Keithley 9139B-PCA, Instructions Manual

Page 1: ...Instructions 9139B PCA 901 01 Rev A January 2019 9139B PCA 901 01A www tek com keithley Model 9139B PCA Probe Card Adapter P9139B PCA 901 01A...

Page 2: ...Probe Card Adapter Instructions Model 9139B...

Page 3: ...ited These are the original instructions in English All Keithley Instruments product names are trademarks or registered trademarks of Keithley Instruments LLC Other brand names are trademarks or regis...

Page 4: ...d to mains These instruments will be marked as category II or higher Unless explicitly allowed in the specifications operating manual and instrument labels do not connect any instrument to mains Exerc...

Page 5: ...ay invalidate the warranty The CAUTION heading with the symbol in the user documentation explains hazards that could result in moderate or minor injury or damage the instrument Always read the associa...

Page 6: ...needle 2 5 Light cover 2 5 Installation 3 1 Introduction 3 1 General installation considerations 3 1 Mechanical structure 3 2 Safety 3 2 Additional probe card adapter safety interlock cable 3 4 9139B...

Page 7: ...6 Replaceable parts 5 1 Ordering information 5 1 Factory service 5 1 Parts list 5 1 Blank probe card 5 1 9139B 01 and 9139B 02 parts list 5 2 Mechanical specifications 6 1 Probe card adapter mechanica...

Page 8: ...under test DUT while maintaining system specifications It provides greater accuracy of parametric tests in applications that require a wide range of measurements including high voltage up to 1 1 kV wh...

Page 9: ...k height on page 6 2 Features Key features of the 9139B Probe Card Adapter include Vacuum lock allows quick exchange of probe cards with accurate and repeatable alignment System supports up to 64 pins...

Page 10: ...utely certain that all tests have stopped before making contact with anything in the vicinity of the probe card adapter Also never run tests without a probe card installed Related documentation The fo...

Page 11: ...ssembly or the probe card Touching a high impedance area will cause leakage and problems when performing low current measurements Excessive leakage will cause the probe card adapter to fail system tes...

Page 12: ...physical damage Report any such damage to the shipping agent immediately Save the original packing carton for possible future shipment Shipment contents The following items are included with every 913...

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Page 14: ...the drawing following this list for details Prober hardware Probe card adapter assembly Appropriate device under test DUT cables Strain reliefs and other miscellaneous hardware Motherboard containing...

Page 15: ...9 313 02 8 Probe ring shield plate 9139 310 9 Probe ground ring 389 5347 10 Probe ring insert 9139A 325 11 Spacer sets stack height 9139B PCA 01 ST 166 9 3 790 cm 1 492 in 9139B PCA 02 ST 166 10 3 378...

Page 16: ...oint Figure 4 9139B PCA pin arrangement Leakage paths low current and high voltage capabilities The 9139B Probe Card Adapter provides 1 1 kV capability to each of its 64 pins It also significantly imp...

Page 17: ...pins Source and measure lines are guarded on the motherboard using printed circuit board manufacturing techniques System cables can be routed vertically or horizontally to the motherboard Vertical ro...

Page 18: ...types of needles such as epoxy may be used if they conform to the dimensions in the following figure Figure 5 Probe needle mounting Light cover The light cover shields the opening in the center of th...

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Page 20: ...contains information needed to install the 9139B Probe Card Adapter on your prober Several topics contain general installation steps Other topics contain installation steps required for your specific...

Page 21: ...he probe card assembly Safety Failure to make sure that the safety interlock and safety shields and guards are properly installed and arranged as indicated will put personnel in severe danger Severe p...

Page 22: ...your specific prober for prober safety shield information The light cover contains components that allow installation of an interlock switch such as that provided with a Keithley S530 or S535 Parametr...

Page 23: ...and the PCA so that if you unlatch the top plate of the prober and lift it up to change a probe card or take off the PCA the interlock is tripped Figure 7 Model 174 7047 XX Safety Interlock Cable The...

Page 24: ...ter Instructions Section 3 Installation 9139B 901 01 Rev A January 2019 3 5 9139B Probe Card Adapter interlock schematic The following diagram shows an example interlock configuration Figure 9 9139B P...

Page 25: ...the probe card adapter stack height Cable routing Cable routing is an important installation consideration Device under test DUT cables can be routed above or below the top plate of the prober For ca...

Page 26: ...on to the vacuum source 1 Unpack and inspect 9139B see Handling precautions on page 1 4 for special handling information 2 Remove all power from the parametric test system 3 Install the probe card ada...

Page 27: ...Section 3 Installation Model 9139B Probe Card Adapter Instructions 3 8 9139B 901 01 Rev A January 2019 Figure 11 Vacuum control box...

Page 28: ...the parametric test system Route the cables to avoid sources of electromagnetic fields vibration or any other mechanical disturbance 12 Confirm that moving parts of the prober do not contact the cabl...

Page 29: ...he system matrix to the probe card adapter Probe card removal procedure Hazardous voltages may be present on an installed probe card even after the output is disconnected that if contacted may cause p...

Page 30: ...vin connections assure accurate continuity tests Handling and storage of the blank probe card is important see Handling precautions on page 1 4 For accurate leakage tests follow these precautions Do n...

Page 31: ...hanism that are not ordered from Keithley If present remove the retainer clips and air fitting as shown in the following figure Figure 13 9139B probe card adapter Install the top load mechanism as ins...

Page 32: ...is required it is important to perform maintenance operations correctly Maintenance tasks such as replacing cables can have a significant effect on the performance of the probe card adapter When doing...

Page 33: ...thing in the vicinity of the probe card adapter Also never run tests without a probe card installed If time and space are available it is possible to disassemble the probe card adapter without disconn...

Page 34: ...nation that causes shunt resistance leakage between measurement paths Contamination can take many forms Some sources of contamination are Residue remaining after incomplete cleaning Residue after usin...

Page 35: ...y see Probe card removal procedure on page 3 10 3 Using a pair of needle nose pliers pull the defective pogo pin out of its socket The pogo pins are not symmetrical Damage to the socket may occur if t...

Page 36: ...of the motherboard Do not apply excessive heat when desoldering the socket Excessive heat can melt the retention ring of the probe card adapter 5 Push the end of the desoldered socket that protrudes...

Page 37: ...nformation 14 Reinstall the probe card Replacing the vacuum connection The vacuum connection of the probe card adapter can be replaced if damaged To replace the vacuum connection 1 Remove the vacuum c...

Page 38: ...ice To return the probe card adapter to Keithley Instruments for repair 1 Obtain a return authorization RA number from Keithley 2 Carefully pack the probe card adapter in the original packing carton o...

Page 39: ...ly Lug Lug Motherboard retainer ring O ring thermobonded use Swagelok VAC Goop O ring thermobonded use Swagelok VAC Goop Pin crimp barrel 0 040 Pin crimp barrel 0 060 Probe card Probe card retainer ca...

Page 40: ...robe card adapter mechanical drawings You can use the drawings in this section to determine whether your prober is compatible with the 9139B Probe card adapter assembly Figure 15 Probe card adapter wi...

Page 41: ...tions Model 9139B Probe Card Adapter Instructions 6 2 9139B 901 01 Rev A January 2019 Probe card adapter width and stack height Figure 16 Stack width and height Probe card adapter top view pin arrange...

Page 42: ...Model 9139B Probe Card Adapter Instructions Section 6 Mechanical specifications 9139B 901 01 Rev A January 2019 6 3 Probe card dimensions Figure 18 9139B 1 1 kV 64 channel probe card dimensions...

Page 43: ...names are the property of Keithley Instruments All other trademarks and trade names are the property of their respective companies Keithley Instruments Corporate Headquarters 28775 Aurora Road Clevela...