In this section:
Introduction .............................................................................. 1-1
System description ................................................................... 1-1
Introduction
If you have any questions after reviewing this information, please contact your local Keithley
Instruments office, sales partner, or distributor. You can also call the corporate headquarters of
Keithley Instruments (toll-free inside the U.S. and Canada only) at 1-800-935-5595, or from outside
the U.S. at +1-440-248-0400. For worldwide contact numbers, visit the
System description
The Keithley Instruments S530 Parametric Test System is a configurable, instrument-based system
for semiconductor parametric characterization and testing. There are two different S530 systems
available:
S530 low-current parametric test system
S530 high-voltage parametric test system
The S530 systems have flexible hardware configurations that allow you to customize them to your
specific needs. See the following table for a description of the main system configuration options, and
see the following figure for an example of a typical system configuration.
Section 1
S530 system
