Keysight Technologies B1542A Pulsed IV Package, User Manual

Page 1: ...Keysight Technologies B1542A Pulsed IV Package for B1500A EasyEXPERT User s Guide ...

Page 2: ...e the government rights in excess of these rights customarily provided to the public to use modify reproduce release perform display or disclose commercial computer software or commercial computer software documentation No additional government requirements beyond those set forth in the EULA shall apply except to the extent that those terms rights or licenses are explicitly required from all provi...

Page 3: ...usehold waste Product Category With reference to the equipment types in the WEEE Directive Annex I this product is classed as a Monitoring and Control instrumentation product Do not dispose in domestic household waste To return unwanted products contact your local Keysight office or visit the following website for more information http about keysight com en companyinfo environment ...

Page 4: ...es reference information for application test definitions PLSDIV test definitions used for the pulsed IV measurement Chapter 6 PLSDIV TIS Commands Provides reference information for execution files Plsdiv commands PLSDIV TIS used in the PLSDIV test definitions Chapter 7 Status Code and Error Messages Lists the status code and the error messages NOTE The pulsed IV test system consists of some instr...

Page 5: ... 2 6 Connecting Interface Cables 2 7 Installing Pulsed IV Test System 2 8 Connecting RF Probes 2 13 Connecting DC Probes 2 14 Software Installation 2 16 System Requirements 2 17 Installing Software 2 17 Installing Cable Compensation Data 2 17 After Software Installation 2 18 Updating Software 2 19 Removing Pulsed IV Software 2 19 Rack mounting Instruments 2 20 Rack mounting Pulse dc Switch Units 2...

Page 6: ... 11 Executing Action 3 12 Compensation Action 3 13 Pgu Compensation Action 3 13 4 Performing Measurement Theory of Measurement 4 3 Terminal Voltage and Source Output Value 4 4 Before Measurement 4 5 Performing System Reset 4 6 Pulse Waveform Measurement 4 7 Pulsed Id Vd Measurement 4 9 Pulsed Id Vg Measurement 4 11 DC I V Measurements 4 13 5 PLSDIV Test Definitions PLSDIV Capt Wave 5 4 PLSDIV DC I...

Page 7: ...rs 6 5 Defining Numeric Vector Input Parameter 6 6 Defining String Numeric Input Parameters 6 6 Defining Numeric Output Parameter 6 6 Defining Vector Output Parameter 6 7 Defining String Output Parameter 6 7 Defining Format Field 6 7 Setup Example 6 8 Command Reference 6 9 DispMessage 6 10 PlsdivCaptureMonData 6 11 PlsdivCaptureTimeData 6 12 PlsdivCutoffVd 6 13 PlsdivCutoffVg 6 13 PlsdivErrorMessa...

Page 8: ...tStat 6 18 PlsdivSetAveraging 6 18 PlsdivSetDeviceDelay 6 19 PlsdivSetMeasTime 6 20 PlsdivSetPulseWidth 6 21 PlsdivSetSampling 6 21 PlsdivSetSmoothing 6 22 PlsdivSetTransTime 6 23 PlsdivSetVgLevel 6 23 PlsdivUninit 6 24 7 Status Code and Error Messages ...

Page 9: ...1 Introduction ...

Page 10: ... for B1500 EasyEXPERT is a solution package for the Keysight B1500A or Desktop EasyEXPERT users and provides the automated pulsed IV test environment This chapter introduces Keysight B1542A and consists of the following sections Overview Typical Technical Information Accessories and Options ...

Page 11: ...ies of Parametric Measurement Solutions by using the Desktop EasyEXPERT software System Hardware The pulsed IV test system can be configured by using the following equipment See Figure 1 1 The B1542A provides the accessories used to connect the equipment Keysight B1500A Semiconductor Device Analyzer Oscilloscope minimum two measurement channels see Table 1 1 Pulse Generator minimum one output chan...

Page 12: ...3 4 6 8 10 12 13 GHz 4 channels 40 GSa s when using 1 or 2 channels 20 GSa s when using all channels DSO9104A 9254A 9404A MSO9104A 9254A 9404A 1 2 5 4 GHz 4 channels 20 GSa s DSO90254A 90404A 90604A 2 5 4 6 GHz 4 channels 20 GSa s DSOS104A S204A S254A DSOS404A S604A S804A MSOS104A S204A S254A MSOS404A S604A S804A 1 2 2 5 4 6 8 GHz 4 channels 20 GSa s DSO MSO S series oscilloscope is supported as D...

Page 13: ...B1542A also provides the test definition used for the system setup Pulsed IV Id Vd characteristics measurement Pulsed IV Id Vg characteristics measurement Pulsed IV waveform measurement DC Id Vd characteristics measurement for B1500A DC Id Vg characteristics measurement for B1500A Pulsed IV system reset Pulsed IV system setup DC I V sweep measurement for 4155 4156 E5260 E5270 DC Id Vd characterist...

Page 14: ... by Keysight B1542A Those are not the specifications but the typical and supplemental data the test system can provide Gate pulse width 10 ns to 1 s Gate pulse voltage 4 5 V to 4 5 V Gate pulse base line voltage 3 0 V to 3 0 V Gate pulse amplitude maximum 4 5 V Gate pulse period 100 s Drain pulse maximum measurement current 80 mA Drain pulse current measurement resolution 1 A Drain voltage range 1...

Page 15: ...80A Return to Keysight warranty and service plan R1282A Return to Keysight calibration plan Description Quantity Software license to use media and manual Pulsed IV package software CD ROM 1 Drain cable compensation data CD ROM 1 Desktop EasyEXPERT software CD ROM 1 User s Guide English 1 Drain cable set Triaxial cable 1 5 m 1 BNC m Triax f adapter floating guard 1 SMA f BNC m adapter precision typ...

Page 16: ...able 1 5 m 1 SMA f m f adapter 1 Terminator dc 26 5 GHz 3 5 m with option 011 1 SMA m SMA m adapter 1 Magnet sheet for fixing the divider 1 Docking interface BNC cable 1 5 m 2 Triaxial cable 1 5 m 1 GNDU chassis adapter 1 Triaxial cable 1 5 m 1 BNC m f f adapter 1 BNC m Triax f adapter floating guard 1 GPIB cable 1 m 2 Torque wrench 5 lb 1 Torque wrench 8 lb 1 Open end wrench 5 16 inch 1 Open end ...

Page 17: ...nit 1 Triaxial cable 1 5 m 2 D sub 9 pin cable 3 m 2 Wrench T10 1 GPIB cable 1 m 1 Rack mount kit for pulse dc switch units Panel 1 Rail kit for pulse dc switch units 1 Rail kit for pulse dc switch units 1 Support rail for rack mounting oscilloscope 7 EIA maximum onto Keysight 1181B testmobile system cart 2 Screw 12 Screw 2 Nut 8 Wire 3 Screw 8 Pulsed IV DC probe cable set SMA f SSMC cable 1 SMA m...

Page 18: ...1 10 Keysight B1542A User s Guide Edition 10 Introduction Accessories and Options ...

Page 19: ...2 Installation ...

Page 20: ...lete the rack mounting see Hardware Installation on page 2 6 to install the system equipment CAUTION Using Torque Wrench and Open end Wrench For the RF measurements it is important to carefully contact and fasten the connectors of the RF cables The condition of the cable connections may change the measurement result characteristics Therefore treat the RF cables carefully especially the RF connecto...

Page 21: ... sign of damage that might have occurred during shipment such as dents scratches cuts water marks If you suspect any damage notify your local Keysight Technologies sales or service office 2 When you open the boxes containing the B1542A check the components against the contents lists attached to the boxes See also Table 1 4 If anything is missing notify your local Keysight Technologies sales or ser...

Page 22: ... via the shielding of the measurement path RF probes and measurement cables See Figure 2 2 Figure 2 1 RF Probe Connection Prepare two RF probes to perform the pulsed IV measurement The RF probe must have the signal line and the ground lines as shown in Figure 2 2 The signal line is to contact the gate or drain pad and the ground lines are to contact the source well pads For the RF probe and its in...

Page 23: ... 3 for the contact pads and the DC probes Required cables for connecting the DC probes are furnished with the B1542A as the DC probe cable set For more information see Connecting DC Probes on page 2 14 When using DC probes minimum pulse width should be limited to approximately 60 ns to 100 ns Figure 2 3 Contact Pad and DC Probe Connection Terminator Well Gate Source Drain This makes a current retu...

Page 24: ... in Figure 2 5 Installing Instruments Connecting Interface Cables Installing Pulsed IV Test System Connecting RF Probes Connecting DC Probes Installing Instruments The pulsed IV test system uses the DC source monitor pulse generator oscilloscope and switch controller with switch units Install the instruments to the appropriate place See Figure 2 4 for example For more information see the manual of...

Page 25: ...DC source monitor and the pulse generator 2 Connect a GPIB cable between the switch controller and one of above instruments 3 For the Desktop EasyEXPERT users Connect a GPIB cable between your computer and one of above instruments 4 Connect the oscilloscope as shown below For using the DSO MSO 9000 series or S series oscilloscope a Connect the B1500A or your computer to a LAN b Connect the oscillo...

Page 26: ...n overview of the pulsed IV test system is shown in Figure 2 5 To install the system perform the following steps 1 Connecting Switch Controller on page 2 10 2 Making Measurement Path for Gate on page 2 11 3 Making Measurement Path for Drain on page 2 12 4 Connecting RF Probes on page 2 13 or Connecting DC Probes on page 2 14 ...

Page 27: ... Switch control distributor to SMU Force for gate voltage at DC test to SMU Force for drain voltage at DC test to SMU Force for drain DC bias Drain pulse dc switch unit Gate pulse dc switch unit SMA cable 0 3 m SMA cable 0 3 m SMA cable 1 5 m DUT cable 1 5 m to input channel for drain to input channel for gate Drain Current Monitor Gate Pulse Monitor SMU SMU BNC cable to TRIGGER OUT to AUX Trig In...

Page 28: ...tch distributor Switch 1 connector and the gate pulse dc switch unit 5 Connect the D sub 9 pin cable between the switch distributor Switch 2 connector and the drain pulse dc switch unit Required accessories and equipment Viking cable 1 ea D sub 9 pin cable 2 ea Switch Controller 1 ea Switch Control Distributor 1 ea Gate Pulse dc Switch Unit with divider 1 ea Drain Pulse dc Switch Unit with bias T ...

Page 29: ...or BNC m SMA f adapter precision type 1 ea for oscilloscope BNC cable 1 ea SMA cable 0 3 m 1 ea SMA cable 1 5 m 1 ea Triaxial cable 1 ea Figure 2 7 Measurement Path for Gate Scope DC source monitor Triaxial cable Pulse generator to SMU Force for gate voltage at DC test Gate pulse dc switch unit SMA cable 0 3 m BNC cable SMA cable 1 5 m to input channel for gate 2 Gate Pulse Monitor SMU tooutputcha...

Page 30: ...ctors Required accessories BNC m SMA f adapter precision type 1 ea for oscilloscope SMA cable 0 3 m 1 ea BNC m Triax f adapter floating guard 1 ea Triaxial cable 2 ea Figure 2 8 Measurement Path for Drain Scope DC source monitor Triaxial cables to SMU Force for drain voltage at DC test to SMU Force for drain DC bias Drain pulse dc switch unit SMA cable 0 3 m Drain Current Monitor SMU to input chan...

Page 31: ...1 Connect a DUT cable between a RF probe and the bias T s RF DC connector or the Drain pulse dc switch unit s DUT connector of the pulsed IV test system And set the RF probe to the appropriate place 2 Connect the SMA adapters terminator and a DUT cable between a RF probe and the divider or the Gate pulse dc switch unit s DUT connector of the pulsed IV test system And set the RF probe to the approp...

Page 32: ...pulsed IV DC probe cable set SMA f SSMC cable 1 ea part of the pulsed IV DC probe cable set SSMC short open cable 3 ea parts of the pulsed IV DC probe cable set 50 mm or 75 mm cable length Use appropriate one For the external view and the internal connection see Figure 2 11 Figure 2 10 DC Probe Connections Terminator Well Gate Source Drain 1 2 3 4 5 Gate DC probe Source DC probe Signal Signal Gnd ...

Page 33: ...ide This electrically connects the Source probe needle Source probe shield and Drain probe shield together 5 Connect a SSMC short open cable between the Well DC probe and the Source DC probe and set the DC probe to the appropriate place Then the black sleeve plug must be the Source side This electrically connects the Well probe needle Well probe shield and Source probe shield together 6 Connect a ...

Page 34: ...lling Software Installing Cable Compensation Data and After Software Installation in this order To update the pulsed IV system software perform the instruction described in Updating Software NOTE This section uses the following conventions system drive Drive the pulsed IV system software is installed program folder Following folder For Windows 7 64 bit version system drive Program Files x86 For B1...

Page 35: ...1 Exit EasyEXPERT software or Desktop EasyEXPERT software If the Start EasyEXPERT window is opened close it 2 Insert the Pulsed IV package software CD ROM into the disk drive 3 Execute the setup exe in the CD ROM 4 Follow the instructions of the setup wizard And wait until the program installation is completed 5 After the installation remove the CD ROM from the disk drive Installing Cable Compensa...

Page 36: ...w from the following folder program folder Agilent PLSDIV TestDefinitions Import1st PLSDIV IdVd PLSDIV IdVd 2 PLSDIV IdVg PLSDIV IdVg 2 PLSDIV DC IdVd PLSDIV DC IdVg PLSDIV Capt Wave PLSDIV Setup PLSDIV Reset PLSDIV IV SMU 5 Import the pulsed IV test definitions listed below from the following folder program folder Agilent PLSDIV TestDefinitions Import2nd PLSDIV DC IdVd SMU PLSDIV DC IdVg SMU 6 Op...

Page 37: ... delete all of the pulsed IV test definitions 6 Remove the pulsed IV system software now installed See Removing Pulsed IV Software on page 2 19 7 Install the latest revision of the pulsed IV system software See Installing Software on page 2 17 8 Install the drain cable compensation data See Installing Cable Compensation Data on page 2 17 9 Import the pulsed IV test definitions See After Software I...

Page 38: ...troller see manual of each instrument Figure 2 12 Image of Rack Mount See Rack mounting Pulse dc Switch Units on page 2 21 for rack mounting the switch units The required parts for rack mounting the switch units and the B1500A are listed in Table 2 1 Table 2 1 Required Parts for Rack mounting B1500A and Switch Units B1500A Oscilloscope Switch Controller Switch Unit 2 ea Pulse Generator Blank Panel...

Page 39: ...anel by mounting the following units on the panel A Use screws listed above to fix the units 4 Align the pulse dc switch unit panel A with D E and F with the rail assemblies secured to the system rack in the step 2 gently slide the panel on the rails until it stops and secure the panel to the system rack by using the typical rack mounting method of the rack mount flange kit Reference Designator Ke...

Page 40: ...tion 10 Installation Rack mounting Instruments Figure 2 13 Assembling Rail Kit Figure 2 14 Rack mounting Pulse dc Switch Units B1542 01212 B1542 01211 Screw Screw hole Screw hole Screw hole not used Screw hole not used C A B E D F 4 2 2 3 ...

Page 41: ...3 Performing System Setup and Compensation ...

Page 42: ...Configuration Executing Action NOTE Before Starting System Setup The pulsed IV test system must be installed correctly See Chapter 2 Installation Then do not forget to install the compensation data files NOTE Drain Cable Replacement It is inadequate to replace only the defective part when you find any defect in the drain measurement path The compensation data of the measurement path must be also u...

Page 43: ... the setup parameters see Table 3 3 Compensation This action is necessary to obtain and update the compensation factors of the pulsed IV test system Skew Measurement This action performs the skew measurement which is one of the measurements performed in the Compensation action If the skew measurement error occurs during the Compensation action is executed you can perform only the skew measurement ...

Page 44: ...lation System Configuration Compensation after changing interface address of an instrument System Configuration after changing a channel assignment System Configuration Compensation after repair of oscilloscope Compensation after calibration of oscilloscope Compensation after replacing oscilloscope Compensation after replacing bias T Drain Cable Replacement after replacing measurement cables to dr...

Page 45: ...nstruments use Keysight Connection Expert on the system controller Or see the manual of each instrument to know how to set the GPIB address PGU DSO and SMU Enter GPIB address of the pulse generator PGU oscilloscope DSO and DC source monitor SMU If Controller B1500 Internal SMU field is not active If DSO DSO9000A series DSO field is not active Option button Opens a dialog box See LAN Setup for DSO ...

Page 46: ...ted 2 Connect BNC cable between the pulse generator TRIGGER OUT connector and the oscilloscope AUX Trig In connector if it is still not connected 3 Turn on the system instruments On the Keysight Connection Expert 1 If the B1500A displays the Start EasyEXPERT window close it first 2 Launch Keysight Connection Expert see Figure 3 1 3 Check the GPIB configuration The System Controller must be set to ...

Page 47: ... Table 3 5 Before performing this procedure the oscilloscope and B1500A or computer must be connected to the LAN of the same subnet mask 1 On the oscilloscope front panel check the IP address of the oscilloscope See the oscilloscope manual for checking the IP address web address 2 If the B1500A or computer displays the Start EasyEXPERT window close it first 3 Launch Keysight Connection Expert 4 Hi...

Page 48: ...ller and the system instruments if it is still not connected 2 Connect BNC cable between the pulse generator TRIGGER OUT connector and the oscilloscope AUX Trig In connector if it is still not connected 3 Turn on the system instruments On the Keysight Connection Expert 1 If the computer displays the Start EasyEXPERT window close it first 2 Launch Keysight Connection Expert see Figure 3 2 3 Check t...

Page 49: ...ft ware can control the DC source monitor Select this mode for using the 4155B 4155C 4156B 4156C E5260A or E5262A E5263A or E5270B Model Select 4155B 4155C 4156B or 4156C to be used Or select B1500A for using the E5260A or E5262A E5263A or E5270B Online Select this mode only for using the B1500A VISA interface ID VISA interface ID of the computer s GPIB interface It must be GPIB0 GPIB address Set ...

Page 50: ...p EasyEXPERT screen The Configuration dialog box is opened 4 Set and save the system configuration parameters by using the Configuration dialog box For the setup parameters see Table 3 3 LAN Setup for DSO Control Dialog Box This dialog box is opened by clicking the Option button on the Configuration dialog box and is used to set the IP address of the DSO MSO 9000 series or S series oscilloscope Se...

Page 51: ...nsation dialog box see Table 3 6 the Compensation action will use the SMU you specify not the Drain Bias SMU CH channel Table 3 6 SMU CH for Compensation If you are using the DC source monitor other than the 4155B C you do not need to specify the SMU However if you want to use the SMU other than the Drain Bias SMU CH channel set the same value to the both fields The Compensation action will use th...

Page 52: ...s Do not set No 3 Click the Extended Setup button and set the SWAddress value SWAddress GPIB address of the switch controller Integer 1 to 32 4 Select the action by using the Action field System Configuration See System Configuration on page 3 10 Compensation See Compensation Action on page 3 13 Skew Measurement Drain Cable Replacement Pgu Compensation See Pgu Compensation Action on page 3 13 5 Cl...

Page 53: ...MU specified by the Sense SMU Slot No field on the SMU CH for Compensation dialog box if you set If you are using the 4155B C connect the cable to the Force connector of the SMU specified by the Sense SMU Slot No field on the SMU CH for Compensation dialog box Pgu Compensation Action Previously the Compensation action must be completed successfully Before starting the Pgu Compensation action click...

Page 54: ...3 14 Keysight B1542A User s Guide Edition 10 Performing System Setup and Compensation Executing Action ...

Page 55: ...4 Performing Measurement ...

Page 56: ...ming System Reset Pulse Waveform Measurement Pulsed Id Vd Measurement Pulsed Id Vg Measurement DC I V Measurements NOTE Preparing Measurement Environment Complete the installation described in Chapter 2 Installation Complete the system setup and the compensation described in Chapter 3 Performing System Setup and Compensation Turn on the instruments And turn on the system controller if it is used L...

Page 57: ...g of the instrument s input output terminals and to avoid the reflection at the gate terminal Figure 4 1 Pulsed IV Measurement Circuit Diagram Simplified measurement circuit is shown in Figure 4 2 Vpgu out is the PGU output voltage pulse top value And VdSet is the SMU output voltage By applying VdSet and Vpgu out to the MOSFET the oscilloscope s drain voltage monitor channel will capture the volta...

Page 58: ... shunt resistor residual resistor and so on Therefore it is required to select which value should be the target voltage before performing the measurement To select it use the drain voltage automatic adjustment function and the gate voltage automatic adjustment function in the pulsed IV test definitions If the drain voltage automatic adjustment function is ON VdInt will be close to the target volta...

Page 59: ...SFET to the pulsed IV test system as shown in RF Probes on page 2 4 and measure the delay time between the gate monitor pulse and the drain monitor pulse by using the oscilloscope Then decide the device delay time shown in Figure 4 3 3 DcSwitch value on Extended Setup dialog box of pulsed IV test setup Set Yes to use the pulse dc switch Do not set No 4 SWAddress value on Extended Setup dialog box ...

Page 60: ...esets the pulsed IV test system Execute this definition when the test system is in any abnormal condition 1 Open the PLSDIV Reset test definition on the EasyEXPERT application test environment 2 Click the Single button at the upper right corner of the EasyEXPERT screen The system reset is performed Figure 4 4 PLSDIV Reset Test Definition ...

Page 61: ...environment 2 Set the measurement condition to the Device Parameters Test Parameters and Extended Test Parameters For the description of the entry fields see PLSDIV Capt Wave on page 5 4 3 Connect the device under test MOSFET as shown in RF Probes on page 2 4 4 Click the Single button at the upper right corner of the EasyEXPERT screen Pulse waveform measurement is started Figure 4 6 is the measure...

Page 62: ...4 8 Keysight B1542A User s Guide Edition 10 Performing Measurement Pulse Waveform Measurement Figure 4 6 Voltage Pulse Measurement Example Figure 4 7 Current Pulse Measurement Example ...

Page 63: ... EasyEXPERT application test environment 2 Set the measurement condition to the Device Parameters Test Parameters and Extended Test Parameters For the description of the entry fields see PLSDIV IdVd PLSDIV IdVd 2 on page 5 19 3 Connect the device under test MOSFET as shown in RF Probes on page 2 4 4 Click the Single button at the upper right corner of the EasyEXPERT screen Pulsed Id Vd measurement...

Page 64: ...4 10 Keysight B1542A User s Guide Edition 10 Performing Measurement Pulsed Id Vd Measurement Figure 4 9 Pulsed Id Vd Measurement Example ...

Page 65: ...e EasyEXPERT application test environment 2 Set the measurement condition to the Device Parameters Test Parameters and Extended Test Parameters For the description of the entry fields see PLSDIV IdVg PLSDIV IdVg 2 on page 5 23 3 Connect the device under test MOSFET as shown in RF Probes on page 2 4 4 Click the Single button at the upper right corner of the EasyEXPERT screen Pulsed Id Vg measuremen...

Page 66: ...4 12 Keysight B1542A User s Guide Edition 10 Performing Measurement Pulsed Id Vg Measurement Figure 4 11 Pulsed Id Vg Measurement Example ...

Page 67: ...se SMU and do not use oscilloscope and pulse generator However you can perform the measurement as shown in the previous sections Table 4 1 lists the DC I V test definitions and the instruments supported by them Table 4 1 DC I V Test Definitions Test Definition Supported Instruments PLSDIV DC IdVd B1500A 4155B C and 4156B C PLSDIV DC IdVg PLSDIV DC IdVd SMU E5260A or E5262A E5263A E5270B PLSDIV DC ...

Page 68: ...4 14 Keysight B1542A User s Guide Edition 10 Performing Measurement DC I V Measurements ...

Page 69: ...5 PLSDIV Test Definitions ...

Page 70: ...onventions system drive Drive the pulsed IV system software is installed program folder Following folder For Windows 7 64 bit version system drive Program Files x86 For B1500A Windows 7 32 bit version and Windows XP system drive Program Files NOTE The PLSDIV test definitions are stored in the following folder program folder Agilent PLSDIV TestDefinitions To use the PLSDIV test definitions import t...

Page 71: ...2 Controls SMU source monitor unit to apply the drain voltage controls PGU pulse generator to apply the gate voltage pulse controls the oscilloscope to monitor the gate voltage and the drain voltage calculates the drain current and displays the Id Vd characteristics PLSDIV IdVg PLSDIV IdVg 2 Controls SMU to apply the drain voltage controls PGU to apply the gate voltage pulse controls the oscillosc...

Page 72: ...pulse waveform Figure 5 1 Pulse Waveform Measurement Result Example Device Parameters The following parameters are available to set the test condition Polarity Polarity of source output Nch applies the specified value or Pch applies the negative specified value See Parameters on page 5 34 Lg Gate length in m 1 nm 4 digits or 1 nm resolution Wg Gate width in m 1 nm 4 digits or 1 nm resolution Temp ...

Page 73: ...ilable to set the test condition For more details see Parameters on page 5 34 TransTime Pulse leading trailing edge transition time in s 2 ns to 500 ns 3 digits or 1 ns resolution For the 81101A minimum value is 5 ns For the 81150A minimum value is 2 5 ns when the following conditions are satisfied or 7 5 ns Pulse amplitude is 2 5 V or less Both pulse base and top are within 2 5 V MeasTime Measure...

Page 74: ...B address of the switch controller Integer 1 to 32 DrainMonMode Drain monitor mode Current or Voltage Test Output The following output parameters are displayed after the test Time Oscilloscope time data in s GateMon Oscilloscope gate voltage waveform data in V DrainMon Oscilloscope drain current waveform in A if DrainMonMode Current Drain voltage waveform data in V if DrainMonMode Voltage The drai...

Page 75: ...ollowing parameters are available to set the source output CableR Residual resistance of the gate measurement path from SMU to terminator 0 4 digits or 1 m resolution TermR Resistance of terminator 1 m 4 digits or 1 m resolution TermR No applies 1E 30 Gate SMU connected to the gate terminal VgStart Secondary sweep start voltage for the gate terminal 10 to 10 V 4 digits or 10 mV resolution VgStop S...

Page 76: ...s VdStart only Number of sweep points VdStop VdStart VdStep 1 VgStart VgStop VgStep The parameters set the secondary sweep source used to apply the gate voltage The number of sweep points is given by the following formula Then ignore the numbers after the decimal point If VgStep 0 the measurement voltage is VgStart only Number of sweep points VgStop VgStart VgStep 1 Gate voltage To apply the speci...

Page 77: ... LONG HoldTime Hold time in s 0 to 655 35 5 digits or 10 ms resolution DelayTime Delay time in s 0 to 655 35 5 digits or 100 s resolution DcSwitch Pulse dc switch units Yes exists DC IV measurement connection will be automatically made or No none SWAddress GPIB address of the switch controller Integer 1 to 32 Test Output The following output parameters are displayed after the test VgSet Gate volta...

Page 78: ...parameters are available to set the source output CableR Residual resistance of the gate measurement path from SMU to terminator 0 4 digits or 1 m resolution TermR Resistance of terminator 1 m 4 digits or 1 m resolution TermR No applies 1E 30 Gate Channel number of the SMU connected to the gate terminal Slot1 to Slot8 Maximum channel number depends on the configuration of DC source monitor VgStart...

Page 79: ...n ignore the numbers after the decimal point If VgStep 0 the measurement voltage is VgStart only Number of sweep points VgStop VgStart VgStep 1 Gate voltage To apply the specified voltage Vg to the gate terminal the SMU output voltage VgSet will be set to the following value VgSet Vg TermR CableR TermR Extended Test Parameters The following parameters are available to set the test condition IgLimi...

Page 80: ...to 655 35 5 digits or 10 ms resolution DelayTime Delay time in s 0 to 655 35 5 digits or 100 s resolution InstType Type of DC source monitor E526x E527x or FLEX415x E526x for Keysight E5260A E527x for Keysight E5270B FLEX415x for Keysight 4155 4156 InstAddress GPIB address of the DC source monitor Integer 1 to 32 DcSwitch Pulse dc switch units Yes exists DC IV measurement connection will be automa...

Page 81: ...following parameters are available to set the source output CableR Residual resistance of the gate measurement path from SMU to terminator 0 4 digits or 1 m resolution TermR Resistance of terminator 1 m 4 digits or 1 m resolution TermR No applies 1E 30 Gate SMU connected to the gate terminal VgStart Primary sweep start voltage for the gate terminal 10 to 10 V 4 digits or 10 mV resolution VgStop Pr...

Page 82: ...s VgStart only Number of sweep points VgStop VgStart VgStep 1 VdStart VdStop VdStep The parameters set the secondary sweep source used to apply the drain voltage The number of sweep points is given by the following formula Then ignore the numbers after the decimal point If VdStep 0 the measurement voltage is VdStart only Number of sweep points VdStop VdStart VdStep 1 Gate voltage To apply the spec...

Page 83: ...HORT MEDIUM or LONG HoldTime Hold time in s 0 to 655 35 5 digits or 10 ms resolution DelayTime Delay time in s 0 to 655 35 5 digits or 100 s resolution DcSwitch Pulse dc switch units Yes exists DC IV measurement connection will be automatically made or No none SWAddress GPIB address of the switch controller Integer 1 to 32 Test Output The following output parameters are displayed after the test Vg...

Page 84: ...g parameters are available to set the source output CableR Residual resistance of the gate measurement path from SMU to terminator 0 4 digits or 1 m resolution TermR Resistance of terminator 1 m 4 digits or 1 m resolution TermR No applies 1E 30 Gate Channel number of the SMU connected to the gate terminal Slot1 to Slot8 Maximum channel number depends on the configuration of DC source monitor VgSta...

Page 85: ...hen ignore the numbers after the decimal point If VdStep 0 the measurement voltage is VdStart only Number of sweep points VdStop VdStart VdStep 1 Gate voltage To apply the specified voltage Vg to the gate terminal the SMU output voltage VgSet will be set to the following value VgSet Vg TermR CableR TermR Extended Test Parameters The following parameters are available to set the test condition IgLi...

Page 86: ... time in s 0 to 655 35 5 digits or 10 ms resolution DelayTime Delay time in s 0 to 655 35 5 digits or 100 s resolution InstType Type of DC source monitor E526x E527x or FLEX415x E526x for Keysight E5260A E527x for Keysight E5270B FLEX415x for Keysight 4155 4156 InstAddress GPIB address of the DC source monitor Integer 1 to 32 DcSwitch Pulse dc switch units Yes exists DC IV measurement connection w...

Page 87: ... IV measurement So PLSDIV IdVd 2 test speed is faster than PLSDIV IdVd Figure 5 2 Pulsed IV Id Vd Measurement Result Example Device Parameters The following parameters are available to set the test condition Polarity Polarity of source output Nch applies the specified value or Pch applies the negative specified value See Parameters on page 5 34 Lg Gate length in m 1 nm 4 digits or 1 nm resolution ...

Page 88: ...V resolution VdStop Primary sweep stop voltage for the drain terminal SMU output 10 V to 10 V 5 digits or 1 mV resolution VdStep Primary sweep step voltage for the drain terminal SMU output 10 V to 10 V 5 digits or 1 mV resolution VdStart VdStop VdStep The parameters set the primary sweep source used to apply the drain voltage The number of sweep points is given by the following formula Then ignor...

Page 89: ...mplNum Oscilloscope sampling number 16 to 262144 6 digits or 1 step SmthNum Oscilloscope smoothing number 3 to 4001 4 digits or 1 step SmthStat Status of the oscilloscope smoothing Enable or Disable AvgNum Oscilloscope averaging number 1 to 4095 4 digits or 1 step VdAdjust Status of the drain voltage automatic adjustment Enable or Disable VgAdjust Status of the gate voltage automatic adjustment En...

Page 90: ...oltage automatic adjustment IdPerWg Drain current per unit gate width in A m IdPerWg Id Wg VgMon VdInt and Id values will be the value obtained at the data extraction timing on the pulse top See Figure 5 9 VdConv and VgConv returns 0 convergence condition is satisfied or 1 not satisfied If the automatic adjustment is OFF 0 is returned If the drain voltage automatic adjustment function is ON VdInt ...

Page 91: ... IV measurement So PLSDIV IdVg 2 test speed is faster than PLSDIV IdVg Figure 5 4 Pulsed IV Id Vg Measurement Result Example Device Parameters The following parameters are available to set the test condition Polarity Polarity of source output Nch applies the specified value or Pch applies the negative specified value See Parameters on page 5 34 Lg Gate length in m 1 nm 4 digits or 1 nm resolution ...

Page 92: ...solution VdStop Secondary sweep stop voltage for the drain terminal SMU output 10 V to 10 V 5 digits or 1 mV resolution VdStep Secondary sweep step voltage for the drain terminal SMU output 10 V to 10 V 5 digits or 1 mV resolution VgStart VgStop VgStep The parameters set the primary sweep source used to apply the gate voltage The number of sweep points is given by the following formula Then ignore...

Page 93: ...mplNum Oscilloscope sampling number 16 to 262144 6 digits or 1 step SmthNum Oscilloscope smoothing number 3 to 4001 4 digits or 1 step SmthStat Status of the oscilloscope smoothing Enable or Disable AvgNum Oscilloscope averaging number 1 to 4095 4 digits or 1 step VdAdjust Status of the drain voltage automatic adjustment Enable or Disable VgAdjust Status of the gate voltage automatic adjustment En...

Page 94: ...oltage automatic adjustment IdPerWg Drain current per unit gate width in A m IdPerWg Id Wg VgMon VdInt and Id values will be the value obtained at the data extraction timing on the pulse top See Figure 5 9 VdConv and VgConv returns 0 convergence condition is satisfied or 1 not satisfied If the automatic adjustment is OFF 0 is returned If the drain voltage automatic adjustment function is ON VdInt ...

Page 95: ...100 V 6 digits or 1 V resolution StopV1 Primary sweep stop voltage 100 to 100 V 6 digits or 1 V resolution StepV1 Primary sweep step voltage 100 to 100 V 6 digits or 1 V resolution Comp1 Primary sweep current compliance in A 100 mA to 100 mA 6 digits or 1 fA resolution StartV1 StopV1 StepV1 The parameters set the primary sweep source used to apply the drain voltage The number of sweep points is gi...

Page 96: ...ement Slot1 to Slot8 Maximum channel number depends on the configuration of DC source monitor RangeMode Current measurement ranging mode Auto LimitedAuto or Fixed MeasRange Current measurement range 10 pA to 100 mA 6 digits or 10 pA resolution Available measurement range depends on the type of SMU ADCType Only for the E5260 E5270 series Type of A D converter HighSpeed or HighResolution IntegMode O...

Page 97: ...E526x for Keysight E5260A E527x for Keysight E5270B FLEX415x for Keysight 4155 4156 AddrGPIB GPIB address of the DC source monitor Integer 1 to 32 Test Output The following output parameters are displayed after the test SweepV1 Primary sweep source output data in V This is the X axis data of the X Y graph SweepV2 Secondary sweep source output data in V IMeas1 Current measurement data in A This is ...

Page 98: ...ging samples given by the following formula 1 to 100 Number of averaging samples IntegNum 128 The E5260 E5270 gets 128 samples in a power line cycle repeats this for the times you specify and performs averaging to get the measurement data HighResolution Auto Value that defines the integration time given by the following formula 1 to 127 Integration time IntegNum system defined value where system d...

Page 99: ...e Edition 10 5 31 PLSDIV Test Definitions PLSDIV Reset PLSDIV Reset This test definition resets and initializes the pulsed IV test system Device Parameters None Test Parameters None Extended Test Parameters None Test Output None ...

Page 100: ... system setup System Configuration Compensation Skew Measurement Drain Cable Replacement Pgu Compensation For the actions see Pulsed IV System Setup on page 3 3 Extended Test Parameters Set the switch controller GPIB address to the SWAddress field The other fields are only for the Pgu Compensation action SWAddress GPIB address of the switch controller Integer 1 to 32 PulseBase Only for Pgu Compens...

Page 101: ...ion 10 5 33 PLSDIV Test Definitions PLSDIV Setup MeasTime Only for Pgu Compensation Measurement timing at the pulse top 1 to 1 3 digits or 0 01 resolution For more details of the parameters see Parameters on page 5 34 Test Output None ...

Page 102: ...re 5 6 shows the polarity of gate pulse voltage DeviceDelay DeviceDelay defines the delay time set to the oscilloscope and used to compensate a skew caused by the device under test This is important to synchronize the gate pulse and the drain pulse Check the pulse waveform and read the delay time between the gate pulse and the drain pulse Figure 5 6 Polarity Figure 5 7 DeviceDelay PulseBase Vg 1 P...

Page 103: ...e automatic adjustment function to obtain the stable gate pulse voltage See VgAdjust on page 5 38 Pulse amplitude must be 55 mV and 4 5 V To use the gate voltage automatic adjustment function set the pulse amplitude to 4 0 V TransTime TransTime is the gate pulse transition time for both leading and trailing edges and defined as shown in Figure 5 8 Initially this value is set to 2 ns Changing this ...

Page 104: ...ange this value check the pulse waveform and choose the point where the pulse voltage is flat and stable Figure 5 9 MeasTime SmplNum SmplNum defines the sampling number set to the oscilloscope Set the value in order to display the pulse waveform on the oscilloscope screen A small number will improve measurement throughput Sampling rate of the oscilloscope is set to the value automatically calculat...

Page 105: ...to reduce variations caused by high frequency components Set the value in order to display the pulse waveform on the oscilloscope screen A too large number of smoothing points loses waveform edges which disturbs accurate results Figure 5 10 Smoothing Function AvgNum AvgNum specifies the measurement averaging number set to the oscilloscope The scope measures pulse waveform the specified number of t...

Page 106: ...function OFF This brings higher measurement throughput VgAdjust VgAdjust sets the gate voltage automatic adjustment function ON or OFF This function is used to obtain stable gate voltage When this function is OFF the PGU applies Vg specified gate voltage When this function is ON the PGU output level will be automatically controlled so that Vg is applied to the gate terminal If you do not mind the ...

Page 107: ...tor is not connected T adapter is connected instead of divider bias T s DC RF connector is connected to the gate monitor channel GateZero GateZero sets the gate monitor channel zero measurement ON or OFF This function is used to measure the offset data of the gate voltage monitor path and update the offset value stored in a system file Before performing the offset measurement the measurement cable...

Page 108: ...5 40 Keysight B1542A User s Guide Edition 10 PLSDIV Test Definitions Parameters ...

Page 109: ...6 PLSDIV TIS Commands ...

Page 110: ...ence NOTE This chapter uses the following conventions system drive Drive the pulsed IV system software is installed program folder Following folder For Windows 7 64 bit version system drive Program Files x86 For B1500A Windows 7 32 bit version and Windows XP system drive Program Files NOTE The Plsdiv commands are stored in the following folder program folder Agilent PLSDIV PLSDIVExe TISExe To exec...

Page 111: ...ally before the PlsdivCaptureMonData command can be executed NOTE PlsdivUninit makes all Plsdiv commands inexecutable Execute PlsdivInit to use the Plsdiv commands PlsdivCutoffVd makes PlsdivMeasureId inexecutable Execute PlsdivForceVd before PlsdivMeasureId PlsdivCutoffVg makes PlsdivMeasureId inexecutable Execute PlsdivForceVg before PlsdivMeasureId Figure 6 1 Plsdiv Command Execution Sequence P...

Page 112: ...output switch off PlsdivCutoffVg Sets the PGU pulse generator unit output switch off PlsdivErrorMessage Returns the error number and error message for the specified status code PlsdivSetSampling Sets the oscilloscope sampling rate and sampling number for the pulsed IV measurement PlsdivSetSmoothing Enables or disables smoothing of the specified oscilloscope channel PlsdivSetPulseWidth Sets the pul...

Page 113: ...mat Field Command Parameters The Windows Command Execution component supports one input variable and one output variable To use multiple string input parameters or multiple numeric input parameters set the variable as shown below Multiple vector input parameters and multiple output parameters are not supported If the command requires multiple string input parameters use string variables In the Win...

Page 114: ...screen or the Local Variable Definition component in the Test Contents tab screen 2 Set the Write Type to String in the Windows Command Execution component 3 Add a line in the Write String area 4 Enter the variable name for the first parameter in the first line If the command needs multiple input parameters add a line and enter the variable name for the variable in the added line Then observe the ...

Page 115: ...variable name in the String field of the Read String area The Result field and the Length Actually Read field can be blank or the name of a numeric variable defined in the Test Specification or Local Variable Definition The variable will be used to receive the command execution result or the length of the returned string data Defining Format Field The Format field requires a keyword to specify a d...

Page 116: ...y must be defined in the Test Specification tab screen or the Local Variable Definition component on the Test Contents tab screen Input parameter values must be set to the variables before executing the command Four data will be assigned to read_data in sequence Table 6 3 Windows Command Execution Setup Example F Meaning F Meaning C or c Circulation N or n Numeric D or d Decimal numeric P or p Per...

Page 117: ... the command if any exists 7 Lists the output parameters Read String Read Value or Read List returned by the command if any exists 8 Describes the response execution result returned by the command and can be read by using the Result field of the Read String Value List area if it exists 9 Explains any additional information NOTE The Plsdiv commands are stored in the following folder program folder ...

Page 118: ...command opens a pop up window and displays the specified string This command can be executed without the PlsdivInit command Filename DispMessage exe Write Type String Read Type None Write String This command needs the following input parameter message Specify a message to display in the pop up window ...

Page 119: ... 0 gate or 1 drain sampling_num Sampling number of oscilloscope Numeric value 16 to 262144 The value must be the same as the sampling_num parameter value set to the PlsdivSetSampling command drain_mode Drain data type Numeric value 0 voltage or 1 current If term 0 this command returns the gate voltage data If term 1 and drain_mode 0 this command returns the drain voltage data If term 1 and drain_m...

Page 120: ... String This command needs the following input parameter sampling_num Sampling number of oscilloscope Numeric value 16 to 262144 The value must be the same as the sampling_num parameter value set to the PlsdivSetSampling command Read List This command returns the following output parameter read_data Oscilloscope horizontal data time data Vector data The number of returned data is sampling_num if t...

Page 121: ...PlsdivErrorMessage If no error is detected by this command execution 0 is returned PlsdivErrorMessage This command returns the error number and error message for the specified status code For the error code and message see Status Code and Error Messages on page 7 1 Filename PlsdivErrMessage exe Write Type String Read Type String Write String This command needs the following input parameter status_...

Page 122: ...eturns the gate voltage monitor value Execution Conditions PlsdivSetPulseWidth and PlsdivSetVgLevel commands must be executed before this command in this sequence Filename PlsdivForceVg exe Write Type String However this command does not need any input parameter Read Type List Read List This command returns the following output parameters in this sequence To read the values specify a vector variab...

Page 123: ... connect_check Connection check status Numeric value 0 does not perform or 1 performs connection check in the PlsdivInit process gate_zero Gate zero status Numeric value 0 does not perform or 1 performs gate monitor channel offset measurement in the PlsdivInit process Gate Zero This function is used to measure the offset data of the gate voltage monitor path and update the offset value in a system...

Page 124: ...6 3 Bias T connection Response Status code Numeric value To read the error message use PlsdivErrorMessage If no error is detected by this command execution 0 is returned Pulse Generator Gate pulse source channel Gate pulse monitor channel Divider Terminator DigitalStorage Oscilloscope Bias T RF DC DC RF Keysight B1500A toSMUForce terminal on the B1500A rear panel DigitalStorage Oscilloscope Drain ...

Page 125: ...ue This mode will improve measurement throughput Read List This command returns the following output parameters in this sequence To read the values specify a vector variable in the Values field of the ReadList area The values are stored in the first element to the fourth element of the vector variable id Drain current calculated from vd_actual Numeric value in A vd_set Drain voltage SMU output val...

Page 126: ...te Type String Read Type String However this command does not return any output parameter Write String This command needs the following input parameters in this sequence term Terminal Numeric value 0 gate or 1 drain adj_stat Function status Numeric value 0 off or 1 on Response Status code Numeric value To read the error message use PlsdivErrorMessage If no error is detected by this command executi...

Page 127: ...he device under test apply voltage pulse to the gate terminal and monitor the gate pulse and the drain pulse as shown in Figure 6 4 Filename PlsdivSetDeviceDelay exe Write Type String Read Type String However this command does not return any output parameter Write String This command needs the following input parameter device_delay Delay time caused by test device in second Numeric value 0 000001 ...

Page 128: ... cause measurement errors Filename PlsdivSetMeasTime exe Write Type String Read Type String However this command does not return any output parameter Write String This command needs the following input parameter meas_time Data extraction timing Numeric value 1 to 1 Default value is 0 5 The data extraction timing is specified by the rate for the pulse width as shown in Figure 6 5 Figure 6 5 Data Ex...

Page 129: ...essage use PlsdivErrorMessage If no error is detected by this command execution 0 is returned Figure 6 6 Pulse Setup Parameters PlsdivSetSampling This command sets the oscilloscope sampling rate and sampling number for the pulsed IV measurement Remarks Adjust the sampling number and the sampling rate carefully to obtain the waveform you desire To obtain faster measurement throughput decrease the s...

Page 130: ...etSmoothing exe Write Type String Read Type String However this command does not return any output parameter Write String This command needs the following input parameters in this sequence ch Oscilloscope channel Numeric value 0 channel for gate or 1 channel for drain smooth_stat Smoothing function on or off Numeric value 0 off or 1 on smooth_num Number of measurement points used for smoothing Num...

Page 131: ...e String This command needs the following input parameter trans_time Transition time in second Numeric value 2 ns to 200 ms This value must be less than half of the pulse_width parameter value set to the PlsdivSetPulseWidth command For the 81101A minimum value is 5 ns For the 81150A minimum value is 2 5 ns when the following conditions are satisfied or 7 5 ns Pulse amplitude is 2 5 V or less Both ...

Page 132: ...utomatic adjustment function set vg_high vg_base 4 0 V Figure 6 7 Pulse Level and Polarity Response Status code Numeric value To read the error message use PlsdivErrorMessage If no error is detected by this command execution 0 is returned PlsdivUninit This command resets the pulsed IV test system all instruments and closes GPIB communication to each instrument After executing this command any Plsd...

Page 133: ...7 Status Code and Error Messages ...

Page 134: ...Service Center To get the latest firmware software manuals support information go to www keysight com and type in B1542A in the Search field at the top of the page NOTE This chapter uses the following conventions system drive Drive the pulsed IV system software is installed user name Windows login account program folder Following folder For Windows 7 64 bit version system drive Program Files x86 F...

Page 135: ...nstrument manual SYSPIV_ERROR_PARAMETER1 BFFC1010 4112 Invalid value for parameter 1 SYSPIV_ERROR_PARAMETER2 BFFC1011 4113 Invalid value for parameter 2 SYSPIV_ERROR_PARAMETER3 BFFC1012 4114 Invalid value for parameter 3 SYSPIV_ERROR_PARAMETER4 BFFC1013 4115 Invalid value for parameter 4 SYSPIV_ERROR_PARAMETER5 BFFC1014 4116 Invalid value for parameter 5 SYSPIV_ERROR_PARAMETER6 BFFC1015 4117 Inval...

Page 136: ...before this command SYSPIV_ERROR_CPM_SAMPLING_NUM_INCO MPATIBLE BFFC1023 4131 PlsdivCaptureMonData Define the same value as the sampling number specified by PlsdivSetSampling SYSPIV_ERROR_CPM_DRAIN_MODE_INVALI D BFFC1024 4132 PlsdivCaptureMonData The drain data type must be 0 voltage or 1 current SYSPIV_ERROR_CPM_RET_PTR_NULL BFFC1025 4133 PlsdivCaptureMonData Specify the variable used for read_da...

Page 137: ...MPLING_N OT_COMPLETED BFFC1030 4144 PlsdivCaptureTimeData Execute PlsdivSetSampling before this command SYSPIV_ERROR_CPT_SAMPLING_NUM_DEFI NITION BFFC1031 4145 PlsdivCaptureTimeData Define the sampling number in PlsdivSetSampling Do not set 0 SYSPIV_ERROR_CPT_MEASURE_ID_NOT_CO MPLETED BFFC1032 4146 PlsdivCaptureTimeData Execute PlsdivMeasureId before this command SYSPIV_ERROR_CPT_SAMPLING_NUM_INCO...

Page 138: ...sdivInit before this command SYSPIV_ERROR_FVG_PIV_SET_PULSE_WIDT H_NOT_COMPLETED BFFC1049 4169 PlsdivForceVg Execute PlsdivSetPulseWidth before this command SYSPIV_ERROR_FVG_PIV_SET_VG_LEVEL_N OT_COMPLETED BFFC104A 4170 PlsdivForceVg Execute PlsdivSetVgLevel before this command SYSPIV_ERROR_FVG_PIV_SET_SMTH_NOT_C OMPLETED BFFC104B 4171 PlsdivForceVg Execute PlsdivSetSmoothing before this command S...

Page 139: ...ON_PULSE_C ONFIG_FILE BFFC1057 4183 PlsdivInit gate_pulse cf permission error Set read permission for this user SYSPIV_ERROR_INIT_AN_ERROR_ON_PULSE _CONFIG_FILE BFFC1058 4184 PlsdivInit gate_pulse cf open error Reinstall the pulsed IV software SYSPIV_ERROR_INIT_KEYWORD_ON_PULSE_ CONFIG_FILE BFFC1059 4185 PlsdivInit gate_pulse cf keyword error Reinstall the pulsed IV software SYSPIV_ERROR_INIT_NO_I...

Page 140: ...mp is not found Reinstall the pulsed IV software SYSPIV_ERROR_INIT_PERMISSION_DIVIDER_ COMP_FILE BFFC1063 4195 PlsdivInit divider cmp permission error Set read permission for this user SYSPIV_ERROR_INIT_AN_ERROR_ON_DIVIDE R_COMP_FILE BFFC1064 4196 PlsdivInit divider cmp open error Reinstall the pulsed IV software SYSPIV_ERROR_INIT_KEYWORD_ON_DIVIDE R_COMP_FILE BFFC1065 4197 PlsdivInit divider cmp ...

Page 141: ...FFC106D 4205 PlsdivInit drain_trans cmp open error Reinstall the pulsed IV software SYSPIV_ERROR_INIT_KEYWORD_ON_DRAIN _COMP_FILE BFFC106E 4206 PlsdivInit drain_trans cmp keyword error Reinstall the pulsed IV software SYSPIV_ERROR_INIT_PULSE_PARAMETER_M ISMATCH_ON_DRAIN_COMP_FILE BFFC106F 4207 PlsdivInit drain_trans cmp pulse parameter mismatch It must be same as the parameter in gate_pulse cf Rei...

Page 142: ..._AN_ERROR_ON_EQUIV _Z_FILE BFFC1077 4215 PlsdivInit scope_equiv_z cmp open error Reinstall the pulsed IV software SYSPIV_ERROR_INIT_KEYWORD_ON_EQUIV_ Z_FILE BFFC1078 4216 PlsdivInit scope_equiv_z cmp keyword error Reinstall the pulsed IV software SYSPIV_ERROR_INIT_PULSE_PARAMETER_M ISMATCH_ON_EQUIV_Z_FILE BFFC1079 4217 PlsdivInit scope_equiv_z cmp pulse parameter mismatch It must be same as the pa...

Page 143: ...88 4232 PlsdivMeasureId Execute PlsdivInit before this command SYSPIV_ERROR_MID_PIV_SET_AVG_NOT_CO MPLETED BFFC1089 4233 PlsdivMeasureId Execute PlsdivSetAveraging before this command SYSPIV_ERROR_MID_PIV_FORCE_VD_NOT_C OMPLETED BFFC108A 4234 PlsdivMeasureId Execute PlsdivForceVd before this command SYSPIV_ERROR_MID_PIV_FORCE_VG_NOT_C OMPLETED BFFC108B 4235 PlsdivMeasureId Execute PlsdivForceVg be...

Page 144: ...7 PlsdivScopeZeroCancel scope_mon cmp permission error Set read permission for this user SYSPIV_ERROR_ZSC_AN_ERROR_ON_SCOPE _MON_COMP_FILE BFFC1098 4248 PlsdivScopeZeroCancel scope_mon cmp open error Reinstall the pulsed IV software SYSPIV_ERROR_ST_PIV_INIT_NOT_COMPLET ED BFFC109C 4252 PlsdivSelftest Execute PlsdivInit before this command SYSPIV_ERROR_ST_SMU_SELFTEST_FAILED BFFC109D 4253 PlsdivSel...

Page 145: ...Y_OUT_ OF_RANGE BFFC10AE 4270 PlsdivSetDeviceDelay device_delay must be 1 us to 1 us SYSPIV_ERROR_SDD_PIV_INIT_NOT_COMPL ETED BFFC10AF 4271 PlsdivSetDeviceDelay Execute PlsdivInit before this command SYSPIV_ERROR_SMM_ID_CAL_COMP_STAT BFFC10B0 4272 PlsdivSetMeasMode id compensation status must be 0 OFF or 1 ON SYSPIV_ERROR_SMM_ID_LOSS_COMP_STAT BFFC10B1 4273 PlsdivSetMeasMode id loss compensation s...

Page 146: ...RROR_SRR_UPPER_RANGE_RATE_ OUT_OF_RANGE BFFC10C0 4288 PlsdivSetRangingParm Limit to move to upper range must be 0 5 to 1 SYSPIV_ERROR_SRR_LOWER_RANGE_RATE_ OUT_OF_RANGE BFFC10C1 4289 PlsdivSetRangingParm Limit to move to lower range must be 0 5 to 1 SYSPIV_ERROR_SRR_LRR_LARGER_THAN_U RR BFFC10C2 4290 PlsdivSetRangingParm Upper limit must be greater than the lower limit SYSPIV_ERROR_SRR_PIV_INIT_NO...

Page 147: ...e vg_base value It must be same as the system defined value Or turn on the gate voltage adjustment function SYSPIV_ERROR_SVGL_VG_LEVEL_OUT_OF_ RANGE BFFC10D6 4310 PlsdivSetVgLevel vg_high must be 4 5 V to 4 5 V SYSPIV_ERROR_SVGL_VG_HIGH_SMALLER_ THAN_BASE BFFC10D7 4311 PlsdivSetVgLevel vg_high must be greater than vg_base SYSPIV_ERROR_SVGL_VG_AMP_OUT_OF_RA NGE BFFC10D8 4312 PlsdivSetVgLevel Gate p...

Page 148: ...LI MIT BFFC10E7 4327 Gate voltage monitor channel Input impedance is out of the limit Connect measurement cables properly PIVCOMP_ERROR_DRAIN_INPUTZ_OUT_OF_L IMIT BFFC10E8 4328 Drain voltage monitor channel Input impedance is out of the limit Connect measurement cables properly PIVCOMP_ERROR_GATE_CH_GAIN_OUT_OF_ LIMIT BFFC10E9 4329 Gate voltage monitor channel Gain is out of the limit Connect meas...

Page 149: ...the system compensation data PIVCOMP_ERROR_PERMISSION_INPUT_Z_FIL E BFFC10F1 4337 Set read permission for the data folder Agilent PLSDIV PLSD IVExe TISExe Spara folder or delete all input_z_chx_yV s1p files and execute PlsdivInit PIVCOMP_ERROR_AN_ERROR_ON_INPUT_Z_ FILE BFFC10F2 4338 Delete all input_z_chx_yV s1p files and execute PlsdivInit If the error still remains reinstall the pulsed IV softwa...

Page 150: ...data before executing this program PIVCOMP_ERROR_SYS_DELAY_CONNECTION _INVERTED BFFC10F7 4343 Measured delay time of the drain cabling is negative Check the connection of the DSO for the gate pulse monitoring or drain current measurement PIVCOMP_ERROR_INVALID_DCS_TYPE BFFC10F8 4344 Defined DCS is not supported Check the type of DCS Status Code Name Status Code Error Number Error Message ...

Page 151: ..._INV_ASCII_NUMBER BFFC0E06 3590 ASCII to numeric conversion error DVRPGU_INSTR_ERROR_PARAMETER1 BFFC0E10 3600 Invalid value for parameter 1 DVRPGU_INSTR_ERROR_PARAMETER2 BFFC0E11 3601 Invalid value for parameter 2 DVRPGU_INSTR_ERROR_PARAMETER3 BFFC0E12 3602 Invalid value for parameter 3 DVRPGU_INSTR_ERROR_PARAMETER4 BFFC0E13 3603 Invalid value for parameter 4 DVRPGU_INSTR_ERROR_PARAMETER5 BFFC0E14...

Page 152: ...ration file keyword error Reinstall the pulsed IV software DVRPGU_ERROR_GPIB_NUM_ON_CONFIG_FI LE BFFC0E24 3620 Invalid GPIB description Reinstall the pulsed IV software DVRPGU_ERROR_ADDR_ON_CONFIG_FILE BFFC0E25 3621 Invalid BUS address Reinstall the pulsed IV software DVRPGU_ERROR_PGU_TYPE_ON_CONFIG_FI LE BFFC0E26 3622 Invalid PGU type Reinstall the pulsed IV software DVRPGU_ERROR_CHANNEL_ON_CONFI...

Page 153: ...RROR_DEVICE_NOT_OPENED BFFC0E33 3635 Device is not ready Connect the GPIB cable properly DVRPGU_ERROR_SELF_TEST_FAILED BFFC0E34 3636 Selftest failed DVRPGU_ERROR_SELF_CAL_FAILED BFFC0E35 3637 Calibration failed DVRPGU_ERROR_PERIOD_TOO_LONG BFFC0E40 3648 Period value must be 999 5 s or width 3 03 ns DVRPGU_ERROR_PERIOD_TOO_SHORT BFFC0E41 3649 Period must be 6 06 ns DVRPGU_ERROR_WIDTH_TOO_LONG BFFC0...

Page 154: ...fset value must be 10 V DVRPGU_ERROR_OFFSET_TOO_SMALL BFFC0E49 3657 Offset value must be 10 V DVRPGU_ERROR_INT_IMP_INVALID BFFC0E4A 3658 Internal impedance must be 50 ohm or 1 Mohm DVRPGU_ERROR_EXT_IMP_INVALID BFFC0E4B 3659 External impedance must be 50 ohm to 1 Mohm Status Code Name Status Code Error Number Error Message ...

Page 155: ...or DVRSCOPE_INSTR_ERROR_PARAMETER1 BFFC0F10 3856 Invalid value for parameter 1 DVRSCOPE_INSTR_ERROR_PARAMETER2 BFFC0F11 3857 Invalid value for parameter 2 DVRSCOPE_INSTR_ERROR_PARAMETER3 BFFC0F12 3858 Invalid value for parameter 3 DVRSCOPE_INSTR_ERROR_PARAMETER4 BFFC0F13 3859 Invalid value for parameter 4 DVRSCOPE_INSTR_ERROR_PARAMETER5 BFFC0F14 3860 Invalid value for parameter 5 DVRSCOPE_INSTR_ER...

Page 156: ...sed IV software DVRSCOPE_ERROR_GPIB_NUM_ON_CONFIG_FI LE BFFC0F24 3876 Invalid GPIB description Reinstall the pulsed IV software DVRSCOPE_ERROR_ADDR_ON_CONFIG_FILE BFFC0F25 3877 Invalid BUS address Reinstall the pulsed IV software DVRSCOPE_ERROR_SCOPE_TYPE_ON_CONFIG _FILE BFFC0F26 3878 Invalid SCOPE type Use the supported instrument DVRSCOPE_ERROR_SCOPE_TYPE_NOT_MATCH BFFC0F30 3888 Instrument IDN d...

Page 157: ... DVRSCOPE_ERROR_SMOOTHING BFFC0F49 3913 Smoothing number must be less than the sampling number DVRSCOPE_ERROR_TIME_SCALE BFFC0F4A 3914 Time scale must be 5 ps to 20 s DVRSCOPE_ERROR_TIME_OFFSET BFFC0F4B 3915 Horizontal offset value must be 4 scale to 4 scale DVRSCOPE_ERROR_VSCALE BFFC0F4C 3916 Voltage scale must be 1 mV to 1 V in 1 2 5 step DVRSCOPE_ERROR_VOFFSET BFFC0F4D 3917 Change vertical offs...

Page 158: ...ion Not available for the LINE trigger source DVRSCOPE_ERROR_SWEEP_TIME_OUT BFFC0F54 3924 Change timeout value DVRSCOPE_ERROR_SKEW_VAL BFFC0F55 3925 Skew value must be 50 us to 150 us 25 us to 25 us for 80000B series DVRSCOPE_ERROR_THRESHOLD_TYPE BFFC0F56 3926 Threshold type must be UPPER MIDDLE or LOW DVRSCOPE_ERROR_SLOPE_TYPE BFFC0F57 3927 Slope type must be or DVRSCOPE_ERROR_OCCURANCE_VAL BFFC0...

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Page 160: ...This information is subject to change without notice Keysight Technologies 2006 2017 Edition 10 February 2017 B1542 90000 B1542 90000 www keysight com ...