25
Q
Does the frequency make a difference even if the ion balance is equivalent?
A
At a low frequency, the rate that ions are carried to the workpiece is uneven. Since the ion balance
constitutes an average value, the actual voltage fluctuation known as over-voltage has an effect on
the workpiece.
t
t
Long cycle for
generation of positive
and negative ions
Short cycle for
generation of positive
and negative ions
Large voltage
fluctuation
Situation on workpiece surface
when ionizer is used
Low-frequency ionizer
Apparent
ion balance
Small voltage
fluctuation
High-frequency ionizer