Keithley S530, Administrative Manual

Page 1: ...www tek com keithley S530 Parametric Test System Administrative Guide S530 924 01 Rev D September 2017 PS530 924 01D S530 924 01D A Tektronix Company...

Page 2: ...hole or in part without the prior written approval of Keithley Instruments is strictly prohibited These are the original instructions in English All Keithley Instruments product names are trademarks o...

Page 3: ...be connected to mains These instruments will be marked as category II or higher Unless explicitly allowed in the specifications operating manual and instrument labels do not connect any instrument to...

Page 4: ...ty The CAUTION heading with the symbol in the user documentation explains hazards that could result in moderate or minor injury or damage the instrument Always read the associated information very car...

Page 5: ...ing environment conditions 2 18 Triaxial connector handling and avoiding contamination 2 18 Lockout and tagout 2 19 Installation and connections 2 20 Position the system cabinet 2 20 Floor plan 2 20 S...

Page 6: ...tem emergency off circuit 4 9 Data hub license 4 10 LO patch panel 4 11 Decommissioning an S530 test system 4 12 Instrument specifications and documentation 5 1 Introduction 5 1 Switching 5 2 Model 70...

Page 7: ...uments website http www tek com keithley System description The Keithley Instruments S530 Parametric Test System is a configurable instrument based system for semiconductor parametric characterization...

Page 8: ...nts DMM7510 7 1 2 Digit Graphical Sampling Multimeter quantity 0 to 1 Up to three dual channel pulse cards Frequency measurement option Each system contains Computer inside cabinet External 24 inch fl...

Page 9: ...530 system S530 924 01 Rev D September 2017 1 3 Optional accessories Optional items and accessories that may accompany the S530 system Cables to connect to the test fixture or the probe card adapter 9...

Page 10: ...Floor plan on page 2 20 for specifications Are all of the corridors and hallways large enough to allow clearance for the system Are stairways adequate for moving the system through Are elevators need...

Page 11: ...same power source Did you prepare power outlets for service testing or maintenance Unpacking the S530 system The Keithley field service engineer FSE is responsible for unpacking the S530 system cabine...

Page 12: ...ents contained in the system cabinet Figure 3 S530 crate shock sensor Also check the TIP N TELL indicator to ensure that the crate has not been tipped over see the following figure Figure 4 S530 crate...

Page 13: ...nts 1 Remove the crate clamps from the crate using a standard screwdriver Figure 5 Removing the crate clamps 2 Open the front of the crate The front is identified by the wooden ramp support attached a...

Page 14: ...ion 2 S530 site preparation and installation S530 924 01 Rev D September 2017 2 5 Figure 6 Opening the front of the crate 4 Attach the ramp using the two bolts that are attached to the bottom front of...

Page 15: ...site preparation and installation S530 Parametric Test System Administrative Guide 2 6 S530 924 01 Rev D September 2017 5 Remove the padding from the front of the S530 system cabinet Figure 8 Removin...

Page 16: ...r 2017 2 7 6 Remove the crate clamps and slide the outer box cover off the crate Figure 9 Sliding the outer box off the crate 7 Make sure that you retract the leveling feet on the bottom of the system...

Page 17: ...four bolts from the bottom of the crate that are attached to the bottom of the S530 system cabinet using a 19 mm socket head on a socket wrench Figure 11 System bolted to the crate Figure 12 Removing...

Page 18: ...tallation S530 924 01 Rev D September 2017 2 9 10 Unlock the two wheels casters that are on the front of the S530 system cabinet by moving the locks up Figure 14 System caster brakes 11 With two peopl...

Page 19: ...g the wrap off the system 13 Move the S530 system cabinet to its final destination The system cabinet is shipped from the factory with all of the instruments installed Most equipment connections and w...

Page 20: ...e been ordered with the system for example probe card adapter cables to connect to the test fixture or probe card adapter or advanced seismic securement kit You will also find all of the documentation...

Page 21: ...on 2 S530 site preparation and installation S530 Parametric Test System Administrative Guide 2 12 S530 924 01 Rev D September 2017 Figure 20 S530 keyboard tray and arm accessory Figure 21 Cable suppor...

Page 22: ...3 PSI vacuum supply with a hose connection of 0 64 cm 1 4 in outside diameter and 0 32 cm 1 8 in inside diameter Keithley field service engineer installation tasks The Keithley field service engineer...

Page 23: ...site preparation and installation S530 Parametric Test System Administrative Guide 2 14 S530 924 01 Rev D September 2017 Example S530 System Installation Form Figure 22 Example S530 System Installati...

Page 24: ...S530 Parametric Test System Administrative Guide Section 2 S530 site preparation and installation S530 924 01 Rev D September 2017 2 15 Figure 23 Example S530 System Installation Form page 2...

Page 25: ...abinet size and weight The size and weight specifications for the system cabinet are listed in the next table See Floor plan on page 2 20 for details about designing a floor plan for the system cabine...

Page 26: ...250 V Eurostyle cord If cables with different cable ends are needed you must provide those cables Line power requirements Nominal line power 100 V AC 115 V AC 220 V AC 240 V AC 50 Hz 60 Hz Short circu...

Page 27: ...midity 30 to 60 relative humidity noncondensing after a two hour warm up time Vibration High ambient vibration levels may require isolation pads or the repositioning of equipment Air quality The S530...

Page 28: ...moved before working inside the cabinet Always perform the lockout and tagout procedure before opening the system cabinet Also never turn on the system until all connections and safety grounds are ins...

Page 29: ...type and the two casters at the front are in fixed positions To position the system cabinet 1 Carefully roll the system cabinet to its location next to the prober allowing a minimum distance of 15 cm...

Page 30: ...S530 Parametric Test System Administrative Guide Section 2 S530 site preparation and installation S530 924 01 Rev D September 2017 2 21 Figure 28 S530 floor plan top view...

Page 31: ...Section 2 S530 site preparation and installation S530 Parametric Test System Administrative Guide 2 22 S530 924 01 Rev D September 2017 Figure 29 S530 weight distribution and center of gravity...

Page 32: ...ent is required for the S530 system cabinet You must bolt the system to the floor for safety purposes and to ensure the cabinet will not tip over The following figure shows a label on the keyboard tra...

Page 33: ...r 2017 The following figure shows the restraint brackets and bolt installation dimensions for the system cabinet Figure 31 S530 system securement dimensions The following figure shows how a floor moun...

Page 34: ...floor 16 of each The bolts should be at least grade five bolts 1 Position the cabinet in the desired location on a smooth level floor 2 Place the floor mounting brackets at the corners and make sure...

Page 35: ...ed floor anchors Anchors should have a minimum pullout rating of 450 kg 1000 lb each Install 16 anchors for maximum protection 8 Return the cabinet to marked locations on the floor and use the levelin...

Page 36: ...h is in the back of the cabinet Check that all line cords for the system cabinet are connected to AC power line receptacles Make sure the PDU circuit breaker on the back of the cabinet is in the ON po...

Page 37: ...e power button on the front door of the system to the ON position 3 If the computer has not started to boot open the front cabinet door and press the power standby switch on the host computer 4 Wait f...

Page 38: ...ed self testing Using Telnet Telnet is not enabled by default on the S530 system you must to enable it to use it To enable Telnet 1 From the command prompt as root user type su and the root password 2...

Page 39: ...arted by executing KIHOME IC bin run_ic pl Start the ACS software To start the ACS software log on the computer and double click the ACS icon Shut down using ACS To shut down using the Automated Chara...

Page 40: ...t down The console screen will be blank when it has stopped 7 Turn off power to the cabinet Emergency OFF EMO button An EMERGENCY OFF EMO button is on the system cabinet door see following figure If y...

Page 41: ...y shut down 1 Verify that the hazardous condition or emergency situation is no longer present 2 Rotate the EMERGENCY OFF button to release it 3 Toggle the power switch from ON to OFF and then back to...

Page 42: ...30 has interlocks on both the front and back cabinet doors and at the device under test DUT Also the optional probe card adapter PCA has an interlock that provides protection for connections to a prob...

Page 43: ...must be absolutely certain that all tests have stopped before making contact with anything in the vicinity of the probe card adapter Also never run tests without a probe card installed Network inform...

Page 44: ...components and instructions for replacing components determined to be faulty Handling and cleaning precautions Always grasp cards by the side edges and shields to avoid contamination which will degrad...

Page 45: ...all parts are static sensitive Static sensitive components should be transported and handled only in containers designed to prevent or dissipate static buildup Typically these components are received...

Page 46: ...this agreement a field service engineer will either repair or replace equipment For more information about this service agreement contact Keithley Instruments at 1 800 935 5595 For additional informa...

Page 47: ...nt procedure Severe personal injury or death due to electric shock or electrocution may result if power is not removed before working inside the cabinet Always disconnect the cabinet line cords from t...

Page 48: ...ng the required maintenance or replacement of components Make sure that all connections are secure and connected correctly To restore system power 1 Remove the lock and tag placed on the main circuit...

Page 49: ...mber 2017 Power distribution and emergency off The following figure contains a simplified example layout of various components in the S530 system the LO patch panel and the interlock are shown for ref...

Page 50: ...e making or breaking any connections The following table provides a detailed description of the available connections in the 42000 PDU Information about the EMO circuit s connection and operation is a...

Page 51: ...a quality ground within your facility with 18 AWG wire External fan connection Connector providing 24 V DC to cabinet fans External EMO shorting plug connection DB 25 providing connection to external...

Page 52: ...Section 4 Maintenance S530 924 01 Rev D September 2017 4 9 System emergency off circuit The following figure shows a simplified schematic of the 42000 PDU power distribution unit PDU emergency off EMO...

Page 53: ...when they are shipped If you upgrade or reinstall the KTE software you may need to reinstall the data hub license To upgrade systems with KTE versions earlier than version 5 5 0 1 Open a new Linux ter...

Page 54: ...setenv COMPUTERNAME q1234 where 1234 is your QMO number 5 Go to line 61 in the file and change it to setenv KI_QMO 1234 where 1234 is your QMO number 6 Reboot the computer to reinitialize the datahub...

Page 55: ...alate DIBP For more detailed information see the European Union Directive To minimize environmental impact at system end of life treat the system cables and connections and all subassemblies as waste...

Page 56: ...ey Instruments model 4200 SCS Semiconductor Characterization System 4210 PGU Pulse Card 4220 PGU Pulse Card 4200 SCP2HR Dual Channel Scope Card 707B Semiconductor Switch Matrix 2410 High Voltage Sourc...

Page 57: ...trix Card Low current systems use the 7530 8 12 matrix card to support up to 60 pin connections to the probe card adaptor PCA Model 7072 HV High Voltage Semiconductor Matrix Card High voltage systems...

Page 58: ...W Optional instrumentation Keithley Test Environment KTE version 5 7 0 supports several optional instruments DMM7510 7 Digit Graphical Sampling Multimeter 4220 PGU pulse card 4200 SCP2HR card used fo...

Page 59: ...high voltage system using 4220 PGU pulse generator card S530 low current using 4200 SCP2HR scope card S530 high voltage system using 4220 SCP2HR scope card Typical matrix connections Typical matrix co...

Page 60: ...S530 Parametric Test System Administrative Guide Section 5 Instrument specifications and documentation S530 924 01 Rev D September 2017 5 5 Figure 48 S530 standard 4 wire low current...

Page 61: ...Instrument specifications and documentation S530 Parametric Test System Administrative Guide 5 6 S530 924 01 Rev D September 2017 S530 low current using DMM7510 Figure 49 S530 low current using Model...

Page 62: ...est System Administrative Guide Section 5 Instrument specifications and documentation S530 924 01 Rev D September 2017 5 7 S530 high voltage system using DMM7510 Figure 50 S530 high voltage system usi...

Page 63: ...ions and documentation S530 Parametric Test System Administrative Guide 5 8 S530 924 01 Rev D September 2017 S530 low current using 4220 PGU pulse generator card Figure 51 S530 low current using Model...

Page 64: ...strative Guide Section 5 Instrument specifications and documentation S530 924 01 Rev D September 2017 5 9 S530 high voltage system using 4220 PGU pulse card Figure 52 S530 high voltage system using Mo...

Page 65: ...cifications and documentation S530 Parametric Test System Administrative Guide 5 10 S530 924 01 Rev D September 2017 S530 low current using 4200 SCP2HR scope card Figure 53 S530 low current using Mode...

Page 66: ...nistrative Guide Section 5 Instrument specifications and documentation S530 924 01 Rev D September 2017 5 11 S530 high voltage system using 4200 SCP2HR scope card Figure 54 S530 high voltage system us...

Page 67: ...both ethernet and GPIB to communicate with and control the instruments The diagrams shown in the following figure show how the instruments are connected to each other and what type of communications a...

Page 68: ...S530 Parametric Test System Administrative Guide Section 5 Instrument specifications and documentation S530 924 01 Rev D September 2017 5 13 Figure 56 S530 KTE communications diagram 3...

Page 69: ...tem Administrative Guide 5 14 S530 924 01 Rev D September 2017 S530 ACS communications diagrams The following figure shows three and four 2636A B source measure units However the system only requires...

Page 70: ...names are the property of Keithley Instruments All other trademarks and trade names are the property of their respective companies Keithley Instruments Corporate Headquarters 28775 Aurora Road Clevel...