MAC III
5
Keysight 5500 SPM User’s Guide
5-36
frequency. Once the Autotune has been completed, the sample can be
approached to the tip with the approach button.
In the example below, the low frequency (first flexural resonance) was
chosen, indicated by the red marker in
.
Figure 11-17
Frequency spectra for KFM probe
Setting Parameters for AM Mode Operation
The KFM measurements can be performed in different ways. The same
is true for EFM studies, which does not require using the electric servo
loop needed in KFM.
KFM can be performed in two main operations: In the first, the
topography servo uses amplitude modulation (AM) to track the surface
while the KFM servo uses amplitude modulation to track the surface
potential. This first operation is referred to as AM mode.
In the second operation, the topography servo uses amplitude
modulation to track the surface while the KFM servo uses frequency
modulation (FM) to track the surface potential. The second operation is
referred to as FM mode and is described in more detail in
Parameters for FM Mode Operation"
Setting Parameters for Tracking Surface Topography
The Lock-in 1 parameters should be the same for all applications. These
settings will yield measurements in the intermittent contact regime. This
NOTE
A conducting probe is required for these applications.
NOTE
The following procedures are for PicoView 1.10.4 and higher.
