendix Information E 2 Appendix E IEEE 488 conformance...

Page 493: ...sage unit None c Queries that generate a response when parsed All queries common commands and SCPI d Queries that generate a response when read None e Coupled commands See the following table 6 Functi...

Page 494: ...Requirement Description or reference 20 TST information See Common commands on page 12 1 21 Status register structure See Status structure on page 13 1 22 Sequential or overlapped commands All are seq...

Page 495: ...D PRET AM O PERC 100 NEV TRAC FEED PRET AMO READ TRAC FEED PRET AMO PERC TRAC FEED CONT TRAC FEED PRET AMO READ TRAC POIN 100 NEV TRAC CLE TRAC FEED CONT NEV APER APER AUTO NPLC AUTO NPLC DIG OFF OFF...

Page 496: ...C AVER AUTO is ON CURR DC AVER AUTO is ON CURR DC AVER AUTO is ON CURR DC AVER AUTO is ON CURR DC AVER AUTO is ON FREQ THR VOLT T TL FREQ THR VOLT RANG FREQ THR VOLT LEV 10 0 8 TEMP TRAN ROUT SCAN INT...

Page 497: ...on page 14 7 CALibration CALibration command reference on page 15 17 DISPlay DISPlay command summary on page 14 9 FORMat FORMat command summary on page 14 10 OUTPut OUTPut command summary on page 14...

Page 498: ...operty of Keithley Instruments All other trademarks and trade names are the property of their respective companies Keithley Instruments Corporate Headquarters 28775 Aurora Road Cleveland Ohio 44139 44...

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